• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.228-228
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• 2010

pin-형 비정질 실리콘 태양전지에서 p-층은 창물질로서 전기 전도도가 크고, 빛 흡수가 작어야 한다. p층의 두께가 얇으면 i층에서 충분한 내부전위를 얻을 수 없어 개방전압이 작아진다. 반대로 p-층 두께가 두꺼워지면 p-층 자체에서 빛 흡수가 증가하고, 높은 불순물 농도(> $10^{20}/cm^3$)에 의한 표면재결합이 문제가 되어 변환효율이 감소한다. 밴드갭이 큰 물질로 창층을 만들면 짧은 파장의 입사광이 직접 i-층을 비추므로 단락전류와 곡선인자를 증가시킬 수 있다. 본 실험에서는 비정질 실리콘 증착과 박막 특성 분석을 위하여, $5cm{\times}5cm$ 크기의 eagle 2000 glass(유리)와 p형 실리콘 wafer가 사용되었다. 투과도, 흡수도, Raman, 암전도도 와 광전도도 특성 측정에 유리 기판에 증착된 박막을, 두께 측정, FTIR 측정에는 실리콘 기판에 증착된 박막이 각각 사용되었다. p형 비정질 실리콘 증착에는 $SiH_4$, $H_2$, $B_2H_6$ 가스를 사용하였고, 플라즈마 형성에는 13.56MHz의 RF 소스가 사용하였다.p층은 $SiH_4$ 가스와 $H_2$ 가스비가 1:5인 조건에서 $B_2H_6$을 도핑하여 형성하였다. $B_2H_6$가스량을 변화시키며 형성하였으며, $B_2H_6$가스량이 증가함에 따라 암전도도가 증가하였으나, 광학적 밴드갭이 감소하였다. $H_2/SiH_4$ 가스 비가 0.001일 때 밴드갭은 1.76으로 i층보다 높게 형성되었으며, 암전도도는 $10^{-7}$이었다.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.161-168
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• 1998

Reactive ion etching process for InGaAs/InP using the CH4/H2 high density inductively coupled plasma was investigated. The experimental design method proposed by Taguchi was utilized to cover the whole parameter range while maintaining reasonable number of actual experiments. Results showed that the ICP power mainly affects surface roughness and verticality of the sidewall, bias power does etch rate and verticality, CH4 gas concentraion does the verticality and etch rate, and the distance between the induction coil and specimen mostly affects the surface roughness. It was also observed that the chamber pressure is the dominant parameter for the etch rate and verticality of the sidewall. The optimum condition was ICP power 700W, bias power 150 W, 15% $CH_4$, 7.5 mTorr, and 14 cm distance, resulting in about 3 $\mu\textrm{m}$/hr etch rate with smooth surfaces and vertical mesa sidewalls.

• Journal of the Korean Solar Energy Society
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• v.35 no.1
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• pp.61-68
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• 2015

The advanced counties effort to the supplement of the zero energy buildings for the global building energy saving. In the middle of the development of passive technology, the government has to effort to the energy saving of buildings by enhanced performance of the window thermal insulation. By the method of enhanced performance of window thermal insulation, the use of vacuum double glazing saves the energy consumption in building. This glazing has low U-value(heat transmission coefficient) than normal double glazing. The vacuum glazing enhanced thermal insulation performance by vacuum space of between the glass and glass. For this vacuum glazing, pillar maintain the space between glass and glass. But this structure cause the raising the heat transmission coefficient in pillar approaching glass. This study confirmed the U-value by the test method of thermal resistance for windows and doors. Also this study confirmed the variation of heat transmission coefficient by the structure of vacuum glazing. And this study measured the surface temperature of the vacuum glazing about pillar approaching glass and vacuum space in cool chamber and hot box. That result, this study confirmed U-value of $0.422W/m^2{\cdot}K$ of vacuum glazing. Also this study confirmed U-value of $0.300{\sim}0.422W/m^2{\cdot}K$ by various the structure of vacuum glazing. And this study confirmed the heat flow in pillar approaching glass.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.72-74
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• 2003

