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Nanoindentation 분석을 통한 W-C-N 박막의 열적 안정성 연구

  • Kim, Su-In;Choe, Seong-Ho;Kim, Ju-Yeong;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.228-228
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    • 2010
  • 반도체 집적도의 비약적인 발전으로 각 박막 층간의 두께는 더욱 줄어들었고 이는 각 박막 층간의 확산에 대한 문제를 간과할 수 없게 하였다. 따라서 각 층간의 확산을 방지하기위한 확산방지막의 연구에 대한 관심도는 증가하게 되었다. 또한 본 연구에서 분석을 위하여 사용된 Nanoindenter는 박막 표면에 다이아몬드 팁을 이용하여 압입을 실시하여 이때 시표의 반응에 의한 팁의 위치(Z-축)를 in-situ로 측정하여 인가력과 팁의 위치에 대한 연속 압입곡선을 측정하게 된다. 이를 통하여 박막의 hardness와 elastin modulus를 측정하게 되고, 연속 압입곡선 분석을 통하여 박막의 표면응력 변화를 측정한다. 이 논문에서는 반도체의 기판으로 사용되는 Si 기판과 금속배선 물질인 Cu와의 확산을 효과적으로 방지하기 위한 W-C-N 확산방지막을 제시하였고, 시료 증착을 위하여 rf magnetron sputter를 사용하여 동일한 증착 조건에서 질소(N)의 비율을 다르게 하여 박막내 질소 비율에 따른 확산방지막을 제작하였다. 이후 시료의 열적 안정성 측정을 위하여 상온에서 $900^{\circ}C$ 까지 질소 분위기에서 30분간 열처리 과정을 실시하여 열적 손상을 인가하였고, 고온에서 확산방지막의 열적인 안정성을 Nanoindentation 분석을 이용하여 측정하였다. 측정 결과 박막내 질소 불포함된 박막의 경우 표면 강도는 9.01 GPa에서 194.01 GPa의 급격한 변화를 보였고, 질소가 포함된 박막은 9.41 GPa에서 43.01 GPa으로 상대적으로 적은 차이를 보였다. X-ray 분석 결과에서도 박막내 질소가 포함된 박막이 고온에서도 더 안정된 특성을 보이는 것을 확인하였다.

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나노트로볼로지를 이용한 질화 텅스텐 박막의 열적 안정성 연구

  • Choe, Seong-Ho;Kim, Ju-Yeong;Lee, Gyu-Yeong;Han, Jae-Gwan;Kim, Su-In;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.184-184
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    • 2010
  • 반도체 집적도의 비약적인 발전으로 각 박막 층간의 두께는 더욱 줄어들었고 이는 각 박막 층간의 확산에 대한 문제를 간과할 수 없게 하였다. 따라서 각 층간의 확산을 방지하기 위하여 두께가 수십 nm size의 확산방지막의 연구에 대한 관심도는 증가하게 되었다. 본 연구에서 분석을 위하여 사용된 Nano-indentation은 박막 표면에 다이아몬드 팁을 이용하여 압입을 실시하여 이때 시표의 반응에 의한 팁의 위치(Z-축)를 in-situ로 측정하여 인가력과 팁의 위치에 대한 연속 압입곡선을 측정하게 된다. 이를 통하여 박막의 hardness와 elastic modulus를 측정하게 되고, 연속 압입곡선 분석을 통하여 박막의 표면응력 변화를 측정한다. 이 논문에서는 반도체의 기판으로 사용되는 Si기판과 금속배선 물질인 Cu와의 확산을 효과적으로 방지하기 위한 W-C-N 확산 방지막을 제시하였고, 시료 증착을 위하여 RF-magnetron sputter를 사용하여 동일한 증착조건에서 질소(N)의 비율을 다르게 하여 박막 내 질소비율에 따른 확산방지막을 제작하였다. 이후 시료의 열적 안정성 측정을 위하여 상온, $600^{\circ}C$, $800^{\circ}C$로 각각 질소 분위기에서 30분간 열처리 과정을 실시하여 열적 손상을 인가하였다. 고온에서 확산방지막의 물리적 특성을 알아보기 위해 Nano-indentation을 이용하여 분석하였고, WET-SPM을 이용하여 표면 이미지와 거칠기를 확인하였다. 그 결과 질화물질이 내화물질에 비해 고온에서 물성변화가 적게 나타나는 것을 알 수 있었고, 균일도와 결정성 또한 질화물질에서 더 안정적이었다.

