• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.256-256
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• 2016

기존의 디스플레이 기슬은 마스크를 통해 특정 부분에만 유기재료를 증착시키는 방법을 사용하였으나, 기판의 크기가 커짐에 따라 공정조건에 제약이 발생하였다. 이를 해결하기 위해 최근 용액 공정에 대한 연구가 활발히 진행되고 있다. 용액 공정은 기존 진공 증착 방식과 비교하였을 때 상온, 대기압에서 증착이 가능하며 경제적이고, 대면적 균일 증착에 유리하다는 장점이 있다. 반면, 용액 공정으로 제작한 소자는 시간이 지남에 따라 점차 전기적 특성이 변하는 aging effect를 보인다. Aging effect는 용액에 포함된 C기와 OH기 기반의 불순물의 영향으로 시간의 경과에 따라서 문턱전압, subthreshold swing 및 mobility 등의 전기적 특성이 변하는 현상으로 고품질의 박막을 형성하기 위해서는 고온의 열처리가 필요하다. 지금까지 고품질 박막 형성을 위한 열처리는 퍼니스 (furnace) 장비에서 주로 이루어졌는데, 시간이 오래 걸리고, 상대적으로 고온 공정이기 때문에 유리, 종이, 플라스틱과 같은 다양한 기판에 적용하기 어렵다는 단점이 있다. 따라서, 본 연구에서는 $100^{\circ}C$ 이하의 저온에서도 열처리가 가능한 microwave irradiation (MWI) 방법을 이용하여 solution-processed InGaZnO TFT를 제작하였고, 기존의 열처리 방식인 furnace로 열처리한 TFT 소자와 aging effect를 비교하였다. 먼저, solution-processed IGZO TFT를 제작하기 위해 p type Si 기판을 열산화시켜서 100 nm의 SiO2 게이트 산화막을 성장시켰고, 스핀코팅 방법으로 a-IGZO 채널층을 형성하였다. 증착후 열처리를 위하여 1000 W의 마이크로웨이브 출력으로 15분간 MWI를 실시하여 a-IGZO TFT를 제작하였고, 비교를 위하여 furnace N2 gas 분위기에서 $600^{\circ}C$로 30분간 열처리한 TFT를 준비하였다. 제작된 직후의 TFT 특성을 평가한 결과, MWI 열처리한 소자가 퍼니스 열처리한 소자보다 높은 이동도, 낮은 subthreshold swing (SS)과 히스테리시스 전압을 가지는 것을 확인하였다. 한편, aging effect를 평가하기 위하여 제작 후에 30일 동안의 특성변화를 측정한 결과, MWI 열처리 소자는 30일 동안 문턱치 전압(VTH)의 변화량 ${\Delta}VTH=3.18[V]$ 변화되었지만, furnace 열처리 소자는 ${\Delta}VTH=8.56[V]$로 큰 변화가 있었다. 다음으로 SS의 변화량은 MWI 열처리 소자가 ${\Delta}SS=106.85[mV/dec]$인 반면에 퍼니스 열처리 소자는 ${\Delta}SS=299.2[mV/dec]$이었다. 그리고 전하 트래핑에 의해서 발생하는 게이트 히스테리시스 전압의 변화량은 MWI 열처리 소자에서 ${\Delta}V=0.5[V]$이었지만, 퍼니스 열처리 소자에서 ${\Delta}V=5.8[V]$의 큰 수치를 보였다. 결과적으로 MWI 열처리 방식이 퍼니스 열처리 방식보다 소자의 성능이 우수할 뿐만 아니라 aging effect가 개선된 것을 확인할 수 있었고 차세대 디스플레이 공정에 있어서 전기적, 화학적 특성을 개선하는데 기여할 것으로 기대된다.