Rf magnetron sputtering을 이용하여 InP, GaAs 기판위에 ZnO 박막을 증착시켰다. 진공 ampul 및 $Zn_3P_2$ 분위기 하에서 열처리 과정을 통해 P와 As을 ZnO 박막내에 도핑하였으며, 박막의 전기적 특성 측정 결과 정공의 농도가 $10^{16}cm^{-3}-10^{19}cm^{-3}$ 으로서 p-형 전기전도도를 나타내었다. XRD 측정을 통하여 ZnO 박막의 내부에 이상이 존재하지 않는다는 것을 확인하였다. 또한 FESEM을 이용하여 p-형 ZnO 박막의 표면을 관찰하였으며 그 위에 n-형 ZnO 박막을 sputtering을 이용하여 증착시켜 I-V 특성을 관찰하였다. 본 실험을 통해 P 및 As의 확산을 통한 p-형 ZnO 박막의 성장이 가능하였으며, I-V 특성으로부터 ZnO의 발광소자 및 자외선 검출기로의 응용이 가능함을 확인하였다.

• 한국태양에너지학회:학술대회논문집
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• 2009.04a
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• pp.250-255
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• 2009

This study was analyzed the long term performance of the demonstration system for solar energy desalination in Jeju. we used a solar thermal system as heat source of the single-stage fresh water generator with plate-type heat exchangers and a photovoltaic power system as electric source for hydraulic pumps. The demonstration system was designed and installed at Jeju-island in 2006. The system was comprised of the desalination unit with daily fresh water capacity designed as $2m^3$ a $120m^2$ evacuated tubular solar collector to supply the heat, a $6m^3$ heat storage tank, and a 5kW photovoltaic power generation to supply the electricity of hydraulic pumps for the heat medium fluids. Through the operation during about 3 years, In a clear day more than $400W/m^2$, the daily fresh water showed to produce more than about 500liter, and from January, 2007 to March, 2009 for 3 years, solar irradiance daily averaged was measured $370W/m^2$, the daily fresh water yield showed that can be produced about 330liter.

• 한국태양에너지학회:학술대회논문집
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• 2008.04a
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• pp.221-226
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• 2008

This study was carry out evaluation of seasonal performance for the decentralized desalination system with the solar thermal system and the photovoltaic power system. First operating demonstration system was set up in Cheju in 2006. These system comprises the desalination unit with designed daily fresh water capacity of $2m^3$ and is supplied by a $120m^2$ evacuated tubular solar collector, a $6m^3$ heat storage tank, and a 5kW photovoltaic power generation supply the electricity for hydraulic pumps to move the working fluids. In a spring season day average $392W/m^2$, the daily fresh water showed to produce about 340liter. In a summer season day average $296W/m^2$, the daily fresh water showed to produce about 328liter. In a autumn season day average $349W/m^2$, the daily fresh water showed to produce about 277liter. In a winter season day average $342W/m^2$, the daily fresh water showed to produce about 271liter.

• 한국태양에너지학회:학술대회논문집
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• 2008.11a
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• pp.172-177
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• 2008

This study was carry out evaluation of long-term performance for the decentralized desalination system with the solar thermal system and the photovoltaic power system. First operating demonstration system was set up in Cheju in 2006. These system comprises the desalination unit with designed daily fresh water capacity of $2m^3$ and is supplied by a $120m^2$ evacuated tubular solar collector, a $6m^3$ heat storage tank, and a 5kW photovoltaic power generation supply the electricity for hydraulic pumps to move the working fluids. In a clear day more than 400W/$m^2$, the daily fresh water showed to produce more than about 500liter, and from January, 2007 to October, 2008 for 2 years, solar irradiance daily averaged was measured 370W/$m^2$, the daily fresh water yield showed that can be produced about 330liter.

