• Title/Summary/Keyword: 차폐보정

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Paraboloidal 2-mirror Holosymmetric System with Unit Maginification for Soft X-ray Projection Lithography (연X-선 투사 리소그라피를 위한 등배율 포물면 2-반사경 Holosymmetric System)

  • 조영민;이상수
    • Korean Journal of Optics and Photonics
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    • v.6 no.3
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    • pp.188-200
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    • 1995
  • A design of unit magnification 2-mirror system with high resolution is presented. It is for soft X-ray(wavelength of 13 nm) projection imaging and suitable for preparation of high density semiconductor chip. In general, a holosymmetric system with unit magnification has the advantage that both coma and distortion are completely eliminated. In our holosymmetric 2-mirror system, spherical aberration is addtionally removed by using two identical paraboloidal mirror surfaces and field curvature aberration is also corrected by balancing Petzval sum and astigmatism which depends on the distance between two mirrors, so that the system is a aplanatic flat-field paraboloidal 2-mirror holosymmetric system. This 2-mirror system is small in size, and has a simple configuration with rotational symmetry about optical axis, and has also small central obscuration. Residual finite aberrations, spot diagrams, and diffraction-based MTF's are analyzed for the check of performances as soft X-ray lithography projection system. As a result, the image sizes for the resolutions of$0.25\mum$and $0.18\mum$are 4.0 mm, 2.5 mm respectively, and depths of focus for those are $2.5\mum$, $2.4\mum$respectively. This system should be useful in the fabrication of 256 Mega DRAM or 1 Giga DRAM. DRAM.

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Evaluation of hydrological applicability for rainfall estimation algorithms of dual-polarization radar (이중편파 레이더의 강우 추정 알고리즘별 수문학적 적용성 평가)

  • Lee, Myungjin;Lee, Choongke;Yoo, Younghoon;Kwak, Jaewon;Kim, Hung Soo
    • Journal of Korea Water Resources Association
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    • v.54 no.1
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    • pp.27-38
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    • 2021
  • Recently, many studies have been conducted to use the radar rainfall in hydrology. However, in the case of weather radar, the beam is blocked due to the limitation of the observation such as mountain effect, which causes underestimation of the radar rainfall. In this study, the radar rainfall was estimated using the Hybrid Sacn Reflectivity (HSR) technique for hydrological use of weather radar and the runoff analysis was performed using the GRM model which is a distributed rainfall-runoff model. As a result of performing the radar rainfall correction and runoff simulation for 5 rainfall events, the accuracy of the dual-polarization radar rainfall using the HSR technique (Q_H_KDP) was the highest with an error within 15% of the ground rainfall. In addition, the result of runoff simulation using Q_H_KDP also showed an accuracy of R2 of 0.9 or more, NRMSE of 1.5 or less and NSE of 0.5 or more. From this study, we examined the application of the dual-polarization radar and this results can be useful for studies related to the hydrological application of dual-polarization radar rainfall in the future.

Improvement of Radar Rainfall Estimation Using Radar Reflectivity Data from the Hybrid Lowest Elevation Angles (혼합 최저고도각 반사도 자료를 이용한 레이더 강우추정 정확도 향상)

