• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.110-111
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• 2010

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.292-298
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• 2009

This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.329-334
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• 2001

Recently, the high precision technology can not be developed continuously if we don't have anti vibration technology. Vibration isolation technology using an air spring and laminated robber bearing is widely used because it has excellent vibration isolation characteristics. We developed high precision vibration table with two good element(air spring and LRB) for semiconductor factory. Air Spring is used for isolating the vertical vibration and LRB is used for isolating the horizontal Vibration. As a result, It has D-Class degree in BBR-Criteria. In this paper, we talk about orifice characteristics in the self-damped air spring and design flow of the laminated robber bearing. The orifice characteristics is delicate shade of length and diameter. When we do experimentation to find orifice characteristics, length is fixed and diameter is changed. The orifice diameter is the wider and the air spring stiffness is the softer.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.310-312
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• 2010

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1115-1121
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• 2003

The vibration isolation table system for the high precision Processing machinery has been developed. The system uses air spring as its isolation elements. An investigation of the model and the test results showed that the diaphragm has a role in the mathematical model. The vibration levels at various floors in the laboratory were investigated during operating the large shaking table for the selection of optimum installation location. The vibration test on the designed system showed good isolation performances.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.97-103
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• 2002

Vibration isolation technology using an air spring and laminated rubber bearing is widely used because it has excellent vibration isolation characteristics. In the part of that, we usually make use of the self-damped air suing. It is occupied two chambers, restrictor, diaphragm and load plate. Two chambers contain compressed air and the volume of chambers and the area of load plate give a definition of stiffness and load. The restrictor and the volume ratio of two chambers give a definition of damping ratio. The conventional model of restrictor is made of one orifice and it causes turbulent flow in the orifice at the region of large deflection. The stillness of air suing is larger and the damping is lower in the region of large deflection. In the multi-orifice case, the stiffness is similar to air spring with one orifice but damping ratio is larger than conventional air spring. And damping ratio is smaller than conventional air suing in small deflection region. Deflection is small in the region of high frequency so small damping is better than large damping. As a result, we can reduce the storage stiffness of air suing in the wide region of deflection and increase the damping ratio in the region of large deflection. After this, we will try to and the relation of Reynolds Number and Flow Resistance then we are going to make another restrictor for air spring to improve damping ratio and stiffness.