• Journal of the Korea Concrete Institute
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• v.15 no.1
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• pp.117-124
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• 2003

Reinforced concrete structures under sever conditions such as marine structures, bridges and structures constructed with aggregates(dredged from sea), can be deteriorated from corrosion of the reinforcing bars. The purpose of this study is to evaluate the anti-corrosive performance of coated steel using polymer cement slurry. Polymer cement slurry with various polymer dispersions and corrosion inhibiting agent were coated to the surface of bars, and tested for accelerated corrosion tests. Tests include immersion in NaCl 10% solution, chloride ion spray, autoclave cure, autoclave cure after carbonation, penetration of NaCl 10 % solution, carbonation after penetration of NaCl 10% solution. Test results, show that the anti-corrosive performace is considerably improved by using polymer cement slurry at surface of steel. And this trend is marked by adding of corrosion inhibiting agent. This difference of the anti-corrosive properties is hardly recognized according to types of polymer dispersions. The coated steel using polymer cement slurry will be improved to a great extent compared to those of plain steel when increasing content of chloride ion in cement concrete.

• Journal of Sensor Science and Technology
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• v.6 no.3
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• pp.214-220
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• 1997

A thin film optical waveguide sensor has been developed to measure and analyze quantitatively some inherent optical properties of biochemical substances. In this paper, two different kinds of thickness of thin film waveguide were prepared by RF sputtering of Corning-7059 glass(n = 1.588 at ${\lambda}=\;514nm$, Ar laser) on Pyrex glass substrates. We made a sensing membrane coated on the thin film waveguide with the poly(vinyl chloride-co-vinyl acetate-co-vinyl alcohol) (91 : 3 : 6) copolymer membrane based on $H^{+}$-selective chromoionophore and $K^{+}$-selective neutral ionophore and then proposed the thin film opptical waveguide ion sensor which can select a potassium ion. This sensor based ell the absorbance change by utilizing chromoionophore and neutral ionophore, which changes their absorption spectrum in the UV-vis region upon complexation of the corresponding ionic species, have been reported. The sensitivity dependence of the proposed sensor on interaction length, waveguide thickness, and content of a chromoionophore was investigated. This sensor has the measurement range of $10^{-6}M{\sim}1M$ for $K^{+}$ concentration and 90% response time of duration within 1 min. Also, our thin film optical waveguide sensor using the evanescent field was investigated as compared with conventional transmission sensor or optode sensor by the optical fiber. The sensitivity of thin-film waveguide $K^{+}$ sensor is higher than that of the conventional transmission sensor. The proposed sensor is expected to be useful to biochemical, medical, environmental inspection and so on.

• Membrane Journal
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• v.21 no.2
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• pp.193-200
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• 2011

An amphiphilic graft copolymer comprising a poly(vinyl chloride) (PVC) backbone and poly (styrene sulfonic acid) (PSSA) side chains (PVC-g-PSSA) was synthesized via atom transfer radical polymerization (ATRP). Mesoporous titanium dioxide $(TiO_2)$ films with crystalline anatase phase were synthesized via a sol-gel process by templating PVC-g-PSSA graft copolymer. Titanium isopropoxide (TTIP), a $TiO_2$ precursor was selectively incorporated into the hydrophilic PSSA domains of the graft copolymer and grew to form mesoporous $TiO_2$ films, as confirmed by scanning electron microscopy (SEM) and X-ray diffraction (XRD) analysis. The performances of dye-sensitized solar cell (DSSC) were systematically investigated by varying spin coating times and the amounts of P25 nanoparticies. The energy conversion efficiency reached up to 2.7% at 100 mW/$cm^2$ upon using quasi-solid-state polymer electrolyte.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.2
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• pp.56-62
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• 2003

Epitaxial $Bi_4Ti_3O_{12}$ films on $SrTiO_3$(100), L$aA1O_3$(100) and MgO(100) were prepared by sol-gel process using metal naphthenate as a starting material. As-deposited films were pyrolyzed at $500^{\circ}C$ for 10 min In air and annealed at $750^{\circ}C$ for 30 min in air. Crystallinity and in-plane alignment of the film were investigated by X-ray diffraction $\theta$-2$\theta$ scan and P scanning. A field emission-scanning electron microscope and an atomic force microscope were used for characterizing the surface morphology and the surface roughness of the film. The film prepared on MgO(100) showed the most poor crystallinity and in-plane alignment, compared to those on the other substrates. While the films on $LaA1O_3$(100) and $SrTiO_3$(100) having high crystallinity and in-plane alignment showed the form of columnar grain growth, the film on MgO(100) which had poor crystallinity showed the form of acicula grain growth.

