• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.72-72
• /
• 2015

메모리 반도체 세계 시장 점유율 1위 뿐만 아니라 국내 전체 산업 가운데 가장 중추적인 역할을 하는 반도체 산업의 지속적인 성장과 국가 경제의 발전을 위해서 소자 업체 뿐만 아니라 장비, 소재, 부품 산업의 동반 성장은 반드시 필요하다. 그 중에서 특히 소재, 부품 산업을 발전시키는 것이 국산 반도체 장비의 시장 점유율이 낮은 현 시점에서 가장 필요한 선택이다. 반도체 소재, 부품 산업의 발전을 위해서 제일 먼저 해야할 일은 영세한 국내 반도체 소재, 부품 산업을 활성화 시키는 것이며, 지속 적인 연구 개발, 성능 평가 방안 확보, 수요 업체와의 연계 방안 확보 등이 주요 현안이다. 반도체 소자 업체, 장비 업체에서 원하는 소재 및 부품의 성능을 만족하는 제품을 만들기 위해서는 우선 소재 및 부품의 기본 특성을 만족하는지에 대한 평가가 필요하고, 더 나아가서는 디바이스의 특성을 만족시켜줄 수 있는 한 단계 상향된 수요자의 요구 조건을 만족 시켜줄 수 있어야 한다. 본 연구에서는 그 중 특히 중요한 요소인 성능 평가에 대해서 논하고자 한다. 우선 반도체 공정용 소재에 대해서 살펴 보면 대표적인 반도체 소재로 증착용 Precursor, Photo Resistor, Sputter Target 등이 있다, 평가 방법으로는 ALD용 Precursor의 경우 대기 노출시 폭발, 화염 발생 등의 위험 요소를 안고 있어 특별한 주의가 요구 된다. PR이나 Sputter Target은 상대적으로 위험성은 적으며, 다양한 성능 평가 들이 가능하다. 다음으로 부품 평가에 대해서 살펴 보자. 본 원에서 가장 많이 진행된 부품 평가는 개발된 Pump의 성능 평가이다. 개발된 Pump는 1차적으로 KRISS 진공센터 에서 기본 Pumping 능력 평가를 실시하고, 다음으로 공정 평가를 실시한다. Pump마다 특성이 달라서 각 펌프의 성능 평가에 적합한 공정과 장비를 우선 선정하고 그에 합당한 공정을 진행하여 평가를 실시한다. 고 진공용인 Cryo Pump는 순수한 물질의 증착이 중요한 Metal Sputter 공정 장비에 장착하여 공정용 Gas를 흘리면서 Pump의 구동에 따른 성능 평가를 하고, 다음으로 실제로 Metal Sputter를 실시해서 Wafer에 증착된 물질의 특성을 확인한다. 다음으로 Turbo Pump의 경우 Etch 장비에 장착하여 Etch Uniformity, Etch Rate, By-product 배출 정도에 대해서 평가를 한다. Dry Pump는 비교적 공정 압력이 낮은 PECVD 공정 장비에서 평가를 진행 한다. 마지막으로 공정 진단, 챔버 상태 진단 등을 할 수 있는 별도의 부품 또는 장치로 PBMS, PCDS, OES 등의 평가에 대해서 논한다. 본 장치들은 실제 반도체 공정 장비와 환경에서 평가가 되어야지만 최종 사용자 입장에서 신뢰를 가지고 결과에 대해서 접근할 수 있다. 위에 논의된 장치들은 현재 공정 장비에 부착되어서 판매 되고 있는 것이 아니라 수요가 많지 않으나, 자체 성능 개선과 적합한 평가를 통해서 장치의 성능이 인정되면 300 mm 이상 Wafer 공정에서 반드시 필요한 실시가 공정 진단을 위해서 폭발적인 수요를 창출할 수 있으리라 본다.

• Smart Media Journal
• /
• v.12 no.3
• /
• pp.120-128
• /
• 2023

There are various ICT technologies continuously being developed to reduce damage by industrial accidents. And research is being conducted to minimize damage in case of industrial accidents by utilizing sensors, IoT, big data, machine learning and artificial intelligence. In this paper, we propose a design method for a smart device capable of multilateral communication between devices and smart repeater in the communication shaded Areas such as closed areas of industrial sites, mountains, oceans, and coal mines. The proposed device collects worker's information such as worker location and movement speed, and environmental information such as terrain, wind direction, temperature, and humidity, and secures a safe distance between workers to warn in case of a dangerous situation and is designed to be attached to a helmet. For this, we proposed functional requirements for smart devices and design methods for implementing each requirement using sensors and modules in smart device. And we derived evaluation items for performance evaluation of the smart device and proposed an evaluation environment for performance evaluation in mountainous area.

• Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
• /
• v.5 no.3
• /
• pp.291-299
• /
• 2015

With recent surge of attention to heating and air conditioning energy consumption, the need for evaluating performance of heating and air conditioning energy is also on the rise. This research aims to propose daily-life based evaluation method as an alternative to existing one, as well as to apply the method in real life to prove its validity. The results are as following. 1) I studied temperatures preferred by persons indoors and appropriate level of temperature, and the results show that properties of such persons such as age is directly linked with pleasantness of the room, but the issue lies with the fact that such properties are not considered in existing performance evaluation of heating and air conditioning. 2) Daily life based evaluation proposed herein reflects such properties of persons indoors. It controls heating / air conditioning devices installed in the test bed with the same size as a real life room to get quantitative and visual performances in our daily life as well as simple temperature information. 3) To verify validity of daily life based evaluation, I conducted different evaluation sessions with and without a blind and also based on ages of persons indoors. Results based on properties of persons showed difference of 77.6%, leading to effective analysis of energy consumption pattern by heating / air conditioning devices. This research takes significance in that it comes with a new performance evaluation method based on real life, and I gather that further studies are required to develop more multilateral performance evaluation in order to verify and improve technology for reduction of energy consumption.

• Journal of Korea Water Resources Association
• /
• v.42 no.12
• /
• pp.1029-1038
• /
• 2009

Recently, it is expected that small hydropower (SHP) could potentially provide sufficient amounts of alternative energy in Korea where there is an abundance of potential sites and where social efforts are being made to reduce the emissions of green house gases. In the past, the resources survey for SHP development has been carried out using onsite surveys and paper maps, which incurred a great deal of time and cost. Furthermore, the tools for decision making such as determining development priorities or evaluating feasibility have been considered only economic aspect and focused on the performance characteristics of power generation. However, as the concept of sustainable development has been being advanced in recent years, especially focused on human-social, environmental and ecological in addition to economical sector; the consideration of these multiple criteria has become essential for sustainable SHP development. This study aims to propose the spatial multi-criteria decision making (MCDM) methodology for determining priorities among a number of locations on the planning stage of SHP development using AHP and GIS. The proposed methodology is applied for determining development priorities among the SHP locations in Cho River basin and this study presents the detailed spatial information data and the results of development priorities. As a fundamental work, this study will be beneficial to the future activation of SHP development and will help the decision making in evaluating the feasibility of SHP development.

• Journal of the Society of Disaster Information
• /
• v.17 no.1
• /
• pp.97-111
• /
• 2021

Purpose: It is expected that various infrastructures diagnosis equipment will be needed as infrastructures management is strengthened to implement the Framework Act on Sustainable Infrastructure Management. It is necessary for a certification system to supply certified products of a reasonable level in accordance with market requirements for various convergence equipment. This paper deals with the introduction of certification system of inspection and diagnosis equipment for infrastructure using advanced technologies. Method: The basic elements, systems and procedures of certification system were reviewed through analyzing and comparing the existing similar certification system in Korea. In addition, a survey was conducted on a catalog method and the minimum performance criterion (sampling survey and complete enumeration survey) to equipment developers (manufacturers), clients and equipment users. Result: This survey showed that clients preferred complete enumeration method on the basis of minimum performance, and equipment users also preferred complete enumeration survey and sample survey, for minimum performance, at a similar rate. On the other hand, equipment developers preferred the catalog method. Conclusion: Clients and users who are the users of the diagnostic equipment preferred the minimum performance criterion because their trust in quality is important. On the other hand, developers(manufacturers) preferred the catalog method which adopts self certification because it is regulated in developing various products. There is no specific plan for the minimum performance standards required for the introduction of the method which users demand, at present. In addition, it is not desirable to force to introduce a certification system because it requires a considerable period of study to prepare the specific standards. Therefore, it is appropriate to operate the system for a certain period of time centering around the catalog method for the stable and continuous development of the infrastructure diagnosis and test equipment market in Korea. Also, it is effective to expand and develop the certification system to the extent that it minimizes the impact on the market when specific plans for the standards are prepared in the future.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.227.1-227.1
• /
• 2016

