• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.482-482
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• 2013

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 본 연구에서는 가스클러스터 장치를 이용한 세정 특성 평가에 관한 연구를 수행하였다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상을 최소화 하고 상대적으로 높은 효율로 오염입자를 제거하게 된다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 평가하기 위하여 이러한 변수에 따라서 오염 입자의 종류, 크기에 따른 PRE (particle removal efficiency)를 평가하고 다양한 선폭의 패턴을 이용하여 손상 실험을 수행하였다. 제거 효율에 사용된 입자는 $CeO_2$와 $SiO_2$이며, 각각 30, 50, 100, 300 nm 크기를 정량적으로 오염시킨 쿠폰 웨이퍼를 제조하여 세정 효율을 평가하였다. 정량적 오염에는 SMPS (scanning mobility particle sizer)를 이용한 크기 분류와 정전기적 입자 부착 시스템이 사용되었다. 또한 패턴 붕괴 평가에는 35~180 nm 선폭을 가지는 Poly-Si 패턴을 이용하였다. 실험 결과 클러스터 형성 조건에 따라 상대적으로 낮은 패턴 붕괴에서 95% 이상의 높은 오염입자 제거효율을 전반적으로 보이는 것을 확인할 수 있었다. 따라서 이론적 계산에 기반하여 세정에 요구되는 클러스터 크기를 가정하고, 이를 통하여 세정에 적용할 경우 높은 기존 세정 방법의 단점을 보완하면서 높은 세정 효율을 가지는 대체 세정 방안으로 이용할 수 있음을 확인하였다.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 2008.11a
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• pp.510-514
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• 2008

본 연구에서는 전극의 특성에 따른 돈사유래 축산폐수의 ECO 공법에 의한 처리특성을 평가하기 위해 ECO 시스템 모듈내 Fe-Fe 및 Al-Al 계열의 용해성 전극과 Al-SUS, Ir-SUS 등 불용성 전극을 대상으로 5$\sim$20mA/cm$^2$의 전류밀도하에서 축산폐수내 유기물 및 영양염류의 제거특성을 평가하여 다음과 같은 결론을 얻을 수 있었다. 1. 전기응집산화에 의한 축산폐수의 처리시 수중 유기물질 및 영양염류의 제거효율은 전류밀도의 증가에 비례하여 증가한다. 2. 불용성 전극조합 및 불용성-용해성 전극조합은 전류밀도가 높을수록 수중 유기물 및 오염물질 제거효율이 안정되고, 용해성 전극은 15mA/cm$^2$ 이하의 저 전류밀도의 조건하에서 전류밀도의 증가에 따라 안정된 제거효율 향상을 기대할 수 있다. 3. 불용성전극 조합인 Ir-SUS 전극조합을 사용하여 축산폐수를 처리할 경우 COD$_{Mn}$ 제거효율을 약 10% 향상시킬 수 있으며, TN 20mA/cm$^2$에서 Al-Al 전극조합과 TP 15mA/cm$^2$ 이하에서 Fe-Fe 전극조합은 제거효율이 저하되는 경향이 나타난다.

• Journal of Environmental Impact Assessment
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• v.32 no.6
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• pp.419-430
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• 2023

In response to the periodic occurrence of cyanobacterial blooms in Korean freshwaters, various types of cyanobacteria removal technologies are being developed and implemented. Due to the differing principles behind these technologies, it is difficult to compare and evaluate their removal efficiencies. In this study, a standardized method for evaluating cyanobacteria removal efficiency was proposed by utilizing the results of removal operations using a mobile cyanobacteria removal device in the Seohwacheon area of Daechung Reservoir. During removal operations, the decrease in chlorophyll-a (chl-a) concentration (ΔChl-a) in the working area was calculated based on the amount of collected sludge, the efficiency rate, and the concentration of chl-a. Additionally, the required working days (WD) to reduce the chl-a concentration to 1 mg/m³ in the target area was calculated based on the area of the target zone, the maximum daily working area, and the efficiency rate. A method for calculating the cyanobacteria removal capacity was proposed based on the reduction rate of chl-a concentration in the water before and after the operation, the treatment capacity of the removal technology, and the water volume of the target area. The cyanobacteria removal capacity of the mobile cyanobacteria removal device used in this study was 6.64%/day (targeting the Seohwacheon area of Daechung Reservoir, approximately 500,000 m²), which was higher compared to other physical or physicochemical cyanobacteria removal technologies (0.02~4.72%/day). Utilizing the evaluation method of cyanobacteria removal efficiency presented in this study, it will be possible to compare and evaluate the cyanobacteria removal technologies currently being applied in Korea. This method could also be used to assess the performance and efficiency of physical or physicochemical combined cyanobacteria removal techniques in the "Guidelines for the Installation and Operation of Algae Removal Facilities and the Use of Algae Removal Agents" operated by the National Institute of Environmental Research.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2015.07a
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• pp.88-89
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• 2015

본 연구에서는 선박에서 발생하는 휘발성유기화합물을 처리하기 위하여 친환경적인 대기오염방지설비를 개발하기 위하여 유용미생물 담체를 충전한 바이오필터를 사용하여 VOCs가스를 처리하는 실험실 규모의 실험을 수행하였다. VOCs가스의 온도, pH, 습도, 가스농도와 VOCs가스 제거효율과의 상관관계를 도출하고 이를 바탕으로 바이오필터의 전반적인 VOCs가스 제거효율 및 수명 그리고 안정성 등을 평가하였다. 최적 조건에서의 VOCs 제거 효율은 유입되는 오염가스 농도가 2000ppmv까지 모든 범위에서 90%이상의 제거효율을 나타내는 것으로 보아 이 범위에서 안정적인 운전이 가능한 것으로 평가된다.

