• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the KSR Conference
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• 2003.05a
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• pp.712-717
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• 2003

지능 재료를 이용한 디바이스는 자연계에 존재하는 생명체와 같이 내.외부 환경 변화에 대응하여 스스로 변하는 능동적 기능을 갖고 있기 때문에 시스템 성능의 극대화 및 유지비용의 최소화를 가져오게 된다. 이러한 지능재료 기술은 지난 10여년 전부터 연구되었는데 대표적인 웅용을 보면, 산업, 항공, 교통, 운송 분야의 능동 소음 및 반능동 진동제어; 복합 재료 손상위치 탐지시스템, 손상구조 건전성 평가시스템, 교량, 저장탱크, 건물, 유조선, 대형 구조물의 건전성 평가 시스템; 초정밀 직진 안내기구, 나노 스테이지, 절삭오차 보정용 엑츄에이터, 초음파 회전모터, 지능유압 서보밸브, 변형 거울 등의 모터/엑츄에이터; 자동차 엔진 성능제어, 흡배기구 압력측정, 가속도 센서, 자이로센서, 에어백 센서, 타이어 센서 등의 지능 MEMS/NEMS 센서; electronic article 정찰, 도서태그, 비접촉 항공 운송물 분류 및 보안시스템, 전자 운전자 식별시스템, 광섬유 건물 보안 시스템, 지능 신경망 형상 인식 시스템 등의 보안 시스템; 지능항공기 구조물, 인공위성안테나, 헬리콥터 회전익 등의 형상제어가 있다. 본 논문에서는 지능재료 기술을 정리하고 차세대 철도차량 기술에 지금까지 적용한 예를 소개하며 향후 적용할 수 있는 분야들을 가능성 및 실용성 면에서 소개하고자 한다.

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2011.11a
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• pp.44-44
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• 2011

본 연구에서는 직물조직의 분석과정을 자동화할 수 있는 전용 하드웨어 및 소프트웨어를 개발하였다. 직물조직의 분석은 직물 설계 및 품질관리 단계에서 매우 중요한 공정이나 현재까지도 확대경과 분해침에 의존하여 수작업으로 이루어지고 있는 것이 실정이라 자동화가 절실히 요구되는 분야라고 할 수 있다. 최근 컴퓨터 기술의 발달로 섬유산업 분야에서도 자동화 관련 연구가 많이 이루어지고 있으며 직물 분석 과정에 대한 연구도 여러 차례 시도된 바 있다. 여기에는 주로 디지털 영상으로부터 특징을 찾아내고 분석하는 이미지 프로세싱 기법이 쓰였는데 이는 재현성, 정확성, 속도 등에서 육안에 의한 방법과는 비교할 수 없는 장점을 가지고 있다. 그러나 기존의 연구들은 카메라의 한계로 인해 주로 저해상도의 이미지를 가지고 작업을 하거나, 이미지 프로세싱 또는 인공 신경망을 단독으로 적용하는 등의 한계를 가지고 있었다. 본 연구에서는 이러한 문제점을 극복하기 위해 초고해상도 직물 이미지를 획득한 뒤 이로부터 직물의 교차점을 인식하는데 필요한 파라미터를 추출하고 이를 인공 신경망에 학습시켜 직물 설계에 필요한 조직도를 생성하는 시스템을 개발하고자 하였다. 이를 위해 먼저 컴퓨터로 컨트롤이 가능한 직물 분석 전용 초정밀 XY 스테이지의 하드웨어를 설계 제작 하였으며 각종 이미지 분석 및 하드웨어 컨트롤에 필요한 전용 소프트웨어를 개발하였으며 그 결과 각종 직물의 조직을 매우 정확히 인식할 수 있게 되었다. 향후 이미지 획득 과정의 보완, 새로운 파라미터의 정의 및 신경망의 반복 학습을 통해 본 시스템이 보다 보완된다면 직물 분석 작업의 자동화를 통한 제품 개발과 생산에 소요되는 시간을 단축 및 품질 관리 공정의 자동화에 기여할 수 있을 것으로 기대된다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.4
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• pp.868-878
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• 1998

There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.12
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• pp.5412-5419
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• 2011

The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.