• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3316-3318
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• 1999

PMMA(poly-methyl methacrylate) microlens array is fabricated using transparent acrylic resin. PMMA is commonly used material for plastic lens due to its excellent visibility larger than 90% and other optical characteristics so much close to those of glass. Orthodontic resin (DENTSPLY International Inc.), commonly used in dentistry, is an transparent acrylic resin kit including MMA liquid and polymerization powder. Their mixture results in PMMA through polymerization. Using the resin PMMA layer is formed on the substrate through spin-coating. Designed pattern of lens structure is transferred to PMMA layer by RIE (Reactive Ion Etching) with oxygen plasma. Final lens shape is formed by thermal treatment that causes PMMA to reflow, The thickness of PMMA spun on the substrate is $17{\mu}m$ that is also final sag of microlens, Designed diameters of the microlenses are $200{\mu}m$, $300{\mu}m$,and $500{\mu}m$, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.282.2-282.2
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• 2016

중적외선 물질에는 Ge, ZnS, ZnSe, Si 등이 있으나 고굴절율이므로 반사가 매우 크게 발생을 한다. 이를 줄이기 위해 다층 박막 무반사 코팅을 일반적으로 사용하지만 열에 취약함, 적합한 물질을 찾는 것이 매우 어려움, 다층 박막으로 제작 시 두께가 매우 두꺼워짐의 단점이 있다. 또한 Ge, ZnS, ZnSe 의 소재는 가격이 Silicon에 비해 매우 비싸다. 그러므로 RCWA(Rigorous Coupled Wavelength Analysis) 시뮬레이션을 이용하여 상대적으로 저렴한 소재임에도 고투과성을 지닌 중적외선용 무반사 실리콘 서브파장구조(Subwavelength Structures, SWSs)를 제안한다. 본 연구에서는 원기둥, 원뿔, 파라볼라, 잘린 원뿔(truncated cone) 등의 형태에 따른 투과율 특성을 파악하여 최적구조가 파라볼라 형태임을 증명하였다. 또한 서브파장구조의 주기, 높이의 특성을 조절하여 공정 시의 종횡비(Aspect ratio)를 고려한 최적형태를 제안하였다. 중적외선 영역($3{\mu}m{\sim}5{\mu}m$)에서 일반 Silicon의 적외선 영역에서 평균 55%의 낮은 투과율을 보이나, 양면에 무반사 구조를 설계 하였을 때 평균 94%의 높은 투과율을 확인할 수 있다. 다양한 형태를 가진 무반사 실리콘 서브파장 구조물을 RCWA 방식으로 계산함으로서 특성을 파악하며 최적구조를 설계 할 수 있다. 또한 단면에 비하여 양면으로 SWSs 구조를 제작할 시 매우 두드러지는 투과특성을 확인할 수 있다. 고굴절율이지만 뛰어난 투과특성을 이용하여 초소형 적외선 카메라 렌즈 뿐만 아니라 적외선 광검출기, 광학 필터 등에 이용 가능할 것으로 예상된다.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.

• Korean Journal of Materials Research
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• v.11 no.9
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• pp.792-796
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• 2001

For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

• Korean Journal of Optics and Photonics
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• v.32 no.2
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• pp.68-78
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• 2021

A subminiature catadioptric omnidirectional optical system (SCOOS) with 2 mirrors, 6 plastic aspherical lenses, and an illumination system of 6 light emitting diodes, to observe the 360° panoramic image of the inner intestine, is optically designed and evaluated for a capsule endoscope. The total length, overall length, half field of view (HFOV), and F-number of the SCOOS are 14.3 mm, 8.93 mm, 51°~120°, and 3.5, respectively. The optical system has a complementary metal-oxide-semiconductor sensor with 0.1 megapixels, and an illumination system of 6 light-emitting diodes (LEDs) with 0.25 lm to illuminate on the 360° side view of the intestine along the optical axis. As a result, the spatial frequency at the modulation transfer function (MTF) of 0.3, the depth of focus, and the cumulative probability of tolerance at the Nyquist frequency of 44 lp/mm and MTF of 0.3 of the optimized optical system are obtained as 130 lp/mm, -0.097 mm to +0.076 mm, and 90.5%, respectively. Additionally, the simulated illuminance of the LED illumination system at the inner surface of the intestine within HFOV, at a distance of 15.0 mm from the optical axis, is from a minimum of 315 lx to a maximum of 725 lx, which is a sufficient illumination and visibility.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.2
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• pp.69-74
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• 2020

In this study, we proposed a method for surface profiling aspheric lens molds using a precision displacement sensor with a spatial scanning mechanism. The precision displacement sensor is based on the confocal principle using a broadband light source, providing a 10 nm resolution over a 0.3 mm measurable range. The precision of the sensor, depending on surface slope, was evaluated via Allan deviation analysis. We then developed an automatic surface profiling system by measuring the cross-sectional profile of a lens mold. The precision of the sensor at the flat surface was 10 nm at 10 ms averaging time, while 200 ms averaging time was needed for identical precision at the steepest slope at 25 deg. When we compared the measurement result of the lens mold to a commercial surface profiler, we found that the accuracy of the developed system was less than 90 nm (in terms of 3 sigmas of error) between the two results.

• Transactions of Materials Processing
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• v.15 no.1 s.82
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• pp.3-8
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• 2006

The demand fer small and high-capacity optical data storage devices has rapidly increased. The areal density of optical disk is increased by using higher numerical aperture objective lens and shorter wavelength source. A wafer-scale stacked micro objective lens with a numerical aperture of 0.85 and a focal length of 0.467mm for the 405nm blue- violet laser was designed and fabricated. A diffractive optical element (DOE) was used to compensate the spherical aberration of the objective lens. Among the various fabrication methods for micro DOE, the UV-replication process is more suitable fur mass-production. In this study, an 8-stepped DOE pattern as a master was fabricated by photolithography and reactive ion etching process. A flexible mold was fabricated for improving the releasing properties and shape accuracy in UV-replication process. In the replication process, the effects of exposing time and applied pressure on the replication quality were analyzed. Finally, the surface profiles of master, mold and molded pattern were measured by optical scanning profiler. The geometrical deviation between the master and the molded DOE was less than $0.1{\mu}m$. The diffraction efficiency of the molded DOE was measured by DOE efficiency measurement system which consists of laser source, sample holder, aperture and optical power meter, and the measured value was $84.5\%$.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.35-40
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• 2005

The demand for small and high-capacity optical data storage devices has rapidly increased. The areal density of optical disk is increased using higher numerical aperture objective lens and shorter wavelength source. A wafer-scale stacked micro objective lens with a numerical aperture of 0.85 and a focal length of 0.467mm for the 405nm blue- violet laser was designed and fabricated. A diffractive optical element (DOE) was used to compensate the spherical aberration of the objective lens. Among the various fabrication methods for micro DOE, the UV-replication process is more suitable for mass-production. In this study, an 8-stepped DOE pattern as a master was fabricated by photolithography and reactive ion etching process. A flexible mold was fabricated for improving the releasing properties and shape accuracy in UV-molding process. In the replication process, the effects of exposing time and applied pressure on the replication quality were analyzed. Finally, the shapes of master, mold and molded pattern were measured by optical scanning profiler. The deviation between the master and the molded DOE was less than 0.1um. The efficiency of the molded DOE was measured by DOE efficiency measurement system which consists of laser source, sample holder, aperture and optical power meter, and the measured value was $84.5\%$.