• Proceedings of the KSME Conference
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• 2005.11a
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• pp.156.1-156.1
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• 2005

• Journal of the Korean Society for Precision Engineering
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• v.32 no.3
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• pp.263-268
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• 2015

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.22 no.4
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• pp.383-390
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• 2004

IGS provides so accute a final precise ephmerides which is offered in the 13rd, and it also offers a rapid precise ephmerides for more prompt application and an ultra-rapid precise ephmerides for real-time application. The purpose of this study is to analyze the accuracy of a rapid precise ephemerides and an ultra-rapid precise ephemerides based on a final precise ephmerides and determine the degree of the Lagrange Interpolation which needs to decide the location of a satellite. As the result of this study, the root mean square error of x,y,z coordinates of a rapid precise ephemerides was $\pm$0.0l6m or so, and the root mean square error of an observed ultra-rapid precise ephemerides was approximately $\pm$0.024m. The root mean square error of an ultra-rapid precise ephemerides predicted for 24 hours was $\pm$0.07m or so and the one of an ultra-rapid precise ephemerides predicted for 6 hours was $\pm$0.04m or so. Therefore, I could figure out that it had higher accuracy than a broadcast ephemerides. Also, in case that the location of a satellite was calculated with the method of the Lagrange Interpolation, it was confirmed that using the 9th order polynomial was efficient.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.64-70
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• 2002

The positioning system fur the ultraprecision machine tool should have nanometer order of positioning resolution. For the purpose of achieving that resolution, various feed drive devices have been proposed and currently hydrostatic lead screw and friction drive are paid attention. It is reported that an angstrom resolution can be achieved by using twist-roller friction drive. So we have manufactured ultraprecision feeding system driven by the twist-roller friction drive and perform performance assessment for problem definition and solution finding. As a result, we found that the twist-roller friction drive is mechanically suitable for ultraprecision positioning but some considerations are needed to get higher resolution.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.117-124
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• 2004

Recently, nano-methodology is increasingly important as the ruler for measuring nano-technology, and we applied the linear encoder to nano-methodology. The quadrature output in the linear encoder has an effect on increasing the resolution in some techniques. Already, various interpolation techniques based on the quadrature signal have applied to the precision servo system. In this paper, we propose a new interpolation algorithm for ultra-precision positioning in the low speed with simulation by MATLAB SIMULINK. This method modified previous methods and was properly designed for some given control system. To verify, we first fulfilled the encoder signal test to find main parameters fer the signal transformation, then we proved the proposed interpolation algorithm by experiments, which show that the result of the interpolation algorithm corresponds with the measurement of the laser interferometer in 100 nm unit approximately. In addition, we can get more precise measurement by more accurate and noise-free signal. So we need to compensate imperfections in the encoder signal. After that, we will apply this algorithm to nano positioning system.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• 기계와재료
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• v.2 no.3 s.5
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• pp.75-81
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• 1990

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.151-151
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• 2004

현재 세계 기술은 고집적화, 소형화, 고속화, 정밀화 된 시스템을 추구하고 있으며 기계적인 요소와 전기적인 요소를 통합한 장비의 개발에 초점을 맞추고 있다. 그 예로 일렉트로닉스, 옵토일렉드로닉스, 옵틱스, MEMS 등을 들 수 있다. 이러한 장비들은 초정밀 위치 결정을 위해 미크론 단위 또는 나노 단위의 분해능을 가진 구동기가 필요하다. 이러한 구동기에 많이 사용되는 대표적인 재료에는 자기변형 재료와 압전 재료가 있다. 압전 재료는 현재 구동기에서 가장 많이 사용되는 재료이지만 피로현상, 드리프트 및 출력 힘이 작은 문제점을 가지고 있다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.270-270
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• 2003