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Flexural Capacity and Non-Linear Characteristic Evaluation of Circular Column Confined by Carbon Sheet Tube (카본시트튜브로 구속된 원형기둥의 휨내력 및 비선형 특성에 대한 연구)

  • Lee, Kyoung Hun;Yoo, Youn Jong;Kim, Hee Cheul;Hong, Won Kee;Lee, Young Hak
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.11 no.3
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    • pp.143-150
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    • 2007
  • Six full scale column specimens have been tested under the constant axial and cyclic lateral load. An equivalent stress block parameter was used to estimate flexural capacity of columns confined by carbon sheet tube. Through the non-linear regression analysis, behaviors of CFCST(Concrete Filled Carbon Sheet Tube) columns under the cyclic lateral load were estimated and compared with test results.

Refined 3-Dimensional Strut-Tie Models for Analysis and Design of Reinforced Concrete Pile Caps (철근콘크리트 파일캡의 해석 및 설계를 위한 개선 3차원 스트럿-타이 모델)

  • Kim, Byung Hun;Chae, Hyun Soo;Yun, Young Mook
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.33 no.1
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    • pp.115-130
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    • 2013
  • The sectional methods of current design codes have been broadly used for the design of various kinds of reinforced concrete pile caps. Lately, the strut-tie model approach of current design codes also became one of the attracting methods for pile caps. However, since the sectional methods and the strut-tie model approach of current design codes have been established by considering the behaviors of structural concrete without D-regions and two-dimensional concrete structures with D-regions, respectively, it is inappropriate to apply the methods to the pile caps dominated by 3-dimensional structural behavior with disturbed stress regions. In this study, the refined 3-dimensional strut-tie models, which consider the strength characteristics of 3-dimensional concrete struts and nodal zones and the load-carrying capacity of concrete ties in tension regions, are proposed for the rational analysis and design of pile caps. To examine the validity of the proposed models and to verify the necessity of appropriate constituent elements for describing 3-dimensional structural behavior and load-transfer mechanism of pile caps, the ultimate strength of 78 reinforced concrete pile caps tested to failure was examined by the proposed models along with the sectional and strut-tie model methods of current design codes.

Field Study on Wireless Remote Sensing for Stability Monitoring of Large Circular Steel Pipe for Marine Bridge Foundation (해상 교량기초용 대형 원형강관 가설공법의 무선 원격 안정성 모니터링을 위한 현장실험)

  • Park, Min-Chul;Lee, Jong-Sub;Yu, Jung-Doung
    • Journal of the Korean Geotechnical Society
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    • v.36 no.11
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    • pp.71-81
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    • 2020
  • The large circular steel pipe for a marine bridge foundation has been developed as a construction method capable of performing the role of the working platform and cofferdam. The objective of this study is to demonstrate the wireless remote sensing system for monitoring the stability of the large circular steel pipe during construction and operation through field tests. The artificial seabed ground with an water level of 4 m is constructed for field tests. The large circular steel pipe with a diameter of 5 m and height of 9.5 m is installed into the ground by suction, and the embedded depth is 5 m. The inclinometer and strain gauges are installed on different surfaces of the upper module, and the tilt angle and stress are monitored throughout the entire construction process. As results, tilt angles are measured to be constant during the suction penetration. However, the tilt angle is larger in the x-axis direction. In addition, even when installed on different surfaces, the tilt angle in the same axial direction is measured to be almost the same. The stresses measured by strain gauges increase during suction penetration and decrease during pull-out. Based on measured stresses, it is found that the eccentricity is acting on the large circular steel pipe. This study shows that a wireless remote sensing system built with an inclinometer and strain gauge can be a useful tool for the stability monitoring of the large circular steel pipe.

