• Journal of the Korea Organic Resources Recycling Association
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• v.31 no.3
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• pp.5-13
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• 2023

In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.

• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.96-104
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• 2010

We suggest here a cost-effective replica fabrication method for transparent and hard molds for imprinting lithography such as NIL and S-FIL. The process starts with the use of a replica hard mold from a master, using a polymer copy as a carrier. The polymer copy as a carrier was treated by soluble process for forming anti-adhesion layer. Duplicated hard molds can eliminate direct contact between a hard master and a patterned polymer on a substrate and the generated contamination of a master during the imprinting process. The replica hard mold exhibits the glass-like properties introduced here, such as transparency and hardness, make it appropriate for nanoimprint lithography and step-and-flash imprint lithography.

• Applied Chemistry for Engineering
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• v.4 no.3
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• pp.482-487
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• 1993

Organic nonlinear optical materials such as MNA(2-Methyl-4-nitro-aniline), Carbazole 1(5-Nitro-9-hydroxyethyl Carbazole), Carbazole 2(5-Nitro-9-ethyl Carbazole) and DR 1(Disperse Red 1) were incorporated into silica matrix to form a composite thin films. The thermal stability and degree of degradation were compared to these organic-inorganic composite film. Among those films, Carbazole 1 and DR 1 which have terminal -OH group showed enhanced stability for thermal degradation. The effect of polarization and degree of relaxation for the composite thin films incorporated with Carbazole 1 were measured by the absorbance change of UV spectra with time. With polarization treatment of Carbazole 1 incorporated composite film, the intensity of UV absorbance was remarkably reduced. And slow relaxation of Carbazole 1 molecule was suggested from the slightly recovered intensity of UV absorbance after removing the electric field at rooma temperature.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.7 no.5
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• pp.801-804
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• 2006

[ $GdAlO_3(GAO)$ ] buffer layer for $YBa_2Cu_3O_{7-{\delta}}(YBCO)$ coated superconductor wire was fabricated by sol-gel processing. Precursor solution was prepared by dissolving 1:1 stoichiometric quantaties of gadolinium nitrate hexahydrate and aluminum nitrate nonahydrate in methanol. The solution was spin-coated on $SrTiO_3(STO)$(100) single crystal substrates and heated at $1000^{\circ}C$ for 2h in wet $N_2-5%\; H_2$, atmosphere. A SEM(scanning electron microscopy) observation of the surface morphology of the GAO layer has shown that it has a faceted morphology indicating epitaxy. It was shown from x-ray diffraction(XRB) that GAO buffer layer was highly c-axis oriented epitaxial thin film with both good out-of-plane($FWHM=0.29^{\circ}$ for the (002) reflection) and in-plane ($FWHM=1.10^{\circ}$ for the {112} reflection) alignment.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.18 no.1
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• pp.50-55
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• 2008

AI-doped ZnO(AZO) thin films have been fabricated on glass substrate by sol-gel method, and the effect of Al precursors and post-annealing temperature on the characteristics of AZO thin films was investigated. The sol was prepared with zinc acetate, EtOH, MEA and Al precursors. In order to dope Al in ZnO, two types of aluminum nitrate and aluminum chloride were used as Al precursor. Zinc concentration was 0.5 mol/l and the content of Al precursor was 1 at% of Zn in the sol. The sol was spin-coated on glass substrate, and the coated films were annealed at 550ue for 2 hand were post-annealed at temperature ranges of $300{\sim}500^{\circ}C$ for 2 h in reducing atmosphere ($N_2/H_2$= 9/1). Structural, electrical and optical propertis of the fabricated AZO thin films were analyzed by XRD, FE-SEM, AFM, hall effect measurement system and UV-visible spectroscopy. Optical and electrical properties of AZO thin films prepared with aluminum nitrate as Al precursor were better than those of films prepared with aluminum chloride. The electrical resistivity and the optical transmittance of films decreased with increasing post-annealing temperatures. The minimum electrical resistivity of $2{\times}10^{-3}$ and the maximum optical transmittance of 91% were obtained for the AZO thin films post-annealed at $550^{\circ}C\;and\;300^{\circ}C$, respectively.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.4
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• pp.143-148
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• 2018

Sodium silicate based silica aerogels are lower in cost than silica alkoxide based silica aerogels, but the demand is decreasing as their physical properties are lowered. In this research, acetonitrile as a drying control chemical additive (DCCA) is added in the sol state to improve the pore-structural properties of sodium silicate based silica aerogel by preventing the agglomeration of particles and cross-linked bond. The sodium silicate based silica aerogel by ambient pressure drying were prepared by sol-gel process. Acetonitrile/$Na_2SiO_3$ molar ratio of 0, 0.05, 0.1, 0.15, and 0.2 was added to the sol state. The physical properties of the final product were analyzed using Fourier transform infrared, contact angle measurement, Brunauer-Emmett-Teller and Barrett-Joyner-Halenda measurements and field emission scanning electron microscopy. It was confirmed that the sample with adding 0.15 molar ratio of acetonitrile and sodium silicate showed a high specific surface area ($577m^2/g$), a high pore volume (3.29 cc/g), and a high porosity (93%) comparable to the pore-structural properties of silica alkoxide based silica aerogels.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.215-225
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• 2002