  • Lyu, Geunsu;Jung, Sung-Hwa;Nam, Kyung-Yeub;Kwon, Soohyun;Lee, Cheong-Ryong;Lee, Gyuwon
    • Journal of the Korean earth science society
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    • v.36 no.1
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    • pp.109-124
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    • 2015
  • A novel approach, hybrid surface rainfall (KNU-HSR) technique developed by Kyungpook Natinal University, was utilized for improving the radar rainfall estimation. The KNU-HSR technique estimates radar rainfall at a 2D hybrid surface consistings of the lowest radar bins that is immune to ground clutter contaminations and significant beam blockage. Two HSR techniques, static and dynamic HSRs, were compared and evaluated in this study. Static HSR technique utilizes beam blockage map and ground clutter map to yield the hybrid surface whereas dynamic HSR technique additionally applies quality index map that are derived from the fuzzy logic algorithm for a quality control in real time. The performances of two HSRs were evaluated by correlation coefficient (CORR), total ratio (RATIO), mean bias (BIAS), normalized standard deviation (NSD), and mean relative error (MRE) for ten rain cases. Dynamic HSR (CORR=0.88, BIAS= $-0.24mm\;hr^{-1}$, NSD=0.41, MRE=37.6%) shows better performances than static HSR without correction of reflectivity calibration bias (CORR=0.87, BIAS= $-2.94mm\;hr^{-1}$, NSD=0.76, MRE=58.4%) for all skill scores. Dynamic HSR technique overestimates surface rainfall at near range whereas it underestimates rainfall at far ranges due to the effects of beam broadening and increasing the radar beam height. In terms of NSD and MRE, dynamic HSR shows the best results regardless of the distance from radar. Static HSR significantly overestimates a surface rainfall at weaker rainfall intensity. However, RATIO of dynamic HSR remains almost 1.0 for all ranges of rainfall intensity. After correcting system bias of reflectivity, NSD and MRE of dynamic HSR are improved by about 20 and 15%, respectively.

Optimum Radiotherapy Schedule for Uterine Cervical Cancer based-on the Detailed Information of Dose Fractionation and Radiotherapy Technique (처방선량 및 치료기법별 치료성적 분석 결과에 기반한 자궁경부암 환자의 최적 방사선치료 스케줄)

  • Cho, Jae-Ho;Kim, Hyun-Chang;Suh, Chang-Ok;Lee, Chang-Geol;Keum, Ki-Chang;Cho, Nam-Hoon;Lee, Ik-Jae;Shim, Su-Jung;Suh, Yang-Kwon;Seong, Jinsil;Kim, Gwi-Eon
    • Radiation Oncology Journal
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    • v.23 no.3
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    • pp.143-156
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    • 2005
  • Background: The best dose-fractionation regimen of the definitive radiotherapy for cervix cancer remains to be clearly determined. It seems to be partially attributed to the complexity of the affecting factors and the lack of detailed information on external and intra-cavitary fractionation. To find optimal practice guidelines, our experiences of the combination of external beam radiotherapy (EBRT) and high-dose-rate intracavitary brachytherapy (HDR-ICBT) were reviewed with detailed information of the various treatment parameters obtained from a large cohort of women treated homogeneously at a single institute. Materials and Methods: The subjects were 743 cervical cancer patients (Stage IB 198, IIA 77, IIB 364, IIIA 7, IIIB 89 and IVA 8) treated by radiotherapy alone, between 1990 and 1996. A total external beam radiotherapy (EBRT) dose of $23.4\~59.4$ Gy (Median 45.0) was delivered to the whole pelvis. High-dose-rate intracavitary brachytherapy (HDR-IBT) was also peformed using various fractionation schemes. A Midline block (MLB) was initiated after the delivery of $14.4\~43.2$ Gy (Median 36.0) of EBRT in 495 patients, while In the other 248 patients EBRT could not be used due to slow tumor regression or the huge initial bulk of tumor. The point A, actual bladder & rectal doses were individually assessed in all patients. The biologically effective dose (BED) to the tumor ($\alpha/\beta$=10) and late-responding tissues ($\alpha/\beta$=3) for both EBRT and HDR-ICBT were calculated. The total BED values to point A, the actual bladder and rectal reference points were the summation of the EBRT and HDR-ICBT. In addition to all the details on dose-fractionation, the other factors (i.e. the overall treatment time, physicians preference) that can affect the schedule of the definitive radiotherapy were also thoroughly analyzed. The association between MD-BED $Gy_3$ and the risk of complication was assessed using serial multiple logistic regression models. The associations between R-BED $Gy_3$ and rectal complications and between V-BED $Gy_3$ and bladder complications were assessed using multiple logistic regression models after adjustment for age, stage, tumor size and treatment duration. Serial Coxs proportional hazard regression models were used to estimate the relative risks of recurrence due to MD-BED $Gy_{10}$, and the treatment duration. Results: The overall complication rate for RTOG Grades $1\~4$ toxicities was $33.1\%$. The 5-year actuarial pelvic control rate for ail 743 patients was $83\%$. The midline cumulative BED dose, which is the sum of external midline BED and HDR-ICBT point A BED, ranged from 62.0 to 121.9 $Gy_{10}$ (median 93.0) for tumors and from 93.6 to 187.3 $Gy_3$ (median 137.6) for late responding tissues. The median cumulative values of actual rectal (R-BED $Gy_3$) and bladder Point BED (V-BED $Gy_3$) were 118.7 $Gy_3$ (range $48.8\~265.2$) and 126.1 $Gy_3$ (range: $54.9\~267.5$), respectively. MD-BED $Gy_3$ showed a good correlation with rectal (p=0.003), but not with bladder complications (p=0.095). R-BED $Gy_3$ had a very strong association (p=<0.0001), and was more predictive of rectal complications than A-BED $Gy_3$. B-BED $Gy_3$ also showed significance in the prediction of bladder complications in a trend test (p=0.0298). No statistically significant dose-response relationship for pelvic control was observed. The Sandwich and Continuous techniques, which differ according to when the ICR was inserted during the EBRT and due to the physicians preference, showed no differences in the local control and complication rates; there were also no differences in the 3 vs. 5 Gy fraction size of HDR-ICBT. Conclusion: The main reasons optimal dose-fractionation guidelines are not easily established is due to the absence of a dose-response relationship for tumor control as a result of the high-dose gradient of HDR-ICBT, individual differences In tumor responses to radiation therapy and the complexity of affecting factors. Therefore, in our opinion, there is a necessity for individualized tailored therapy, along with general guidelines, in the definitive radiation treatment for cervix cancer. This study also demonstrated the strong predictive value of actual rectal and bladder reference dosing therefore, vaginal gauze packing might be very Important. To maintain the BED dose to less than the threshold resulting in complication, early midline shielding, the HDR-ICBT total dose and fractional dose reduction should be considered.

