• Title/Summary/Keyword: 코일링

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고밀도 플라즈마 소스를 적용한 고효율 스퍼터링 공정 개발

  • Kim, Do-Geun;Lee, Seung-Hun;Kim, Jong-Guk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.508-508
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    • 2011
  • 스퍼터링을 이용한 박막 증착기술은 다양한 분야에 걸쳐 적용되어 왔으며, 스퍼터링 타겟 사용효율을 향상시키기 위해 마그네트론 구조 최적화 및 이온 소스 적용 스퍼터링 등의 기술이 연구되어 왔다. 또한 인듐과 같은 희토류 금속의 가격이 최근 상승함에 따라 고효율 스퍼터링기술의 필요성은 더욱 증대되었다. 본 연구에서는 고밀도 플라즈마 소스를 적용한 고효율 스퍼터링 공정을 개발하였다. 동공 음극방전에서 생성된 고밀도 플라즈마는 전자석 코일을 통해 형성된 자기장을 따라 스퍼터링 타겟 표면까지 수송되며, 음전위로 대전된 스퍼터링 타겟 표면에서는 가속되어 입사하는 이온에 의한 스퍼터링이 발생한다. 본 스퍼터링 공정 기술의 경우, 기존 마그네트론 스퍼터링 소스에서 나타나는 약 30%의 타겟 사용 효율을 뛰어넘는 약 80% 이상의 타겟 사용률을 보였다. 또한 고밀도 플라즈마 소스에서 공급되는 이온에 의한 스퍼터링 공정을 개발 함에 따라 스퍼터링 방전전압의 독립적 조절이 가능하다. 이에 따라 200 V 이하의 저전압 스퍼터링 공정을 통해 유연성 폴리머 기판 및 유기소자 상 저에너지 이온 증착이 가능하며, 1 kV 이상의 고전압 스퍼터링을 통해 추가적인 기판 전압 인가 없이 박막 치밀화 구현이 가능하다.

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Design of a Wireless Intraocular Pressure Sensor Based on MEMS Technology (안압의 비접촉 검출을 위한 MEMS 기반의 센서 설계)

  • Kang, Buung-Joo;Park, Jong-Hoon;Lee, So-Hyun;Kang, Ji-Yoon;Park, Chang-Kun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.4
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    • pp.905-912
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    • 2011
  • Interaocular pressure (IOP) sensor and external coil to detect the resonance frequency of the IOP sensor are designed and implemented using MEMS technology. The IOP sensor is designed using 3-D electromagnetic (EM) simulation. The resonance frequency of IOP sensor needs to be lower than that of the external coil. Additionally, the resonance frequency of the IOP sensor needs to be located near the resonance frequency of the coil to get the sufficient amplitude of phase variation. The frequency where the phase peak appears must be constant according to the distance between the IOP sensor and the external coil. From the measurement results, we demonstrated that the designed IOP sensor has the same resonance frequency with various distances between the IOP sensor and the coil.

Effects of Continuous Annealing Conditions on the Properties of Extra Low Cabon Steel Sheets Containing B, Nb and Ti (B, Nb 및 Ti를 함유한 극저탄소강판에서 연속열처리조건이 재질에 미치는 영향)

  • Lee, Jong-Mu;Yun, Guk-Han;Lee, Do-Hyeong
    • Korean Journal of Materials Research
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    • v.4 no.1
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    • pp.44-54
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    • 1994
  • Effects of cooling rate, cold reduction %, continuous annealing treatments on the recrystallization texture structure of the A1 killed extra low carbon steel sheet contaning Ti, Nb, and B were investigated. The texture coefficient ratio TC (222)/TC (200) tends to increase with decreasing the cooling rate of the coling process and increasing cold reduction %. However, the texture coefficient ratio tends to decrease as the cold reduction % increases from 80% to 90%, which may be due to the change of the primary texture structure from {554} (225) to {ill] (1 1%). The optimum fabrication procedures for the steel sheet with a maximum texture coefficient ratio may be : furnance cooling after the coiling treatment, 80% cold reduction and the continuous annealing treatment of holding at 80O0C for 1 min., water quenching and then holding at $450^{\circ}C$ for 5min.

