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http://dx.doi.org/10.7471/ikeee.2020.24.3.735

Pick & Place Module consist of Linear Motor using Cogging Force Reduction Method  

Chung, Myung-Jin (Dept. of Mechatronics Engineering, Korea Polytechnic University)
Publication Information
Journal of IKEEE / v.24, no.3, 2020 , pp. 735-742 More about this Journal
Abstract
The pick & place module is used as a core module in the process equipment for producing and inspecting semiconductor components. The conventional pick & place module has the disadvantage that the precision and durability of the system are reduced and the size and weight of the module are increased by using a conversion device that converts rotary motion into linear motion. In this study, we proposed a pick & place module that implements up-and-down linear motion without a conversion device by improving such disadvantage and employs a linear motor with no limit on average thrust and travel distance. Design parameter values, that can reduce cogging force while maintaining average thrust by selecting parameters for designing a core type linear motor with a large thrust to volume ratio and analyzing the effect of cogging force according to design parameter changes through magnetic analysis, was selected. Average thrust and cogging force were measured for the pick & place module composed of the manufactured linear motor and compared with the design values.
Keywords
Cogging force; Linear motor; Magnetic analysis; Pick & Place; Structual analysis; Trust force;
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