Axial Behavior of Concrete Cylinders Confined with FRP Wires (FRP 와이어 보강 콘크리트 공시체의 압축거동)

  • Cho, Baiksoon;Lee, Jong-Han;Choi, Eunsoo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.33 no.5
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    • pp.1765-1775
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    • 2013
  • The application of FRP wire as a mean of improving strength and ductility capacity of concrete cylinders under axial compressive load through confinement is investigated experimentally in this study. An experimental investigation involves axial compressive test of three confining amounts of FRP wire and three concrete compressive strengths. The effectiveness of FRP wire confinement on the concrete microstructure were examined by evaluating the internal concrete damage using axial, circumferential, and volumetric strains. The axial stress-strain relations of FRP wire confined concrete showed bilinear behavior with transition region. It showed strain-hardening behavior in the post-cracking region. The load carrying capacity was linearly increased with increasing of the amount of FRP wire. The ultimate strength of the 35 MPa specimen confined with 3 layer of FRP wire was increased by 286% compared to control one. When the concrete were effectively confined with FRP wire, horizontal cracks were formed by shearing. It was developed from sudden expansion of the concrete due to confinement ruptures at one side while the FRP wire was still working in hindering expansion of concrete at the other side of the crack. The FRP wire failure strains obtained from FRP wire confined concrete tests were 55~90%, average 69.5%, of the FRP wire ultimate uniaxial tensile strain. It was as high as any other FRP confined method. The magnitude of FRP wire failure strain was related to the FRP wire effectiveness.

Confining Pressure-Dependency on Deformation and Strength Properties of Sands in Plane Strain Compression (평면 변형률 상태에서의 모래의 변형 강도특성의 구속압 의존성)

  • Park, Choon Sik;Tatsuoka, Fumio;Jang, Jeong Wook;Chung, Sung Gyo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.14 no.3
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    • pp.543-552
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    • 1994
  • A series of drained plane strain compression tests was performed on dried samples of dense Toyoura sand and Silver Leighton Buzzard sand prepared by air-pluviation method to find out the deformation and strength characteristics on the value of confining pressure ${\sigma}{_3}^{\prime}({\sigma}{_3}^{\prime}=0.05{\sim}4.0kgf/cm^2)$. The axial and lateral strains measured in this apparatus ranged from $10^{-6}$ up to the failure of the specimen. So the stress-strain characteristics would be investigated from very small to very large strain levels. It was found that the change of the angle of internal friction ${\phi}^{\prime}{_{max}}=arcsin\{({\sigma}{_1}^{\prime}-{\sigma}{_3}^{\prime})/({\sigma}{_1}^{\prime}+{\sigma}{_3}^{\prime})\}_{max}$ with the change of ${\sigma}{_3}^{\prime}$ is very small when ${\sigma}{_3}^{\prime}$ is lower than higher. Furthermore, the effect of confining pressure on stiffness of sands was evaluated. It was also found that for the range of shear strain ${\gamma}$ from $10^{-6}$ to those at peak, the Rowe's stress-dilatancy relation seems to be a good approximation for air-dried Toyoura sand and Silver Leighton Buzzard sand, irrespective of the change of ${\sigma}{_3}^{\prime}$.