플라즈마 방출광 진단법은 플라즈마에 특별한 영향을 주지 않으면서도 진단 정보를 안정적으로, 지속적으로 취득할 수 있는 우수한 진단 방법이다. 이러한 분광 진단의 신뢰성을 확보하기 위해서는 방출광의 정확한 측정과 해석이 중요하다. 방출광의 측정에 이용되는 분광 장비는 모노크로메터(monochromator)와 소형 스펙트로메터(spectrometer)가 주로 사용된다. 스펙트로메터의 경우 모노크로메터보다 분광 성능은 다소 부족하지만 가볍고 작은 크기로 인해 장비의 설치가 용이하고 가격이 저렴하다는 장점이 있다. 또한 모노크로메터에 비해 분광 성능이 낮은 대신 넓은 범위의 파장을 동시에 측정할 수 있는 장점이 있다. 따라서 스펙트로메터는 플라즈마의 모니터링에 주로 사용된다. 그런데 스펙트로메터의 기기적 선폭 증대(instrumental broadening)보다 조밀하게 위치한 스펙트럼들은 서로 중첩이 일어나 진단이 어려워진다. 특히 분자 띠 스펙트럼(molecular band spectrum)과 같은 경우 선 스펙트럼들이 매우 밀집된 형태를 이루고 있어 범용적인 스펙트로메터로 진단하기가 어렵다. 이러한 문제점을 해결하기 위하여 합성 스펙트럼 해석법(synthetic spectrum method)을 이용할 수 있다. 본 연구에서는 수소 플라즈마의 Fulcher-${\alpha}$ 띠 스펙트럼 해석에 합성 스펙트럼법을 적용하여 분자의 회전 온도가 측정 가능한지 확인하고, 고성능의 모노크로메터를 이용한 온도 측정 결과와 서로 비교하였다. 그리고 분자의 진동 상태(vibrational state)가 분자 회전 온도 측정에 미치는 영향과 이에 따른 측정의 한계 등을 제시하였다.

• Journal of Energy Engineering
• /
• v.12 no.3
• /
• pp.165-176
• /
• 2003

In this study, the exergy analysis is conducted on the well known performance of already developed system and then compared with the efficiency of each equipment to propose optimum operation of the system. The system used in this study is 500 MW coal firing power plant. The efficiency of the boiler is 67% and the condenser is 99% by exergy analysis. The exergy consumption of the boiler was 32.95% at 100% load. The exergy consumption of the high pressure turbine and the low pressure turbine is 8.31% and 8.12%, respectively. Together with the concrete study on the object of performance revision of the low efficient development system proved in this study, if detailed exergy analysis on the operation condition of the equipments of the development system presently being operated is continued, then it is expected to help minimize the exergy consumption of relatively low efficient parts that are worn-out or miss-installed.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2010.11a
• /
• pp.339-342
• /
• 2010

Doosan Heavy Industries & Construction Co., Ltd. constructed a gas turbine engine test cell to verify operating characteristics and design parameters of 5MW class gas turbine engine for power generation under developing. Engine test cell was designed to satisfy critical requirements to scrutinize all performance parameters of the engine with safe and reliability in accordance with design specification. As the test cell developed can effectively reproduce engine operation conditions covering from start-up to maximum power condition, it can be utilized to make a continuing design improvement of the engine based on practical test data at full stretch. Moreover, it is expected to be serviceable to develop derivative engines and be utilized to put them into serial production and contribute to a competitiveness reenforcement as a gas turbine engine manufacturer.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2019.05a
• /
• pp.260-263
• /
• 2019

Recently, the need of researches and developments about WSN(Wireless Sensor Network) technologies, which can be applied to services to regions where the access is difficult or services that require continuous monitoring, has gradually increased due to its expansion and efficiency of the application areas. In this paper, we analyze existing researches which focused on reducing packet loss rate and increasing lifetime of sensor nodes. Then, we conduct studies about performance improvement factors where some schemes - clustering and location-based approaches - are applied and compare our study results with existing researches. Based on our studies, we are planning to conduct researches about a new scheme that could contribute to improve WSN's performance in terms of packet loss rate and network lifetime.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.34 no.6C
• /
• pp.634-641
• /
• 2009

The goal of OSIC-series detection methods is to approach the ML performance with feasible complexity. However, since they sometimes suffer from the empty vector problem, they can not achieve the soft-output ML performance or many candidate vectors are required to achieve the soft-output ML performance. In this paper, we propose the novel detection method, which can generate the reliable soft-outputs without suffering from empty vector problem. The proposed detector can approach the near soft-output ML performance as well as hard-output. Further, the complexity study shows that the proposed detection method has the lowest complexity compared to the other detectors having the near ML performance.