• Journal of the Korean Solar Energy Society
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• v.27 no.4
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• pp.27-33
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• 2007

In this research, to develop the practical application system of fresh water generation system with plate-type fresh water generator using low pressure evaporation method is the main object, and to do that, this study used the evacuated solar collector with operating range of about $50-85^{\circ}C$ as thermal energy source and solar photovoltaic as electric energy source. To achieve that object, this study set up the demo-plant, then estimated and analyzed the usefulness, the safety, and the reliability through pre-tests during short time ahead of the long-time operation. This study showed that the pumps, which are including sea water supply, ejector, hot water supply, and fresh water pumps, were operated one after another. And, the fresh water yield was closely related with the solar irradiance and lower supply temperature of hot water was revealed more reasonable for the solar energy desalination system. That is due to the insufficient area than the solar collector area being required that was estimated through the performance tests of the fresh water generator.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.170.1-170.1
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• 2015

안티모니 (Sb)를 기반으로 한 제2형 초격자 (Type II superlattice, T2SL)구조 적외선 검출기 연구는 2000년대 들어 Sb 계열의 화합물 반도체 성장 기술이 발전함에 따라 HgCdTe (MCT), InSb, 양자우물 적외선 검출기 (QWIP)를 대체할 수 있는 고성능의 양자형 적외선 검출 소재로 부상하였으며, 현재 전 세계적으로 활발한 연구가 진행되고 있다. 특히, 기존의 양자형 적외선 검출소자에 비해 전자의 유효질량이 상대적으로 커서 밴드 간의 투과전류가 줄어들 뿐만 아니라, 전자와 정공이 서로 다른 물질 영역에 분포하여 Auger 재결합률을 효과적으로 줄일 수 있어 상온 동작이 가능한 소재로 주목을 받고 있다. 또한, T2SL 구조는 초격자를 구성하는 물질의 두께나 조성 변화를 통한 밴드갭 변조가 용이하여 단파장에서 장파장 적외선에 이르는 광범위한 파장 대역에서 동작이 가능할 뿐만 아니라 구조적 변화를 통해 이중 대역을 동시에 검출 할 수 있는 차세대 적외선 열영상 소자로 알려져 있다. 본 연구에서는 분자선 에피택시(MBE)법을 이용하여 300 주기의 InAs/GaSb (10/10 ML) 제2형 초격자 구조를 성장하여 적외선 검출소자를 제작하였다. 제2형 초격자 구조를 구성하는 물질계에 p-type dopant인 Be을 이용하여 각각 도핑 농도가 다른 시료를 성장하였다. 이때 p-type 도핑 농도는 각각 $1/5/10{\times}10^{15}cm^{-3}$로 변화를 주었다. 성장된 시료의 구조적 특성 분석을 위해 고분해능 X선 회절 (High resolution X-ray diffraction, HRXRD)법을 이용하였으며, 초격자 한 주기의 두께가 6.2~6.4 nm 로 설계된 구조와 동일하게 성장됨을 확인 하였으며, 1차 위성피크의 반치폭은 30~80 arcsec로 우수한 결정성을 가짐을 확인하였다. 적외선 검출을 위한 $410{\times}410{\mu}m^2$ 크기의 단위 소자 공정을 진행하였으며 이때 적외선의 전면 입사를 위해 소자 위에 $300{\mu}m$의 윈도우 창을 제작하였다. 단위 소자의 측벽에는 표면 누설 전류가 흐르는데 이를 방지하기 위해서 표면보호막을 증착하였다. 적외선 검출 소자의 전기적 특성 평가를 위해 각각의 시료의 암전류 (dark current)와 파장별 반응 (spectral response)을 온도별로 측정하여 비교 및 분석하였다.

• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.10-13
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• 2010

We studied the effect of $O_2$ plasma treatments on the electrical property of Ti / Al ohmic contacts to N-face n-type GaN. The surface of N-face, n-type GaN has been treated with $O_2$ plasma for 120 s before the deposition of bilayered electrodes, Ti (50 nm) / Al (35 nm), and its contact resistance was compared with that of the reference sample without $O_2$ plasma. As a result, we found that the ohmic contact was reduced from $4.3\;{\times}\;10^{-1}\;{\Omega}cm^2$ to $1.25\;{\times}\;10^{-3}\;{\Omega}cm^2$ by applying $O_2$ plasma on the surface of n-type GaN, which was attributed to the reduction in the Schottky barrier height (SBH), caused by nitrogen vacancies formed during the $O_2$ plasma process.