• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.459-465
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• 2004

Micro-factory is a small system to produce a small parts and this manufacturing system has advantages such as energy saving, resources saving, and manufacturing space saving. Micro-factory are classified according to production type and has many applications in various industry. In this paper, the basic concept and applications of micro-factory are introduced.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.5-13
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• 2000

지금까지의 기계산업의 발달은 대규모의 플랜트 혹은 대형기계 개발 등 대형화를 추구해왔다. 그러나, 최근 에너지와 환경에 대한 인식과 정보 통신, 전자산업, 생명산업의 발달로 소형화와 미세화의 기술 개발이 요구되고 있다. 그 예로 크기가 micron혹은 sub-millimeter 단위인 초소형기계 (Micro Machine)이 등장하게 되었고, 이러한 부품 및 시스템을 제작하는 미세 가공 기술을 Micro Machining이라고 할 수 있다.(중략)

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.608-613
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• 2007

Fine pitch microprobe arrays are microneedle-like probes for inspecting the pixel of LCD panel. They are usually made of multilayers of metallic, nonmetallic, or combination of the two. In this study, the microprobe arrays were fabricated using the process applied for MEMS fabrication technology and they consist of BeCu, BeNi, or Si. Their contacting probing force and deflection were measured using the laser equipment. The design requirement are 5gf of a minimum contact force and $150{\mu}m$ of a maximum deflection. A lot of microprobe shape are possible satisfying the requirement. A double cantilever-type microprobe having needles on both ends were applied for this study. Several candidate were chosen using the topology and shape optimization technique subjected to the design requirements. Finite element results and experimental results were compared and both gave good correlation.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.417-420
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• 2007

Micro parts are usually used of producing by micro-electro-mechanical systems(MEMS). In this paper, we present some fundamental results concerning on the MEMS, extrusion condition on the micro forming characteristics and new micro forward extrusion machine has been developed. In the first step, we manufactured micro dies in two kinds of sections. One is a circle section, another is a cross section. The process for fabricating micro dies combines a deep UV-lithography, anisotropic etching techniques and metal electroplating with bulk silicon based on Ni with a thickness of $50{\mu}m$. The outer diameter of Ni-micro dies is 3mm and the diameter of extrusion section is $270{\mu}m$ for a cross section, $500{\mu}m$ for a circle section. The low linear density polyethylene(LLEPD) in the shape of a pellet has been used of micro extrusion. The billet was placed in a container manufactured by electric discharge machining and extruded through the micro die by a piezoelectric actuator. The micro extrusion has succeeded in a forming such micro parts as micro bars, micro cross shafts.