• Journal of the Korean Society of Manufacturing Process Engineers
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• v.16 no.5
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• pp.40-46
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• 2017

A plasma gas control apparatus for semiconductor plasma etching processes securely holds a cathode for forming a plasma, confines the plasma during the plasma etching process, and discharges gas after etching. It is a key part of the etching process. With the advancement of semiconductor technology, there is increasing interest in parts for semiconductor manufacturing that directly affect wafers. Accordingly, in order to replace the plasma gas control device with a CVD-SiC material superior in mechanical properties to existing SiCs (Sintered-SiC, RB-SiC), a study on the grinding characteristics of CVD-SiC was carried out. It is confirmed that the optimal grinding condition was obtained when the result table feed rate was 2 m/min and the infeed depth was $5{\mu}m$.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.4
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• pp.1-8
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• 2004

Various controllable parameters of an experiment have influence on grinding process. In order to get good products with a high quality, these parameters should be considered whether each parameter has relations to the quality. This paper describes the use of the design of experiments to minimize geometric error in surface grinding. Controllable parameters for the design of experiments were selected as spindle speed, table speed, depth of cut and grain size. From the experimental results, a degree of influence between these parameters and the geometric error was evaluated. An optimal set of grinding conditions was obtained by means of analysis of variance(ANOVA).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1990.04a
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• pp.76-82
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• 1990

근년에 들어 우리 인류 사회는 우주 개발, 원자력 산업, 일렉트로닉스 산업 분야등에 걸친 눈부신 발전을 이루게 되며서 보다 극한적인 가혹한 환경 조건하에서도 뛰어난 내열성, 내식성, 기계적 강도, 전.자기적 특성등을 가지며 칫수의 정밀도가 좋은 재료를 필수로 하게 되었다. 이에따라 최근 새로이 등장하게 된것이 전기.전자 기능 등의 기능성을 지닌 기능 재료, 내열 구조 재료, 고강도 재료 등으로서 우수한 성능를 갖는 화인 세라믹스인데 이는 요즘 전세계적 으로 미래지향적 고부가가치의 전기.전자 부품, 기계 부품, 광학 부품 및 그 밖의 기타 첨단 산업 분야의 전반에 걸쳐 주목받고 있는 신소재이다. 즉, 종래의 전통적인 세라믹스로서 인식 되어 왔던 세라믹스 재료를 전혀 새로운 생각을 갖고 미래지향적 신소재로 만든 화인 세라믹스 재료가 등장하게 된것이다. 그러나 화인 세라믹스 부품의 제조에 있어서는 소결과정에서의 재료 수축을 피할 수 없는바, 단순 성형, 소결 과정으로만 끝나 실용화되는 제품을 제외한 정밀 기계, 구조용 부품등으로의 활용을 위해선 최종적인 재료의 정도를 내기 위한 기계 제거가공의 후가공 공정을 필수로한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.221-222
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• 2006

In recent years, the demands of the aspherical glass lenses increase since it is difficult to obtain the desirable performance in the plastic lens. Glass lens is manufactured by the forming with high precision mold core. This paper presents the analysis of optimal grinding condition of tungsten carbide(WC, Co0.5%) using design of experiments(DOE). The process parameters are turbin spindle, work spindle, feedrate and depth of cut. The experiments results are evaluated by MINITAB software.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.1
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• pp.35-41
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• 2010

In this paper, surface roughness has been experimentally identified using laser scattering images. The parameters and optical deflected rays of laser scattering are investigated on laser scattering system, and then their optimum parameters on grinding surfaces are selected using design of experiment. The application of the optimum parameters results in featured laser scattering images, in which the mean of vertical scattering distributions is regarded as a feature. It is shown that the feature of laser scattering distributions is linearly increased according to grinding surface roughness and so the information can be used as important factor for the measurement and evaluation of various surface roughness. In the future, the performance of the proposed laser scattering method will be evaluated using AFM.

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.197-198
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• 2006

본 연구에서 개발하는 성형렌즈는 그림1과 같이 한쪽 면이 비구면인 평볼록 형상이다. Glass렌즈의 고온압축성형을 위해서는 초정밀 가공기술로 제작된 성형Mold가 필요하며, Mold재질에 따른 성형기술의 확립이 필수적이다. 또한, 성형Mold의 표면과 융착반응이 없는 Glass소재가 요구된다. 본 실험을 위한 성형Mold는 코발트(Co) 함량 0.5 %의 초경합금(WC; 일본, Everloy社, 002K)을 초정밀 연삭가공하여 제작하였다. Glass소재는 전이점(Transformation Point; Tg) $572\;^{\circ}C$,항복점(Yielding Point; At) $630\;^{\circ}C$의 열적 특성을 갖는 K-BK7(일본, Sumita社)을 사용하였으며, d선에서 굴절률 및 아베수는 각각 1.51633, 64.1이다. 비구면 Glass렌즈 성형은 GMP(Glass Molding Press; 일본, Sumitomo社, Nano Press-S)장비를 사용하여 성형온도 $625\;^{\circ}C$, 서냉온도 $550\;^{\circ}C$로 고정하고 성형압력를 200-800 N 범위에서 변화시켰다. 표 1에 성형변수로 사용한 서냉속도와 서냉전환온도 조건을 나타낸다. 표1과 같이 각 서냉조건별로5장의 렌즈를 성형 후 특성값이 평균치에 가까운 3장을 선별하여 그 특성을 비교하였다. 각 조건에 따른 성형렌즈의 형상정도(일본, Panasonic社, UA3P, 자유곡면형상측정기), 두께(일본, Mitutoyo社, MDC-25M, 마이크로메터), 굴절률(일본, Shimatus社, KPR-200, 정밀굴절률측정기) 및 MTF[해상도](독일, Trioptics社, Image Master HR, MTF-Field)를 측정하여 각각의 광학적 특성을 비교 평가하였다. 비구면 Glass렌즈 성형장비와 형상측정기를 그림 2, 3에 각각 나타낸다.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.8
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• pp.141-146
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• 2002

This paper has studied to obtain the grinding characteristics and optimal grinding conditions of ceramic materials in the grinding with diamond wheel by design of experiments. The load on wheel by varying the feed rate was related with the surface roughness due to the minute destruction phenomenon of grains for the $Si_3\;N_4\;and\;ZrO_2$. The depth of cut is related with the surface roughness because the grinding is carried out by grain shedding process due to the brittle fracture phenomenon for the $A1_2\;O_3$. The major factors affecting the surface roughness and the optimum grinding conditions were obtained with minimum experiments using design of experiments.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.12 no.1
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• pp.79-88
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• 2014

We have developed a smart decontamination device for small-size radioactive scrap metal (SSRSM) necessarily generated from nuclear facilities. This is a multi-modal device such as rotation of magnetic field focusing on the region containing the abrasion pins placed around target and ultrasonic cleaner. Additionally, in order to increase the decontamination efficiency we have modified some configuration of the device so that it could work on them evenly and totally. With the Optimal operating for operation of the new device, we tried to decontaminate some various metal selected as a sample during 15 minutes sequentially using each method, magnetic and ultrasonic device. As a result, the range of decontamination factor has been highly increased to 18~56. After decontamination, all samples were found its activity less than background level.