• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.2
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• pp.41-47
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• 1999

In this paper, we report 3D-simulations of a plasma etching process by employing cell-removal algorithm takes into account the mask shadow effect os well as spillover errors. The developed simulator haas an input interface to take not only an analytic form but a Monte Carlo distribution of the ions. The graphic user interface(GUI) was also built into the simulator for UNIX environment. To demonstrate the capability of 3D-SURFILER(SURface proFILER), we have simulated for a typical contact hole structure with 36,000($30{\times}40{\times}30$) cells, which takes about 20 minutes with 10 Mbytes memory on sun ultra sparc 1. as an exemplary case, we calculated the etch profile during the reactive ion etching(RIE) of a contact hole wherein the aspect ratio is 1.57. Furthermore, we also simulated the dependence of a damage parameter and the evolution of topography as a function of the chamber pressure and the incident ion flux.

• Journal of the Korean Geotechnical Society
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• v.29 no.10
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• pp.57-66
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• 2013

Societal interest on a faster transportation demands an increase of the train speed exceeding current operation speed of 350 km/h. To trace the pattern of variations in displacements and subsoil stresses in the concrete slab track system, finite element simulations were conducted. For a simple track-vehicle modeling, a mass-point system representing the moving train load was developed. Dynamic responses with various train speeds from 100 to 700 km/h were investigated. As train speeds increase the displacement at rail and subsoil increases nonlinearly, whereas significant dynamic amplification at the critical velocity has not been found. At low train speed, the velocity of elastic wave carrying elastic energy is faster than the train speed. At high train speed exceeding 400 km/h, however, the train speed is approximately identical to the elastic wave velocity. Nonlinearity in the stress history in subsoil is amplified with increasing train speeds, which may cause significant plastic strains in path-dependent subsoil materials.

• Journal of the Korean Society for Railway
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• v.17 no.1
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• pp.7-13
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• 2014

Stiffness variations and wave propagation/reflection in railway catenaries are the primary sources of contact loss between a pantograph and a railway contact wire. This paper analyzes which design parameter is more important for 200km/h conventional rail and 300km/h high-speed rail, in order to effectively reduce the contact loss. For the high-speed rail, the wave propagation and reflection in the overhead contact lines are more influential than the stiffness variation over a span. When the high-speed rail needs to speed-up, it is necessary to develop higher strength contact wires in order to increase the wave propagation speed. In addition, the dropper clamp mass should be reduced in order to alleviate the wave reflection. However, it is noted that the increase in the tension to a messenger wire could deteriorate the current collection quality, which contrasts with expectations. For the 200km/h conventional rail, the stiffness variation over a span is more influential than the wave propagation and reflection. Therefore, shortening span length, increasing the tension in the contact wire and optimizing the location of the droppers are recommended for a smoother stiffness variation over the span.