• Clean Technology
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• v.15 no.2
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• pp.69-74
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• 2009

A high-dose ion-implanted photoresist (HDIPR) was stripped off from the surface of a semiconductor wafer by using a mixture of supercritical carbon dioxide and a co-solvent. The additional ultrasonication improved the stripping efficiency remarkably and thus reduced the stripping time by supplying physical force to the substrate. We investigated the effect of co-solvents, co-solvent concentration, and stripping temperature and pressure on the stripping efficiency. The wafer surfaces before and after stripping were analyzed by scanning electron microscopy and by an energy dispersive X-ray spectrometer. The HDIPR could be stripped off completely in 3 min with 10%(w/w) acetone/sc$C0_2$ mixture at 27.6 MPa and 343 K.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.720-724
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• 2008

The purpose of this study is to evaluate the PM10 removal efficiencies of an Air-washer and an Ultrasonic humidifier by mock-up experiments. The concentrations of PM10 were measured at 5 minute intervals using $\beta$-Ray method. The average PM10 removal efficiency of the Air-washer was 79.8%, while the PM10 concentrations increased with the operation of Ultrasonic humidifier. In the case of operating the Air-washer, the R.H(Relative Humidity) level of the test room was maintained at around 45%, regardless of initial R.H condition. The R.H of the test room with Ultrasonic humidifier was influenced by the initial R.H condition.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.2
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• pp.15-25
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• 2024

In this study, the regeneration effect of pressurized water and ultrasonic cleaning was investigated for contaminated filter cloth from the sewage sludge filter press process. For this purpose, contaminated filter cloth was collected from a 3-ton sewage sludge hydrothermal carbon treatment filter press. First, the contamination characteristics were analyzed. According to the location of the filter cloth, air permeability and unit mass were measured, and compared with the values of a new filter cloth. Next, the results were mapped over the entire area to evaluate the contamination characteristics. Finally, pressure cleaning at 3 bar and ultrasound at frequencies of 34, 76, 120, and 168 kHz were performed on the contaminated filter cloth. In addition, the cleaning efficiency was evaluated by 3 levels of contamination degree. As a result, pore contamination occurred mainly at the bottom and both sides of the filter cloth, where the filter material was continuously injected and compressed. Surface contamination appeared evenly over the entire area. As a result of washing, air permeability increased by 1.3-3.1%p and contaminant removal was by 2.7-4.4% under pressure. In ultrasonic cleaning, air permeability increased by 12.5-61.5%p and contaminants were removed by 2.7-29.2%. In ultrasonic cleaning the lower the frequency, the higher air permeability and contaminant removal rate. Also, The higher pore contamination level, the better the air permeability improvement and contaminant removal.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.12 no.1
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• pp.79-88
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• 2014

We have developed a smart decontamination device for small-size radioactive scrap metal (SSRSM) necessarily generated from nuclear facilities. This is a multi-modal device such as rotation of magnetic field focusing on the region containing the abrasion pins placed around target and ultrasonic cleaner. Additionally, in order to increase the decontamination efficiency we have modified some configuration of the device so that it could work on them evenly and totally. With the Optimal operating for operation of the new device, we tried to decontaminate some various metal selected as a sample during 15 minutes sequentially using each method, magnetic and ultrasonic device. As a result, the range of decontamination factor has been highly increased to 18~56. After decontamination, all samples were found its activity less than background level.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.656-661
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• 1997

Ultrasonic cleaning at high frequency near 1MHz, called megasonic cleaning, is commonly used to remove particles less than 1.mu.m by generating accelerations on them. Ultrasonic waves generated from piezoelectric transducers are transmitted through a non-metallic inner container which is used to isolate a cleaning object from metallic ions. The transmission characteristics of a double-structured megasonic cleaner on the variations of parameters such as the thickness and oblique angle of a inner container, chemical ratio of a cleaning agent and temperature and transmittivity are investigated. The results are used to determine an optimum cleaning condition.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.184-187
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• 2005

In this paper, the transducer instead of mechanical dynamic structure was used to generate ultrasonic wave and the horn-shape amplifier was utilized to solve the energy decaying problem of ultrasonic wave with propagating it through the media. The analyses of ultrasonic wave and a fluid for the selected structure of a cleaning head were carried out Based on simulator results, the distance between a horn and the substrate of 4 mm and the horn diameter of 10 mm were determined to maximize the energy of ultrasonic waves. The cool ins structure was also considered to reduce the heat from the transducer and the horn.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.2005-2010
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• 2004

Ultrasonic cleaning is performed by cavitation which is caused by the change of the sound pressure due to the vibration in a cleaning tank. In this study, experiments on electric power and sound pressure with various temperatures, dissolved oxygen and the level of the fluid was done in order to find out how the changes in a cleaning tank affect cavitation. As a result of a series of experiments, we found that transducer impedance changes periodically in response to the variances of fluid and have a direct influence on cleaning efficiency.