• Journal of the Microelectronics and Packaging Society
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• v.8 no.1
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• pp.33-38
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• 2001

We investigate the via-size dependance of as-electroplated- and reflow-bump shapes for realizing both high-density and high-aspect ratio of solder bump. The solder bump is fabricated by subsequent processes as follows. After sputtering a TiW/Al electrode on a 5-inch Si-wafer, a thick photoresist for via formation it obtained by multiple-codling method and then vias with various diameters are defined by a conventional photolithography technique using a contact alinger with an I-line source. After via formation the under ball metallurgy (UBM) structure with Ti-adhesion and Cu-seed layers is sputtered on a sample. Cu-layer and Sn/pb-layer with a competition ratio of 6 to 4 are electroplated by a selective electroplating method. The reflow-bump diameters at bottom are unchanged, compared with as-electroplated diameters. As-electroplated- and reflow-bump shapes, however, depend significantly on the via size. The heights of as-electroplated and reflow bumps increase with the larger cia, while the aspect ratio of bump decreases. The nearest bumps may be touched by decreasing the bump pitch in order to obtain high-density bump. The touching between the nearest bumps occurs during the overplating procedure rather than the reflowing procedure because the mushroom diameter formed by overplating is larger than the reflow-bump diameter. The arrangement as zig-zag rows can be effective for realizing the flip-chip-interconnect bump with both high-density and high-aspect ratio.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.4
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• pp.37-42
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• 2007

We fabricated the polymer light emitting diodes (PLEDs) with ITO/PEDOT:PSS/PVK/PFO:MEH-PPV/LiF/Al structures. The effect of the thickness of PEDOT:PSS hole injection layer(HIL) on the electrical and optical properties of PLEDs was investigated. In addition, PVK hole transport layer(HTL) was introduced in the PLED device, and compared the properties of the PLEDS with and without PVX layer. All organic film layers were prepared by the spin coating method on the plasma treated ITO/glass substrates. As the thickness of PEDOT:PSS film layer decreased from about 80 nm to 50 nm, the luminance of PLED device increased from $220cd/m^2$에서 $450cd/m^2$. This may be ascribed to the increased transportation efficiency of the holes into the emission layer of PLED. The maximum current density and luminance were obtained fir the PLED device with PVX hole transport layer, showing that the current density and luminance were $268mA/cm^2\;and\;540cd/m^2$ at 12V, respectively. This values were improved by about 14% and 22% in current density and luminance compared with the PLED device without PVK layer.

• Journal of the Korean Chemical Society
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• v.41 no.7
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• pp.337-342
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• 1997

Acryloylmethylbenzo-15-crown-5 was prepared from the reaction of 4'-hydroxymethylbenzo-15-crown-5 with acryloyl chloride. And, poly(acryloylmethylbenzo-15-crown-5) [poly(AMB15C5)] was synthesized by radical polymerization using AIBN as initiator in benzene. Coated wire lead(II) ion-selective electrodes ($Pb^{2+}$-CWISEs) using either poly(AMB15C5) or B15C5 as neutral carrier were prepared, respectively. $Pb^{2+}$-CWISEs gave linear responses with slopes of 28$\pm$ 1mV per decade within the concentration range of $10^{-5} M{\sim}10^{-1}$ M, respectively. Also, the detection limits were $10^{-6}$ M and response times were either 3 or 5 min. for B15C5 and poly(AMB15C5), respectively. $Pb^{2+}$-CWISE base on B15C5 was rather unstable than poly(AMB15C5)'s due to solubility of the B15C5 in water. The selectivity coefficients of a variety of interfering ions such as $Mg^{2+},\; Ca^{2+},\; Co^{2+},\; Ni^{2+},\; Cu^{2+},\; Zn^{2+}$ and $Cd^{2+}$ were small ($10^{-4}{\sim}10^{-5}$), while those of $Na^+$ and $K^+$ were large (0.1∼0.01). In addition, the electrode responses depended upon the pH of test solution and the composition of the membrane. In the range pH 3∼6 of test solution, potentials of Pb2+-CWISEs were hardly changed. The optimal contents of B15C5 and poly(AMB15C5) were 7.7 wt% and 13.1 wt%, respectively.

