• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.163-168
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• 2004

Linear motor can directly apply to the system needed linear mot ions without rotary mot ions. To control a high-speed and high-resolution, the development of the linear motors is recently required in the high-integrated and speed process industry. This paper presents vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the vibration characteristics and thermal behaviors of the advanced products. Vibration experiments are conducted for identifying the hysteresis and vibration level during operation. They are also included in the modal test to analyze the vibration. Analytic data using Finite Element Method (FEM) are compared with the results of the modal. Loss of temperature generated the linear motor leads to a serious deformation within its parts. The thermal behaviors are very important factor in linear motor. The FEM and experiments make it possible to understand these characteristics.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.195-201
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• 2004

In design stage of high precision manufacture/inspect ion FAB building, it is necessary to investigate the vibration allowable limits of high precision equipment and to study a structure dynamic characteristics of C/R and Sub-structure in order to provide a structure vibration environment to satisfy thess allowable limits. The aim of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next TFT LCD FAB through vibration measurement and analysis procedure, therefore, to provide a proper dynamic structure design for high precision manufacture/inspection work process, which satisfy thess allowable limits.

• Transactions of the Korean Society of Automotive Engineers
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• v.2 no.3
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• pp.33-39
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• 1994

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$\times$70$\times$70$\times$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 1995.10b
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• pp.211-217
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• 1995

Conventional linear control fails to provide precise positioning of a control object under the influence of friction, deadzone, saturation, etc. This paper proposes a high-precision control scheme for a precise point-to-point positioning system, called an X-Y table, even under the same influences above. The proposed scheme is composed of a fuzzy precompensator and a PD controller. The fuzzy precompensator is employed to improve the performance of the PD controller. Its fuzzy rules are obtained from experimental evolutionary programming (EP), not from an expert. The effectiveness of the scheme is demonstrated by experiments on the X-Y table. with a positioning error of within 1$\mu\textrm{m}$.

• Proceedings of the KIEE Conference
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• 2001.07d
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• pp.2544-2545
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• 2001

In industry and engineering, the tensile measurement of single crystal metal material such as the uniform change, surface structure and the tensile torque of the material is not easy to obtain by current the tensile measurement methods. In this paper, we have implemented a tensile system which can acquire tensile information in real time.

• 기계와재료
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• v.22 no.1
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• pp.14-21
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• 2010

초미세 레이저 가공기술은 미세화, 대면적화, 고속화의 방향으로 발전되고 있다. 이에 따라 이를 대응한 레이저의 사양도 파장의 단파장화 또는 펄스폭의 극초단화, 펄스 반복률의 고반복률화, 출력의 고출력화가 요구되고 있다. 극초단 펄스레이저는 사용자 편의성, 안정성 측면에서 산업체의 요구에 미흡하다. 이에 따라 산업용 초미세 레이저 가공을 위한 광원으로 고품질, 고출력의 단파장 자외선 레이저 활용에 집중하고 있다. 현재 고품질 자외선 레이지는 DPSSL 형태로 구성되어 출시되고 있고, 거의 대부분 수입에 의존하고 있다. 국내외 자외선 UV 현황을 간단히 기술하고, 광주과기원 고등광기술연구소에서 산업원천기술개발사업의 일환으로 개발중인 복합형 자외선 DPSSL에 대한 개발 계획 레이저 특성과 현재의 개발 진행 상황을 소개한다.

• Proceedings of the KIEE Conference
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• 2003.07b
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• pp.1006-1008
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• 2003

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

• Proceedings of the KIEE Conference
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• 2000.11b
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• pp.274-276
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• 2000

Recently, the demands of the ultra-precision stage system, such as wafer stepper stages for photolithography, are increasing in the field of manufacturing and test equipment. Since the mechanical elements which convert rotational motion into translational introduce backlash and elasticity in the system, better performance of the drive could be achieved by the linear BLDC motor with appropriate servo control. The analytical design and the FEM analysis about linear BLDC motor is described in this paper. The performance of the servo-drive system will be evaluated through the comparison of results between the designed data and the measured data in the future.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.144-145
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• 2007

본 논문은 LabVIEW를 이용하여 온도측정과 amperometry 측정을 동시에 하며, amperometry 측정오차와 구동전압의 세팅 시간을 줄일 수 있는 시스템을 설계한 내용을 담고 있다. Amperometry는 구동전압을 인가하여, 전류를 측정하는 방법인데, 정확한 측정을 위해서는 구동전압을 균일하게 인가해야 한다. 또한 바이오 분야에서의 amperometry 측정은 온도에 따라 측정 결과가 다르게 나타날 수 있기 때문에 온도의 측정과 amperometry 측정이 동시에 이루어져야 측정오차를 줄일 수 있다. 본 논문에서는 이상(異常) 구동전압의 배제 알고리즘을 통하여 전류측정의 오차를 ${\pm}$70pA에서 ${\pm}$50pA이내로 줄였으며, proportional control을 응용한 알고리즘을 사용하여 307초의 측정시간을 105초로 단축하였다. 또한 amperometry 측정 과정에서 온도를 실시간으로 측정함으로써 측정상태를 보다 정확히 파악하는 시스템을 구성하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.427-427
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• 2007

The global applications of aspherics surfaces will expand rapidly on the electronics, optical components, communications, aerospace, defense, and medical optics devices etc. Especially, Asymmetric aspheric prism lens is one of the important parts in HMD(Head Mounted Display) because it affects dominantly on the optical performance of HMD. The mold core is the most important device to produce the plastic lenses by injection molding method. In this study, the mold cores for asymmetric aspheric prism lens were processed using fly-cutting method which is kind of the ultra precision processing and form accuracy and surface roughness of the cores were measured.