• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.151-156
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• 1995

0.5$\mu$m 이하 급의 device에서 TEOS/O3 BPSG 박막을 층간절연막(Interlayer Dielectric)으로 사용하여, 평탄화를 위해 etchback 공정을 적용할 때 BPSG 박막이 가지는 구조적, 화학적 불안정성으로 인해 B,P 농도의 변화나 crack 발생 현상이 일어날 수 있다. 본 실험에서는 이러한 현상을 억제하기 위해 농도를 달리한 이층막의 증착, PR strip 시에 사용하는 wet chemical의 변경 및 증착후 치밀화(densificaiton)공정추가 등의 방법을 사용하였으며, 이에 따른 박막 특성의 변화를 조사하였다.

• Journal of the Korean Ceramic Society
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• v.36 no.2
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• pp.186-192
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• 1999

Dang-Chin feldspar powder with the mean particle size of 9.1 $\mu\textrm{m}$ was added to the synthesized mullite powder with the particle size of +325∼-200 mesh and the powder compact was prepared by PLPP(pressureless powder packing method). Densification behaviors were observed in sintering temperature range of 1200∼1400$^{\circ}C$. The binder solution of 4% PVA was infilterated into packed powder to the suitable strength. The PLPP method makes it possible to form compacts without clay as plasticizer. Therfore there was no defect caused by phase transition after sintering. Additionally, we observed the dense microstructure by the melting of feldspar. When the mullite compacts with feldspar of 30% were sintered at 1300$^{\circ}C$-4 hrs, we obtained the dense microstructure with zero water absorption and porosity <1%. When these compacts were sintered longer than 4 hrs at 1300$^{\circ}C$ or higher than 1400$^{\circ}C$, the examggerated grain growth of mullite was observed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.10 s.241
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• pp.1344-1352
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• 2005

Densification behavior of iron powder under cold stepped plastic deformation was studied. Experimental data were also obtained for iron powder under cold stepped plastic deformation. The elastoplastic constitutive equation based on yield function of Shima and Oyane was implemented into a finite element program (ABAQUS) to simulate compaction responses of i.on powder during cold stepped plastic deformation. Finite element calculations were compared with experimental data for densification, deformed geometry and density distribution. The agreement between finite element results and experimental data was good for iron powder.

• Journal of the Korean Ceramic Society
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• v.34 no.3
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• pp.296-302
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• 1997

The effect of cold cyclic compaction on densification of SiC whisker/Al2O3 composite was investigated. Re-lative density of the compact increased as the number of cycle and the compaction pressure increased and the bias pressure decreased. The rate of loading and unloading and the frequency of cold cyclic compaction did not affect much on sliding and rearrangement of the particles. Fracture of SiC whisker was hardly ob-served during cold cyclic compaction and the direction of whisker was randomly oriented throughout the compact regardless of the direction of compaction. Thus, cold cyclic compaction may be an efficient method to densify SiC whisker/Al2O3 composite.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.330-342
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• 1998

The effect of rubber mold on densification behavior of pure iron powder was investigated under cold isostatic pressing. The thickness effect of rubber mold was also studied. The elastoplastic constitutive equation based on the yield function of Shima and Oyane was implemented into the finite element program(ABAQUS) to predict compaction responses of metal powder under cold isostatic pressing. The hyperelastic constitutive equation based on Moony-Rivlin and Ogden strain energy potentials was also employed to analyze deformation of rubber mold. The coefficients of the strain energy potentials were obtained from tension and volumetric compression data of rubber. Finite element results were compared with experimental data for densification of pure iron powder under cold isostatic pressing.

• Korean Journal of Materials Research
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• v.4 no.4
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• pp.393-400
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• 1994

A new process for uniform coating of copper to submicron tungsten powder has been developed. W-Cu alloy where copper can be uniformly distibuted has been made by the liquid phase sintering of thus prepared tungsten powder. It has been found that copper content can be lowered less than IOwt. % in our new process, maintaining the uniform distribution of copper in W-Cu alloy. Relative density above 96% was obtained after the liquid phase sintering when small amount of cobalt was added. It was revealed that the rapid increase of densification rate was due to the enhancement of wettability between tungsten particle and liquid copper.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.12
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• pp.3061-3071
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• 2000