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Size Effect on Flexural Compressive Strength of Reinforced Concrete Beams (철근콘크리트 보의 휨압축강도에 대한 크기효과)

  • 김민수;김진근;이성태;김장호
    • Journal of the Korea Concrete Institute
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    • v.14 no.6
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    • pp.934-941
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    • 2002
  • It is important to consider the effect of member size when estimating the ultimate strength of a concrete flexural member because the strength always decreases with an increase of member size. In this study, the size effect of a reinforced concrete (RC) beam was experimentally investigated. For this purpose, a series of beam specimens subjected to four-point loading were tested. More specifically, three different effective depth (d$\approx$15, 30, and 60 cm) reinforced concrete beams were tested to investigate the size effect. The shear-span to depth ratio (a/d=3) and thickness (20 cm) of the specimens were kept constant where the size effect in out-of-plane direction is not considered. The test results are curve fitted using least square method (LSM) to obtain parameters for the modified size effect law (MSEL). The analysis results show that the flexural compressive strength and the ultimate strain decrease as the specimen size increases. In the future study, since $\beta_1$ value suggested by design code and ultimate strain change with specimen size variation, a more detailed analysis should be performed. Finally, parameters for MSEL are also suggested.

Lateral Behavior of Abutment Piles in Full Integral Bridge During 7 Days in Response to Hydration Heat and Drying Shrinkage (수화열과 건조수축에 의한 7일간의 완전 일체식 교량 교대 말뚝기초의 횡방향 거동)

  • ;;;;Thomas A. Bolte
    • Journal of the Korean Geotechnical Society
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    • v.19 no.6
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    • pp.127-149
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    • 2003
  • The bridge tested was 3 spans 90m-long PSC beam concrete bridge with a stub-type abutment which had a skew of 60$^{\circ}$ about the axis of bridge. A cement concrete was placed at the superstructural slab of the bridge. Inclinometers and straingauges were installed at piles as well. During 7 days-curing of superstructural slab, the pile behavior in response to hydration heat and drying shrinkage of the slab was monitored. Then monitored values were compared with the horizontal movement obtained from the HACOM program and the calculated lateral behavior obtained from the nonlinear p-y curves of pile. As a result, lateral behavior of H-piles by the field measurement occurred due to the influence of hydration heat and drying shrinkage obtained during curing of superstructural concrete. The lateral displacements by hydration heat and drying shrinkage were 2.2mmand 1.4mm respectively. It was observed as well that the inflection point of lateral displacement of pile was shown at 1.3m down from footing base. It means that the horizontal movement of stub abutment did not behave as the fixed head condition of a pile but behave as a similar condition. The measured bending stress did not show the same behavior as the fixed head condition of pile but showed a similar condition. The increment of maximum bending stress obtained from the nonlinear p-y curves of pile was about 300(kgf/$\textrm{km}^2$) and was 2 times larger than measured values regardless of installation places of straingauges. Meanwhile, lateral load, maximum lateral displacement, maximum bending stress and maximum bending moment of pile showed a linear behavior as curing of superstructural concrete slab.

Numerical Study on Shotcrete Lining with Steel Reinforcement Using a Fiber Section Element (화이버 단면 요소를 이용한 강재 보강된 숏크리트 라이닝의 수치해석적 연구)

  • Kim, Jeong Soo;Yu, Jee Hwan;Kim, Moon Kyum
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.34 no.3
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    • pp.919-930
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    • 2014
  • In this study, the load capacities and behaviors of a shotcrete member with steel supports, as composite member, are investigated numerically by using a fiber section element. The cross section of a shotcrete lining with steel support is divided into a bundle of fibers, which are allocated nonlinear stress-strain relations and used for determining internal forces. To verify the used approach of the finite element method for shotcrete with steel supports, the load-displacement relations of shotcrete lining obtained by numerical analysis are compared with existing experimental results and are analyzed with the stress distribution of the shotcrete and steel support obtained numerically. As a result, it is shown that the proposed approach can predict the load capacities of each material and the overall nonlinear behavior of shotcrete lining with steel supports. The change of location of the neutral axis and the flexural resistance ratio of each material are also derived from the stress distribution of the cross section of the shotcrete lining with steel supports. From the results, it is concluded that the flexural resistance performance of steel support should be considered in shotcrete lining design.