• Korean Journal of Materials Research
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• v.10 no.6
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• pp.450-455
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• 2000

For further scaling down of the silicon devices, the application of low dielectric constant materials instead of silicon oxide has been considered to reduce power consumption, crosstalk, and interconnection delay. In this paper, the effect of $O_2/SF_6$ plasma chemistry on the etching characteristics of polyimide-one of the promising low-k interlayer dielectrics-has been studied. The etch rate of polyimide decreases with the addition of $SF_6$ gas due to formation of nonvolatile fluorine compounds inhibiting reaction between oxygen and hydrocarbon polymer, while applying substrate bias enhances etching process through physical attack. However, addition of small amount of $SF_6$ is desirable for etching topography. $SiO_2$ hard mask for polyimide etching is effective under $O_2$plasma etching(selectivity~30), while $O_2/SF_6$ chemistry degrades etching selectivity down to 4. Based on the above results, $1-2\mu\textrm{m}$ L&S PI2610 patterns were successfully etched.

• Fire Science and Engineering
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• v.14 no.3
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• pp.1-5
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• 2000

In this paper, we analyzed the fire hazard of the ballast for fluorescent lamp used as the indoor lighting. In the result of being analyzed the ballast wire by stereo microscope, many melting points were discovered, it was impossible to judge a cause with the naked eye. In the Thermal-deteriorated ballast wire, elongation structure disappeared at above $700^{\circ}$, and it only showed the enlarged appearance of the copper particle. On the metallurgical microscope of short wire, as it was confirmed the regulation of the columnar structure and the void growth at the center of boundary-face, we found that electrical short-circuit generated. Also, it was confirmed the melted part on the analysis using SEM(scanning electron microscope). Not only CuL and Cuk line that is composition factor of copper but also OK line was observed uniformly on the spectra analysis using EDX(energy dispersive x-ray spectroscopy). It means that oxygen took part in reaction at the recombination process.

• Journal of the Korean Ceramic Society
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• v.41 no.1
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• pp.41-44
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• 2004

Hydrophilicity and hydrophobicity of pottery bodies can be controlled via chemical substitution of layered clay with hydrophilic and hydrophobic organics. In this study, organo-clay nanocomposites were prepared by ion-exchange of montmorillonite with dodecylamine and hexadecylamine, respectively. Substitution sites of organics and the interval changes of layered materials are characterized by FT-IR and WAXD and organics amounts loaded and water comtents contained by C/S analysis and TG-DSC. The organics were selectively intercalated so that increase layer interval from 12${\AA}\; to\;16{\AA}$. Organo-modified clay is changed to more hydrophobic comparing to clay itself.

• Polymer(Korea)
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• v.35 no.1
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• pp.47-51
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• 2011

In this study, illite, an environmental friendly, low cost, and high aspect ratio additive, was used to improve flame retardant property of epoxy and it was fluorinated to enhance dispersion of hydrophilic illite in hydrophobic epoxy by introducing hydrophobic functional groups. Fluorination of illite enhanced illite dispersion ill epoxy solution before curing and that in the complex after curing. These enhanced dispersions were attributed to the increased affinity of illite to hydrophobic epoxy solution induced by fluorination of illite and the increased intercalation of epoxy polymer or exfoliation of illite by epoxy curing. Hence, limited oxygen index(LOI) of fluorinated illite/epoxy complex increased by 24%, compared to that of epoxy, suggesting that the preparation of fluorinated illite/epoxy complex increased their flame retardant properties.

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.11
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• pp.231-237
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• 2014

In this paper, we have proceeded research for failures of semiconductor device stressed by Pressure Cooker Test(PCT). After PCT stress, we found various failures such as delamination between aluminium line and device layers and chemical composition transition of aluminium. We have executed the analysis using the physical and chemical observation equipments. There were the main failures that aluminium loss of aluminium pad is occurred and $Al_xO_y$($Al_2O_3$ or $Al(OH)_3$)) layer is formed abnormally. The primary cause of the failures is reaction of supplied fluorine or chlorine gases and infiltrated moisture during etching process.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.129-129
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• 2010

적외선 검출소자(Infrared Photodetector)는 근적외선에서 원적외선 영역에 이르는 광범위한 파장 범위의 적외선을 이용하는 기기로서 대상물이 방사하는 적외선 영역의 에너지를 흡수하여 이를 영상화할 수 있는 장비이다. 적외선 관련 기술은 2차 세계대전 기간에 태동하였으며, 현재에는 원거리 감지기술 등과 접목되면서 그 활용 분야가 다양해지고 있다. 특히 능동형 정밀 타격무기를 비롯한 감시 정찰 장비 및 지능형 전투 장비 시스템 등에 대한 요구를 바탕으로 보다 정밀하고 신속한 표적 감지 및 정보처리 기술에 관한 연구가 선진국을 통해서 활발히 진행되고 있다. 기존의 Bolometer 형식의 열 감지 소자는 반응 속도가 느리고 측정 감도가 낮은 단점이 있으며, MCT(HgCdTe)를 이용한 적외선 검출기의 경우 높은 기계적 결함과 77K 저온에서 동작해야하기 때문에 발생하는 추가 비용 등이 문제점으로 지적되고 있다[1]. 이에 반해 화합물 반도체 자기조립 양자점(self-assembled quantum dot)을 이용한 적외선 수광소자는 양자점이 가지는 불연속적인 내부 에너지 준위로 인하여, 높은 내부 양자 효율과 온도 안정성을 기대할 수 있으며, 고성능, 고속처리, 저소비전력 및 저소음의 실현이 가능하다. 본 연구에서는 적층 InAs/InGaAs dot-in-a-well 구조를 유기금속화학기상증착법을 이용하여 성장하고 이를 소자에 응용하였다. 균일한 적층 양자점의 성장을 위해서 원자현미경(atomic force microscopy)을 이용하여, 각 층의 양자점의 크기와 밀도를 관찰하였고, photoluminescence (PL)를 이용하여 발광특성을 연구하였다. 각 층간의 GaAs space layer의 두께와 온도 조절 과정을 조절함으로써 균일한 적층 양자점 구조를 얻을 수 있었다. 이를 이용하여 양자점의 전도대 내부의 에너지 준위간 천이(intersubband transition)를 이용하는 n-type GaAs/intrinsic InAs 양자점/n-type GaAs 구조의 양자점 적외선수광소자 구조를 성장하였다. 이 과정에서 상부 n-type GaAs의 성장 온도가 600도 이상이 되는 경우 발광효율이 급격히 감소하고, 암전류가 크게 증가하는 것을 관찰하였다. 이는 InAs 양자점과 주변 GaAs 간의 열에 의한 상호 확산에 의하여 양자점의 전자 구속 효과를 저해하는 것으로 설명된다.

