• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.179-183
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• 2000

This paper is concerned with achieving the high motion accuracy of linear motion bearing guide according to estimate accuracy average effect of bearing. Accuracy average effect can be obtained b analysis the relationship between motion error of the table and spatial frequency of the rail form error. And influences of ball diameter, ball number, and clock length on block motion error and block number on the table motion error are analyzed theoretically. In addition to, a simple experiment is performed in order to verify theoretical result.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.5
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• pp.405-413
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• 2015

This paper presents the motion accuracy simulation considering loads such as workpiece weight, cutting force, cogging force of a linear motor, and force caused by misalignment and runout error of a ballscrew in linear motion units. The transfer function method is basically utilized to estimate 5-DOF motion errors, together with the equilibrium equations of force and moment on the table. The transfer function method is modified in order to consider clearance changed according to the loads in the double sided hydrostatic/aerostatic bearings. Then, the analytic model for predicting the 5-DOF motion errors is proposed with the modified transfer function method. Motion errors were simulated under different loading conditions in the linear motion units using hydrostatic, aerostatic, and linear motion bearings, respectively. And the proposed analytic model was verified by comparing the estimated and measured motion errors.

• The Science & Technology
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• v.32 no.2 s.357
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• pp.86-87
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• 1999

98년 10월 27일부터 3일간 미국 세인트루이스에서 제13차 미국정밀학회 연례학술회의가 열렸다. 유럽ㆍ한국ㆍ일본 등 각국에서 3백여명이 참석한 이번 학술대회에서 강원대 장인배교수 연구팀은 자기부상을 이용한 초정밀 직선운동 테이블에 대한 연구를 4년째 발표하여 많은 찬사를 받았다. 이번 학회는 렌즈가공을 주 대상으로 한 연삭 및 폴리싱 등의 가공방법에 대한 연구가 주종을 이루었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

• Journal of IKEEE
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• v.24 no.3
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• pp.735-742
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• 2020

The pick & place module is used as a core module in the process equipment for producing and inspecting semiconductor components. The conventional pick & place module has the disadvantage that the precision and durability of the system are reduced and the size and weight of the module are increased by using a conversion device that converts rotary motion into linear motion. In this study, we proposed a pick & place module that implements up-and-down linear motion without a conversion device by improving such disadvantage and employs a linear motor with no limit on average thrust and travel distance. Design parameter values, that can reduce cogging force while maintaining average thrust by selecting parameters for designing a core type linear motor with a large thrust to volume ratio and analyzing the effect of cogging force according to design parameter changes through magnetic analysis, was selected. Average thrust and cogging force were measured for the pick & place module composed of the manufactured linear motor and compared with the design values.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.475-476
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.161-162
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.19 no.5
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• pp.139-148
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• 2002

Motion errors of linear motion guideway are analyzed theoretically in this paper. For the analysis, an new algorithm predicting motion errors of bearing and guideway is proposed using the Hertz's elastic deformation theory. Accuracy averaging effect can be calculated quantitatively by analyzing relationship between motion errors of guideway and spatial frequency of rail form error. Influences of design parameters on the motion errors including the number of balls, preload, ball diameter, bearing length and the number of bearings are analyzed. As it is difficult to measure the rail form error, experimental results are compared with results analyzed by the equivalent analysis method which evaluate the motion errors of guideway using the measured errors of bearing. From the experimental results, it is confirmed that the proposed analysis method it effective lo analyze the motion errors of linear motion bearing and guideway.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.685-686
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.569-570
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• 2011