Densification behavior of titanium alloy powder was investigated under hot pressing at various pressures and temperatures. Experimental date were obtained for densification of titanium alloy powder under an instantaneous loading and subsequent creep deformation during hot pressing. The constitutive models of Fleck et al. and the modified Gurson were employed for thermo-phastic deformation under the instantaneous loading and that f Abouaf and co-workers for creep deformation of titanium alloy powder during hot pressing. By implementing these constitutive equations into a finite element program(ABAQUS), finite element results were compared with experimental data during hot pressing. To investigate the effect of friction between the power and die wall, density distributions of power compacts were measured and compared with finite element calculations. Finite element results from the models of Fleck et al. and the modified Gurson agreed reasonably good with experimental data for densification and density distribution of titanium alloy powder under the instantaneous loading during hot pressing. Finite element results from the model of Abouaf and co-workers, however, somewhat overestimate experimental data for creep deformation of power compacts during hot pressing.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.10 s.181
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• pp.2628-2636
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• 2000

Densification behavior of mixed copper and tool steel powder under cold compaction- was investigated. By mixing the yield functions proposed by Fleck et al. and by Gurson for pure powder in terms o f volume fractions and contact numbers of Cu powder, new mixed yield functions were employed for densification of powder composites under cold compaction. The constitutive equations were implemented into a finite element program (ABAQUS) to compare with experimental data and with calculated results from the model of Kim et al. for densification of mixed powder under cold isostatic pressing and cold die compaction. Finite element calculations by using the yield functions mixed by contact numbers of Cu powder agreed better with experimental data than those by volume fractions of Cu powder.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.311-311
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• 2011

$TiN{\times}$박막은 우수한 내마모성 및 내부식성, 높은 경도 그리고 열적 안정성 등으로 인하여, 절삭공구 및 기계적 부품의 하드코팅, 2차 연료 전지용 확산방지막의 코팅재료로서 광범위하게 사용되어지고 있다. 일반적으로 $TiN{\times}$ 박막은 화학 기상 증착법(CVD)을 이용하였으나, 최근에는 대면적에 균일한 코팅이 가능하고 기판과 박막상의 부착력이 우수하며, 프로세스를 제어하기 쉬운 물리적 기상 증착법(PVD)의 스퍼터링법에 대한 관심이 고조되고 있다. 그러나 스퍼터링법으로 증착된 $TiN{\times}$ 박막의 물성은 주상구조와 국부적 표면결함을 포함하는 박막의 미세구조에 의존하기 때문에 주상구조 사이에 존재하는 Void 와 Pinhole 그리고 crack들이 원인으로 작용하여, 내부식성 및 기계적 특성이 급속도로 저하되는 단점이 있다. 이러한 단점을 보완하기 위해서, 본 연구에서는 기판온도를(RT, $200^{\circ}C$, $400^{\circ}C$)증가시켜 실험 하였다. 이는 온도증가에 따른 박막의 치밀화가 이루어지고 결함이 감소하여 내부식성 특성향상이 기대되어진다. 또한 플라즈마 밀도를 높이기 위해서, 기존 DC 마그네트론 스퍼터링법에 전자기장을 추가로 인가하였다. 이는 플라즈마 밀도증가에 따른 고반응성의 질소 래디컬의 생성율 증가에 기인하여 박막 형성시 질화반응을 촉진시킴으로써 박막의 치밀화 및 내부식성 특성향상이 기대되어진다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2011.05a
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• pp.31-32
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• 2011

완전화 박막은 박막의 구조를 원하는 목적에 최적이 되도록 제어하는 방법을 이용하여 만들어진 박막을 의미하는 것으로 금속이나 화합물 박막을 제조하되 각종 구조 제어 Tool을 이용하여 나노화나 다층화 및 치밀화를 통해 구현될 수 있다. 최근 고성능의 증착 및 제어 Tool이 개발되고 스침각 증착 (Glancing Angle Deposition; GLAD) 방법 등의 기술이 개발되면서 User-defined 박막을 통해 User-friendly 응용을 위한 연구개발이 활발히 진행되고 있다. 본 연구에서는 완전화 박막 구현을 위한 연구동향을 파악하고 완전화 박막 제조를 위한 기술적 과제와 몇 가지의 시도에 대한 기초 연구 자료를 소개한다.