Parameter Sensitivity Analysis for Spatial and Temporal Temperature Simulation in the Hapcheon Dam Reservoir (합천댐 저수지에서의 시공간적 수온모의를 위한 매개변수 민감도 분석)

  • Kim, Boram;Kang, Boosik
    • Journal of Korea Water Resources Association
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    • v.46 no.12
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    • pp.1181-1191
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    • 2013
  • This study have implemented finding the optimal water temperature parameter set for Hapcheon dam reservoir using CE-QUAL-W2 model. In particular the sensitivity analysis was carried out for four water temperature parameters of wind sheltering coefficient (WSC), radiation heat coefficient (BETA), light extinction coefficient (EXH2O), heat exchange coefficient at the channel bed (CBHE). Firstly, WSC, BETA, EXH2O shows relatively high sensitivity in common during April to September, and CBHE does during August to November. Secondly, as a result of identifying depth range of parameter influence, BETA and EXH2O show 0~9 m and 8~14 m which is thermocline layer close to water surface, CBHE is deep layer 12 m away from bottom. Finally, applying annual or monthly optimal parameter sets indicates that the bias between two sets does not show much differences for WSC and CBHE parameters, but BETA and EXH2O parameters show $0.20^{\circ}C$ and $0.51^{\circ}C$ of monthly average biases for two parameter sets. In particular the bias reveals to be $0.4^{\circ}C$ and $1.09^{\circ}C$ during May and August that confirms the necessity of use of monthly parameters during that season. It is claimed that the current operational custom use of annual parameters in calibration of reservoir water quality model requires the improvement of using monthly parameters.