• Journal of the Korean GEO-environmental Society
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• v.20 no.12
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• pp.5-14
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• 2019

Recently in Korea, researches on seismic analyses for high-rise buildings in a large city have been increasing because earthquakes have occurred. However, the ground conditions are not included in most of seismic researches and analyses on a high-rise building. Also the influence of the predominant period of a seismic wave is not considered in reality. Therefore, in this study, the influence of the predominant period of a seismic wave on the dynamic behavior of high-rise buildings was analyzed based on the complete system model which can consider the grounds. For this purpose, 2D dynamic analyses based on a linear time history analysis were performed using MIDAS GTS NX, a finite-element based program. Dynamic behavior was analyzed in terms of horizontal displacements, drift ratios, bending stresses, and building weak zones. As a result, in overall, the dynamic response of a high-rise building become bigger as the predominant period of a seismic wave become longer. It was also found that the predominant period had a greater influence than other parameters, ground conditions and peak ground acceleration.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.26 no.5B
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• pp.481-488
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• 2006

This paper suggests a novel approach of integrating the quasi-distributed watershed model SWAT with the fully-distributed groundwater model MODFLOW. Since the SWAT model has semi distributed features, its groundwater components hardly considers distributed parameters such as hydraulic conductivity and storage coefficient. Generating a detailed representation of groundwater recharge, head distribution and pumping rate is equally difficult. To solve these problems, the method of exchanging the characteristics of the hydrologic response units (HRUs) in SWAT with cells in MODFLOW by fully combined manner is proposed. The linkage is completed by considering the interaction between the stream network and the aquifer to reflect boundary flow. This approach is provisionally applied to Gyungancheon basin in Korea. The application demonstrates a combined model which enables an interaction between saturated zones and channel reaches. This interaction plays an essential role in the runoff generation in the Gyungancheon basin. The comprehensive results show a wide applicability of the model which represents the temporal-spatial groundwater head distribution and recharge.

• Applied Chemistry for Engineering
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• v.9 no.6
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• pp.894-900
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• 1998

An interphase between carbon fiber and epoxy matrix was introduced to increase impact strength of carbon fiber reinforced composites (CFRC) without sacrificing the interlaminar shear strength. Flexible polymers, I. e., MVEMA (poly(methyl vinyl ether-co-maleic anhydride)) and EMA(poly(ethylene-co-maleic anhydride)), which have reactive functional groups were considered as interphase materials. Weight hain of MVEMA and EMA onto the surface of carbon fibers was evaluated by changing the parameters of electrodeposition process. Electrodeposition mechanism of polymers which have anhydride functional group was identified by IR spectroscopy, that is, the generation of $RCOO^-$ functional group by the attack of hydroxide anion in the basic solution was observed. The weight gain was increased by increasing concentration of polymers, current density, and electrodeposition time. However the excess generation of oxygen gas decreased the weight gain by removing the deposited polymers. Washing in the running water easily removed the deposited polymers which are on the fiber surface without bonding, as a results, only 0.5 wt% of deposited polymers are remained.

• Analytical Science and Technology
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• v.9 no.1
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• pp.43-51
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• 1996

We have discussed on the deintercalation process of Li-EaGICs and Li-EGICs synthesized under pressure and temperature by spontaneous oxidation reaction of those compounds based on the results of X-ray diffraction, thermal analysis and electrical specific resistivity analysis. According to the results of the X-ray analysis for the intercalation process, we have found that the stage 1 for Li-EaGICs and Li-EGICs were not completly formed, but their lower stages were formed mainly. And from this results of the deintercalation process, we have found that the deintercalation process did not occur any more after 4 weeks, and the Li-EGDICs have more residual lithium metals than LiEaGDICs between the graphite interlayers. According to the thermal decomposition analysis, Li-two compounds had included very hard exothermic reaction. And we have found that these compounds did not occrurred deintercalation reaction above $400^{\circ}C$. According to the results of the electrical specific resistivity measurements, Li-EGDICs have relatively lower electrical specific resistivity than Li-EaGDICs, and Li-EaGDICs showed a formation of the ideal curve. From these results, we can suggest that Li-EaGDICs have a better properties as an anode material secondary than Li-EGICs.