• 센서학회지
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• 제28권4호
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• pp.251-255
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• 2019

We propose a two-step lithography process to minimize edge-bead issues caused by thick photoresist (PR) coating. In the conventional PR process, the edge bead can be efficiently removed by applying an edge-bead removal (EBR) process while rotating the silicon wafer at a high speed. However, applying conventional EBR to the production of desired PR mold with unique negative patterns cannot be used because a lower rpm of spin coating and a lower temperature in the soft bake process are required. To overcome this problem, a two-step lithography process was developed in this study and applied to the fabrication of a polydimethylsiloxane (PDMS) film having super-hydrophobic characteristics. Following UV exposure with a first photomask, the exposed part of the silicon wafer was selectively removed by applying a PR developer while rotating at a low rpm. Then, unique PR mold structures were prepared by employing an additional under-exposure process with a second mask, and the mold patterns were transferred to the PDMS. Results showed that the fabricated PDMS film based on the two-step lithography process reduced the height difference from 23% to 5%. In addition, the water contact angle was greatly improved by spraying of hydrophobic nanosilica on the dual-scaled PDMS surface.

• Design & Manufacturing
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• 제15권4호
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• pp.57-64
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• 2021

In recent materials industry, researches on the technology to manufacture super hydrophobic surface by effectively controlling the wettability of solid surface are expanding. Research on the fabrication of super hydrophobic surface has been studied not only for basic research but also for self-cleaning, anti-icing, anti-friction, flow resistance reduction in construction, textile, communication, military and aviation fields. A super hydrophobic surface is defined as a surface having a water droplet contact angle of 150 ° or more. The contact angle is determined by the surface energy and is influenced not only by the chemical properties of the surface but also by the rough structure. In this paper, maskless lithography using DMD, electro etching, anodizing and hot embossing are used to make the polymer resin PMMA surface super hydrophobic. In the fabrication of microstructure, DMDs are limited by the spacing of microstructure due to the structural limitations of the mirrors. In order to overcome this, maskless lithography using a transfer mechanism was used in this paper. In this paper, a super hydrophobic surface with micro and nano composite structure was fabricated. And the wettability characteristics of the micro pattern surface were analyzed.

• 한국전기전자재료학회논문지
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• 제24권1호
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• pp.64-69
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• 2011

Super-hydrophobic properties have been achieved on the rf-sputtered polytetrafluoroethylene(PTFE) films deposited on etched aluminum surfaces. The microstructural evolution created after etching has been investigated by FESEM. The water contact angle over $160^{\circ}$ can be achieved on the rf-sputtered ultra-tihn PTFE film less than 10 nm coated on aluminum surface etched with 7 wt.%, 12.5 wt.%, and 15 wt.% HCl concentration for 12 min. XPS analysis have revealed the presence of a large quantity of $-CF_3$ and $-CF_2$ groups in the rf-sputtered PTFE films that effectively can reduce the surface energy of etched aluminum. The presence of patterned morphology along with the low surface energy at the rf-sputtered PTFE coating makes the aluminum surface with high super-hydrophobic property.

• 한국시뮬레이션학회논문지
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• 제29권1호
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• pp.47-55
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• 2020

본 논문은 드론봇 전투체계를 운용하여 전투전단의 적 보병부대 위치정보를 수집하였을 시, 지휘관이 요구하는 적 부대 피해수준을 충족하면서 적 보병부대를 신속하고 정확하게 타격하기 위하여, 보유한 화력체계의 살상범위를 기초로 최적의 사격발수 및 조준점 위치를 실시간 자동으로 산출하는 인공지능 알고리즘 연구이다. 이를 위해, 100m×200m 크기의 야지 전장환경에서 증강된 소대급 규모의 적 보병부대를 임의로 전개 및 모의하고, 약 15m의 살상범위를 갖는 가상의 화력체계에 대한 모델링을 수행하였으며, 각개 적병사의 무피해/경상 및 중상/사망 등의 피해유형 및 임무수행 가능여부를 모의하기 위하여 연성표적의 피해효과에 적용되는 칼튼피해함수를 적용하고 전장의 불확실성을 모의하기 위하여 몬테칼로 시뮬레이션을 수행하였다. 또한, 지휘관 의도에 부합된 적부대의 피해수준을 달성하기 위하여, 반복적인 모의 및 비지도학습의 k-mean clustering 기법을 적용하여 최적의 사격발수 및 조준점 위치를 0.4초 이내로 산출하였다. 본 연구에서 제안하는 방법은 드론봇 전투체계를 운용하는 대대급 규모의 전투부대에서 '탐지-결심-타격' 의사결정시간의 단축에 기여할 것으로 판단된다.