Effect of RF Sputtering Conditions on Properties of Thin Film Resistor for Microwave Device (초고주파용 박막저항의 특성에 미치는 RF 스파터링 조건의 영향)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2003.07b
- /
- pp.913-917
- /
- 2003