• Applied Chemistry for Engineering
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• v.20 no.4
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• pp.430-436
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• 2009

Deactivated three-way catalysts which had been exposed to gasoline engine exhaust for a long time were remanufactured by ultra sonic cleaning with distilled water, sulfuric acid solution and impregnation with precious metals (Pt, Pd, Rh). The catalytic properties as well as conversion reactivity of CO, THC and NOx about fresh, aged and remanufactured catalysts were examined. Most of the pollutants deposited on the aged three-way catalysts were removed in the remanufacturing process of those catalysts. At the same time a little amount of precious metals like Pt and Pd were removed in the remanufacturing process. Under the experimental condition used in this study, in the case of the remanufactured catalysts with impregnation of precious metals, the catalytic activities were recovered to almost the same level, or higher level of that of the fresh catalyst.

• Korean Journal of Animal Reproduction
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• v.25 no.3
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• pp.207-217
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• 2001

Diagnosis and treatment of major reproductive failures were carried out for 836 dairy cows of 12 farms in Kimje area from May 1999 to May 2000. Reproductive failures were classified into four categories: uterine diseases, ovarian diseases, combination of uterine and ovarian diseases, and anestrus with corpus luteum (CL), based on the diagnosis by both rectal palpation and ultrasonography (SA 600, Medison, 5.OMHz transducer). 1. Of 102 cows examined, 15 cows were diagnosed as pregnant. Cows with real reproductive failures were therefore 87 cows and the rate of reproductive failures far all the cows of 12 farms was 10.4% (87/836). 2. Of 57 cows with reproductive failures, the cows with uterine diseases were 33 heads (37.9%), with ovarian diseases: 30 heads (34.5%), with combination form: 16 heads (18.4%), and with anestrus with CL: 8 heads (9.2%). 3. Of 87 cows with reproductive failures, 7 cows were slaughtered and 80 cows were treated by hormone or douche. The cows expressed estrus were 74 cows (92.5%, 74/80 heads) and 56 cows were pregnant (70.0%, 56/80 heads) following treatment. 4. The reproductive failures tended to be increased as the period proceeded from 30 days (2.3%, 2/87 heads) to over 120 days (56.3%, 49/87 heads) after parturition. 5. Associated other diseases to reproductive failures were foot diseases(5 cows), joint diseases (5 heads), urovagina (6 heads), and rectovaginal fistula (2 cows) and the rate of occurrence of associated diseases was 20.7% (18/87 heads). 6. No reproductive record was used in 7 farms of 12 farms and 5 farms had no play ground or not used for the cows. These results indicated that diagnosis fur reproductive failures by rectal palpation along with ultrasonography was more accurate than the conventional rectal palpation and brought better result of treatment for major types of reproductive failures. It was also indicated that non-uses of reproductive record and play ground were also important factors in occurrence of reproductive failures.

• Korean Journal of Food Science and Technology
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• v.32 no.4
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• pp.763-771
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• 2000

The 88 kinds of pesticide residues were analyzed in 12 kinds(289 samples) of fruits and vegetables brought at department store & mart in Kwangju from Feburary to September in 1999. The detection rate of pesticide residue in 12 kinds(289 samples) of fruits and vegetables was 21.1%, and the rate exceeds standard was 5.2%. The order of highly exceed rate in fruits and vegetables were perilla leaf, lettuce, spinach and chickery. The order of pesticide which founded frequently in fruits and vegetables were procymidone, endosulfan, vinclozoline, chlorpyrifos, cyprermethrin, pirimiphos-M, fenvalerate, fenarimol, and monocrotophos. And that of pesticide which exceed highly standard were procymidone, vinclozolin, endosulfan, pirimiphos-M, fenarimol, monocrotophos, etc. Eight different washing methods were compared for removal efficiencies of residual pesticides(procymidone, vinclozoline) on the perilla leap, the lettuce, the spinach, the strawberry, and the minitomato. Residual pesticides such as procymidone and vinclozoline were removed most efficiently by ultrasonic washing.