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Fouling Characteristics of Washable Shell and Coil Heat Exchanger (세척이 가능한 원통 코일형 열교환기의 파울링 특성에 관한 연구)

  • Hwang, Jun Hyeon;Na, Byung Chul;Oh, Sai Kee;Koo, Kyoung Min;Lee, Jae Keun;Ahn, Young Chull
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.27 no.2
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    • pp.69-74
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    • 2015
  • In this work, we studied the shell and helically coiled tube heat exchangers. Shell and coil heat exchangers with different rate of water flow and plate heat exchanger with same capacity were tested for condensing conditions. We proposed design guide using modified Wilson plot method. We compared fouling characteristics between shell and coil heat exchanger and plate heat exchanger, when they were washed and were not washed. The shell and coil heat exchanger showed 120% of higher saturated fouling resistance value and 4% of better heat transfer ratio than the plate heat exchanger.

Study on the single power supply design of PLS-II injection kicker (PLS-II 인젝션 키커의 단일전원장치 설계에 관한연구)

  • Son, Yoon-Kyoo;Jang, Sung-Duck;Hwang, Woon Ha;Lee, Byung-Joon;Choi, Jae-Young
    • Proceedings of the KIEE Conference
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    • 2015.07a
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    • pp.1197-1199
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    • 2015
  • PLS-II 키커 모듈레이터는 마그넷 코일 4개에 펄스전원을 공급하고 있다. 에너지 저장용 커패시턴스 합성 값은 $3.2{\mu}F$이고, 두 개의 회로로 커패시턴스 $1.6{\mu}F$로 나뉘어져 있다. 키커 마그넷 코일 두 개를 직렬연결하고 두 개 회로를 병렬구조로 하여 펄스 폭 $6.8{\mu}s$, 전류 20 kA, 운전주파수 10 Hz로 운전되고 있다. 커패시터와 코일의 직렬공진에 의해 에너지를 전달하는 직렬공진회로이다. 인덕턴스를 줄일 목적으로 전원장치는 키커 마그넷 가까이에 설치되어있다. 이것은 펄스폭에 영향을 미치게 되며 운전전류에 민감해서 그 값이 커지게 되면 입력공급 전압이 높아지게 된다. 장치의 운영적인 측면에서 고장이나 키커 모듈레이터 내부에 문제가 발생 하였을 경우 저장링 터널에 설치되어있는 전원을 점검하기 위해서는 빔 운전을 중단하고 접근을 해야 하는 불편함이 있다. 키커 모듈레이터 전원을 단일전원을 하고자 하는 궁극적인 목적은 입사효율을 높이기 위함이며, 입사되는 키커의 변수를 조정하고자 한다. 또한, 정비의 용이성과 입사 시 키커의 전압, 전류를 개별적으로 조정이 가능하게 단일전원으로 장치를 제작하고자 한다. 본 논문에서는 단일전원의 설계와 실험내용을 소개하고자 한다.

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Development of distribution line coupler for power line access network (전력선 가입자망을 위한 배전선용 커플러 개발에 관한 연구)

  • Lee, Jae-Jo;Lee, Wong-Tae;Kim, Kwan-Ho;Kim, Yo-Hee
    • Proceedings of the KIEE Conference
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    • 2000.07d
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    • pp.3106-3108
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    • 2000
  • 본 논문은 고압배전선을 이용한 가입자망 개발에 필수적으로 상용되는 고압배전선용 커플러 개발에 관한 것이다. 개발된 고압배전선용 커플링 장치는 고압용 커패시터와 초크코일 및 커플링 트랜스포머로 구성되어 있다. 특히 개발된 커플링 트랜스포머는 1Mhz - 40Mhz 주파수 대역에서 0.1dB 이하의 손실을 가지는 광대역 저손실 특성을 가지는 것으로 평가되었다. 개발된 커플링 장치는 앞으로 전력선 가입자망 구성 및 임피던스 측정장치에 활용하고자 한다.