• Corrosion Science and Technology
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• v.8 no.4
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• pp.162-169
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• 2009

Pure titanium and its alloys are drastically used in implant materials due to their excellent mechanical properties, high corrosion resistance and good biocompatibility. However, the widely used Ti-6Al-4V is found to release toxic ions (Al and V) into the body, leading to undesirable long-term effects. Ti-6Al-4V has much higher elastic modulus than cortical bone. Therefore, titanium alloys with low elastic modulus have been developed as biomaterials to minimize stress shielding. For this reason, Ti-30Ta-xZr alloy systems have been studied in this study. The Ti-30Ta containing Zr(5, 10 and 15 wt%) were 10 times melted to improve chemical homogeneity by using a vacuum furnace and then homogenized for 24 hrs at $1000^{\circ}C$. The specimens were cut and polished for corrosion test and Ti coating and then coated with TiN, respectively, by using DC magnetron sputtering method. The analyses of coated surface were carried out by field emission scanning electron microscope(FE-SEM). The electrochemical characteristics were examined using potentiodynamic (- 1500 mV~+ 2000 mV) and AC impedance spectroscopy(100 kHz~10 mHz) in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The equiaxed structure was changed to needle-like structure with increasing Zr content. The surface defects and structures were covered with TiN/Ti coated layer. From the polarization behavior in 0.9% NaCl solution, The corrosion current density of Ti-30Ta-xZr alloys decreased as Zr content increased, whereas, the corrosion potential of Ti-30Ta-xZr alloys increased as Zr content increased. The corrosion resistance of TiN/Ti-coated Ti-30Ta-xZr alloys were higher than that of the TiN-coated Ti-30Ta-xZr alloys. From the AC impedance in 0.9% NaCl solution, polarization resistance($R_p$) value of TiN/Ti coated Ti-30Ta-xZr alloys showed higher than that of TiN-coated Ti-30Ta-xZr alloys.

• Journal of the Mineralogical Society of Korea
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• v.21 no.4
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• pp.331-339
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• 2008

In the upstream of Nakdong river in Bonghwa-gun, Gyeongsangbuk-do, certain areas of riverside were found to be covered by weathered mine tailings which were assumed to be migrated and deposited by flood. This study was conducted to investigate the formation and characteristics of the secondary minerals from tailings and related leaching behavior of heavy metals in the severely weathered tailing deposits by river waters. Quartz, feldspar, micas, chlorite, hornblende, talc, pyroxene (johannsenite), pyrite, and calcite were identified as primary minerals by XRD. Kaolinite can be formed by the weathering of tailings, but considering the short period of weathering time, kaolinite in the deposits is considered to be from unweathered tailings or moved from soils. The secondary minerals such as goethite, gypsum, basanite, and jarosite were also identified. The formation of the secondary minerals was affected by the species of primary minerals and pH conditions. The weathering of pyrite produced sulfate minerals such as gypsum, basanite, jarosite, and also goethite. Mn oxide was also identified by SEM, coated on the primary minerals such as quartz. This Mn oxide was poorly crystalline and thought to be the weathering product of johannsenite (Mn-pyroxene). The Fe and Mn oxides are the main minerals determining the brown/red and black colors of weathered tailings. EDS results showed that those oxides contain high concentrations of Pb, Zn, and As, indicating that, in the river, the formation of Fe and Mn oxides can control the behavior and leaching of heavy metals by co-precipitation or adsorption.