In order to enhance the thermal stability of binder materials of bonded type solid lubricants, several combinations of metal-alkoxide based sol-gel materials such as methyltrimethoxysilane(MTMOS), $titaniumisopropoxide(Ti(Opr^{j})_{4})$, $zirconiumisopropoxide(Zr(Opr^{j})_{4})$ and $aluminumbutoxide(Al(Obu^{t})_{4})$ were chemically modified by epoxy-, acrylic- and fluoro-silane compounds, respectively, in this work. Friction and wear characteristics of these hybrid ceramic materials were tested with a micro tribe-tester where a reciprocating steel ball slid on a test material, and the tribological property was also evaluated with respect to both heat-curing temperature and tile time. Test results generally showed that hybrid ceramic materials modified by epoxy-silane compounds had a low friction compared to others. And the higher heat-curing temperature and the longer heat treatment time resulted in the higher friction and the lower wear. IR spectroscopic analyses revealed that it was caused mainly by the increased metal oxide content in hybrid ceramics when the heat-curing temperature was over $320^{\circ}C$.

• Journal of Powder Materials
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• v.19 no.6
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• pp.398-404
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• 2012

This paper describes the spherical ammonium diuranate gel particles which are the intermediated material of the $UO_2$ microsphere for an VHTR(very high temperature reactor) nuclear fuel. The characteristics of the intermediate-ADU gel particles prepared by AWD(ageing, washing, and drying) and FB(fluidized-bed) apparatus were examined and compared in a sol-gel fabrication process. The electrical conductivity of washing filtrate from the FB treating and the surface area of dried-ADU gel particles were higher than those of AWD treating. Also, an internal pore volume in dried-ADU gel particles showed a more decrease in AWD treatment than FB treatment because of decomposition of PVA affected by the washing time. However, the internal microstructures of ADU gel particles were similar regardless of the process variation.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.291.1-291.1
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• 2014

산화아연 박막은 아연이 코팅된 테프론 기판 위에 졸-겔 스핀코팅 방법을 이용하여 각기 다른 후열처리 온도에서 제작되었다. 산화아연 박막의 후열처리 온도에 따른 구조적, 광학적 특성은 field emission scanning electron microscopy (FE-SEM), X-ray diffractometer, and photoluminescence spectroscope를 이용하여 분석하였다. 후열처리 온도를 달리하여 성장한 모든 산화아연 박막은 수지상(dendrite) 구조를 가지고 있으며, 이 수지상 구조 위에 약 20 nm의 산화아연 입자들이 성장되었다. 후열처리 온도가 증가함에 따라 c-축 배향성이 우세하게 나타났으며, 인장응력도 증가하였다. 후열처리 온도 $400^{\circ}C$에서 Near-band-edge emission (NBE) 피크는 적색편이(red-shift) 하였고, 후열처리 온도가 증가함에 따라 deep-level emission (DLE) 피크의 세기는 감소하였다. 또한 $400^{\circ}C$의 후열처리 온도에서 NBE 피크의 반치폭(FWHM)이 가장 작았으며, INBE/IDLE의 비율이 가장 높았다. 따라서 $400^{\circ}C$의 후열처리 공정에 의해 결정성 및 광학적 특성이 가장 우수한 산화아연 박막을 얻을 수 있었다.

• Tribology and Lubricants
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• v.18 no.5
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• pp.324-332
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• 2002

In order to enhance the thermal stability of binder materials of bonded type solid lubricants, several metal-alkoxide based sol-gel materials such as methyltrimethoxysilane(MTMOS), titaniumisopropoxide$(Ti(Opr^i)_4),$ zirconiumisopropoxide $(Zr(Opr^i)_4)$ and aluminumbutoxide$(Al(Obu^t)_4)$ were chemically modified by epoxy-, acrylic- and fluoro-silane compounds, respectively. Friction and wear characteristics of these hybrid ceramic materials were tested with a micro tribo-tester, and evaluated with respect to both heat-curing temperature and the time. Test results generally showed that hybrid ceramic materials modified by epoxy-silane compounds had a low friction compared to others. And the higher het-curing temperature and the longer heat treatment time resulted in the higher friction and the lower wear. IR spectroscopic analyses revealed that these results were caused mainly by the increased metal oxide content in hybrid ceramics when the heat-curing temperature was over $320^{\circ}C.$