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Micro fluxgate magnetic sensor using multi layer PCB process (PCB 다층 적층기술을 이용한 마이크로 플럭스게이트 자기 센서)

  • Choi, Won-Youl;Hwang, Jun-Sik;Choi, Sang-On
    • Journal of Sensor Science and Technology
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    • v.12 no.2
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    • pp.72-78
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    • 2003
  • To observe the effect of excitation coil pitch on the micro fluxgate magnetic sensor, two sensors are fabricated using multi layer board process and the pitch distance of excitation coil are $260\;{\mu}m$ and $520\;{\mu}m$, respectively. The fluxgate sensor consists of five PCB stack layers including one layer of magnetic core and four layers of excitation and pick-up coils. The center layer as magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ${\sim}100,000$ and has a rectangular-ring shape to minimize the magnetic flux leakage. Four outer layers as excitation and pick-up coils have a planar solenoid structure and are made of copper foil. In case of the fluxgate sensor having the excitation coil pitch of $260\;{\mu}m$, excellent linear response over the range of $-100\;{\mu}T$ to $+100\;{\mu}T$ is obtained with sensitivity of 780 V/T at excitation sine wave of $3V_{p_p}$ and 360 kHz. The chip size of the fabricated sensing element is $7.3\;{\times}\;5.7\;mm^2$. The very low power consumption of ${\sim}8\;mW$ is measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.

Design of RF Coil for Low Magnetic-Field Osteoblast Reformation System (저 자기장 조골세포 재형성 시스템용 RF 코일 설계)

  • Mun, Sung Hyuk;Cho, Choon Sik;Kim, Young-Jin
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.29 no.11
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    • pp.821-827
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    • 2018
  • In devices used for re-forming osteoblasts to treat osteoporosis, a magnetic field is applied from the outside of the bone, and the minerals contained in the bone are aligned in a certain direction and undergo precessional motion. When a $90^{\circ}$ RF pulse is applied by using an RF coil, protons of minerals are brought to an excited state, and phosphorus activity promoting the deposition of osteoblasts in the bone is increased, thereby reshaping the bone. Miniaturizing the RF coil that generates a signal corresponding to the harmonic of the precessional motional frequency by means of the $90^{\circ}$ RF pulse can drastically reduce the overall size of the bone reshaping system. In this study, we propose a methodology for the miniaturization of the RF coil that can be used for osteoblast re-formation using a bone reshaping system. The capacitance of the designed RF coil is 25 pF, the inductance is approximately 100 nH, and the resonance frequency is 96 MHz. The radius of the end ring of the designed RF coil is 18 cm, and the total length of the leg is $2{\times}11.6cm$. The performance of the coil is verified through post-design measurement.

Development of 50W High Quality Factor Printed Circuit Board Coils for a 6.78MHz, 60cm Air-gap Wireless Power Transfer System (6.78MHz, 거리 60cm, 50W급 무선 전력 전송 시스템용 High Quality Factor PCB 코일 개발)

  • Lee, Seung-Hwan;Yi, Kyung-Pyo
    • Journal of the Korean Society for Railway
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    • v.19 no.4
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    • pp.468-479
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    • 2016
  • In order to supply power to online monitoring systems that are attached to high voltage catenary or overhead wires, a wireless power transfer system is required that is able to transmit power over the insulation gap. Such wireless power transfer systems have transmitter and receiver coils that have diameters of over 10cm. This paper focused on an investigation of the sources of loss in the coils when the coils are fabricated using printed circuit board technology. Using finite element simulation results, it has been shown that the dielectric loss in the substrate was the dominant source of the total loss. It has been demonstrated that the selection of a proper dielectric material was the most critical factor in reducing the loss. For further reduction of the loss, the distributed tuning capacitor method and the slotting of the inter-turn spaces have been proposed. For the evaluation of the proposed methods, four coils have been fabricated and their equivalent series resistances and quality factors were measured. Measured quality factors were greater than 300, which means that these devices will be helpful in achieving high coil-to-coil efficiency.

The Design of a I/O Circuits for Driving and Monitoring of the Diesel Generator for Emergency (비상용 디젤 발전기 구동 및 모니터링을 위한 입출력 회로 설계)

  • Joo, Jae-Hun;Kim, Jin-Ae;Choi, Jung-Keyng
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.13 no.8
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    • pp.1491-1496
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    • 2009
  • This paper presents an digital based input/output interface circuit for controlling and monitoring the Diesel Engine Generator for emergency. In order to monitor and control of the Emergency Diesel Engine Generator, controlling and monitoring circuits need 5 analog input channels, 2 pick-up coil measuring circuits, 10 digital input channels containing Broken Wire Detect function, and 7 relay control signal output channels. This system performs signal processing of input signal taking advantage of simple filter circuit, photo-coupler and comparator circuit at analog input parts, and output signals for main relay is designed acting by double control, so it prevents malfunction completely. And it improves accuracy of speed input signal by applying digital circuit that processes rick-up coil signal.