• The Magazine of the IEIE
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• v.24 no.10
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• pp.23-44
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• 1997

이 글에서는 요즘 신문이나 텔레비전을 통해서 인체 내부를 돌며 검사 및 치료를 하는 마이크로 로보트 등의 차세대 첨단기술로서 일반 국민들에게 소개되기도 하며, MEMS, 마이크로머신, 마이크로시스템, 혹은 초소형 정밀기계 등으로 불리는 기술과 이 기술에 대한 각국 (미국, 일본, 유럽, 한국)의 기술 동향을 소개한다. 이에 이어서, 현재 과기처의 선도기술개발사업 (소위 G7사업) 으로서 진행되고 있는 초소형 정밀기계 기술개발 사업에 대한 소개를 한다. 이 분야에 종사하지 않는 보통 사람들을 위해 가급적 쉬운 말로 풀어 쓰도록 노력하였다. 이 글에서 다루고 있는 크기의 기본 단위는 마이크로미터 (천분의 일 밀리미터) 이며, 사람의 머리카락의 직경이 약 100 마이크로미터 (0.1mm) 내외이다. 초소형 기계나 초소형 부품들은 대개 이 머리카락의 직경정도이며, 머리카락속에 모터나 기어 등이 들어있다고 생각해도 크게 틀리지 않을 것이다.

• Ceramist
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• v.7 no.3
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• pp.21-27
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• 2004

MEMS(Micro Electro Mechanical Systems)는 초소형 구조물의 제작 기술인 마이크로머시닝 기술을 이용하여 제작되는 초소형 전자기계 시스템을 말한다. 최근 10여 년간 MEMS 기술이 상당히 진척되었고 다양한 마이크로머시닝 기술이 개발되었다. 이에 따라 이를 이용하여 다양한 MEMS 소자의 개발이 이루어지고 있다. 그 중에서도 MEMS 센서는 비교적 간단한 제작 공정과 작은 크기, 그리고 저비용으로 인하여 상품화가 쉽게 이루어지고 있다. (중략)

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.43 no.10 s.352
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• pp.27-34
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• 2006

This paper has implemented a very small($1.4{\times}2.8[Cm^2]$) 13.56[MHz] RFID reader ensuring machine ID recognition correctly in a noise space of Tag-to-Reader within 3Cm. For operation of the RFID system, at first, this paper has designed the loop antenna of a reader and the fading model of back-scattering on microwave propagation following to 13.56[MHz] RFID Air Interface ISO/IEC specification. Secondly, this paper has proposed the automatically path selected RF switching circuit and the firmware operation relationship by measuring and analyzing the very small RFID RF issues. Finally, as a very small reader main body, this paper has shown the DSP board and software functions made for extraction of $1{\sim}2$ machine ID information and error prevention simultaneously with carrying of 13.56[MHz] RFID signals that the international standard specification ISO/IEC 18000-3 defined.

• Ceramist
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• v.7 no.3
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• pp.28-33
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• 2004

1987년 미국 버클리 대학의 연구진은 반도체 미세공정 기술을 이용해 머릿카락 굵기의 초소형 모터를 발표하였다(Fig. 1).1) 이는 MEMS(Micro Electro Mechanical System, 혹은 MST , Micro System Technology)라는 새로운 학문 분야의 실질적 효시로, 명실공히 마이크론 단위의 기계-전자 시스템의 구현이라는 새로운 장을 열게되었다. (중략)

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.7
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• pp.979-986
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• 2013

Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.6
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• pp.438-445
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• 2019

In this paper, we present a new approach to extract the g-sensitivity scale-factor error for a MEMS gyroscope. MEMS gyroscopes, based on the use of both angular momentum and the Coriolis effect, have a g-sensitivity error due to mass unbalance. Generally, the g-sensitivity error is not considered in general use of gyroscopes, but it deserves our attention if we are to develop for tactical class performance and reliability. The g-sensitivity error during vehicle flight increases navigation error; so it must be analyzed and compensated for the use of MEMS IMU for high dynamics vehicle systems. Therefore, we analyzed how to extract the g-sensitivity scale-factor error from the inertial sensor error model. Furthermore we propose a new method to extract the g-sensitivity error using flight motion simulator. We verified our proposed method with experimental results.

• Journal of the Korean Society of Propulsion Engineers
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• v.21 no.6
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• pp.1-7
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• 2017

The performance of a MEMS solid propellant thruster was predicted and analyzed through internal ballistics model and CFD analysis. The nozzle throat was $416{\mu}m$, and the area ratio of the nozzle was 1.85. As a result of the internal ballistics model, chamber pressure increased up to 197 bar and the maximum thrust was 3,836 mN. In CFD analysis, the chamber pressure of the internal ballistics model was applied as the operating pressure, and the CFD model was divided into an adiabatic and a heat loss model. As a result, the maximum thrust of the adiabatic model was 14.92% lower than that of the internal ballistics model, and the effect of heat loss was insignificant.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.1
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• pp.36-45
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• 2017

Abstract It is necessary to verify the properties of an inertial measurement unit in the flight environment before applying to military applications. In this paper, we presented a new approach to verify an inertial measurement unit(IMU) in regard to the performance and the robustness in flight environments for the high-dynamics vehicle systems. We proposed two methods for verification of an IMU. We confirmed normal operation of an IMU and properties in flight environment by using direct comparison method. And we proposed real time multi-navigation system to complement the first method. The proposed method made it possible to compare navigation result at the same time. Therefore, it is easy to analyze the performance of an inertial navigation system and robustness during the vehicle flight. To verify the proposed method, we carried out a flight test as well as an experimental test of flight vibration on the ground. As a result of the experiment, we confirmed flight environment properties of an IMU. Therefore, we shows that the proposed method can serve the reliability improvement of IMU.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.3
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• pp.47-56
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• 2005

This paper presents a performance improvement result with the aid of closed feedback controller loop to a micro gyroscope. The dynamic model of a micro gyroscope is derived and a conventional proportional and derivative controller is designed via frequency domain analysis. The proposed control loop is implemented using several analog devices and applied to the SNU-Bosch MEMS gyroscope to check its performance improvement in real environment. The experiments demonstrated the performance improvement with the proposed feedback control loop. The bandwidth, linearity, and bias stability are improved to 78 Hz, 0.504 %, and 0.043 deg/sec, respectively, from 35 Hz, 2.07 %, and 0.066 deg/sec of open loop system.