• Journal of Korean Ophthalmic Optics Society
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• v.19 no.1
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• pp.51-57
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• 2014

Purpose: The present study was conducted to establish the experimental condition for the proper evaluation of protein removal efficacy when developing protein removal agents. Its protein removal efficacy was further analyzed and compared with the result from protein removal efficacy against protein deposition on contact lens to suggest the evaluation method for efficacy of protein removal agents. Methods: Protein digestibility assay presented in the Korean pharmacopoeia was selected to establish the evaluation method for efficacy of papain, pancreatin, subtilisin A and protease itself as a ingredient and protein removal tablets or solution containing those enzymes and find a suitable test conditions. Furthermore, the cleaning efficacy of commercially available protein removal tablets and solution on balafilcon A lens deposited with protein artificially was measured and the correlation between two evaluation methods was further analyzed. Results: When pancreatin itself and the product containing pancreatin was evaluated by protein digestibility assay, both reached 28 IU/mg, the standard value of protein digestibility suggested by the Korean pharmacopoeia. In case of protease and subtilisin A tested with trichloroacetic acid B solution, both of them met the enzyme activity level proposed by the manufacturers when they were evaluated by protein digestibility assay however, papain and subtilisin A tested with trichloroacetic acid A solution were not reached the enzyme activity level. Among protein removal agents, three products except a product containing pancreatin did not meet the enzyme activity value specified by the manufacturer when they were evaluated by protein digestibility assay. However, actual protein removal efficacy of three products except a papain-containing product on the lens was greater than 90% protein removal. In the case of papain-containing protein removal product, its effect was not measured by protein digestibility assay however, its actual protein removal efficacy on the lens reached 73.72%. Conclusions: From the results, it was confirmed that the efficacy of protein removal agents for contact lens should be evaluated by different method according to the type of proteolytic enzyme contained. That is, the protein removal agents containing pancreatin, protease and subtilisin A can be evaluated by protein digestibility assay and protein removal efficiency evaluation and the products containing papain can be effectively evaluated by only the evaluation method for protein removal efficiency employing the lens.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2018.05a
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• pp.232-233
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• 2018

고탁도 해역에 배출되는 온배수를 활용하기 위해 탁도로 인한 열교환기의 오염부하가 줄어 들 수 있도록 탁도저감시스템을 시스템에 열교환기 이전단계에 추가하여 운전하였으며 탁도저감시스템으로 인한 탁도, 부유물질, 영양염류의 제거능 평가를 실시하였다. 평가결과 탁도개선시스템의 운전으로 인해 약 80%정도의 탁도가 저감 되는 것을 확인하였으며 부유물질 제거 효율은 약 13~29%정도였다. 기타 영양염류의 제거효율은 미미하였으나 본 시스템의 목적인 탁도저감을 위해서는 효과적인 시스템이라 판단된다.

• Journal of the Korean GEO-environmental Society
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• v.12 no.2
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• pp.55-61
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• 2011

NDMA(N-Nitrosodimethylamine) has been considered as a carcinogenic pollutant even at extremely low-concentration (10ng/L). However, previous researches on NDMA have focused on mainly high concentration due to a difficulty of analysis. In this study, removal efficiencies were evaluated for individual or combined methods with PAC(Powder Activated Carbon), GS(Granular Sludge), MF(Microfiltration), UF(Ultrafiltration) and Silica gel(MCM-41, Diatomite, Spherical silica gel) at both aerobic and anaerobic conditions. Combined method of GS, PAC and UF membrane at anaerobic condition showed the highest removal efficiency of 65% while Silica gel showed the lowest removal efficiency of 6%. The outcomes of this study could be used further study of extremely low-concentration NDMA removal.

• Journal of the Korean GEO-environmental Society
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• v.11 no.6
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• pp.31-37
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• 2010

In this study, optimization of MEK and Toluene removal was conducted by HTO(Hybrid Thermal Oxidation) system. HTO system has a multi-bed reaction plate and the plate consisted of wasted heat regeneration part and catalysis part. VOCs removal by HTO system was estimated by changing inlet flow rates with different valve changing times. Under $350^{\circ}C$ of combustion temperature, VOCs was fully converted and the equivalent conversion was 100%. The thermal oxidation efficiency, related to the amount of injected fuel into HTO system and the valve change time, was revealed at the level of 93.0~96.3%. In case of MEK removal by HTO system, the efficiency was ranged from 91.1 to 97.1%. Also, Toluene removal efficiency(93.2~97.4%) was good and stable with respect to the operating conditions. Considering above results, it was proved that HTO system could be a stable and compact system for VOCs, especially MEK and Toluene with high removal efficiency.

• Journal of Korea Technology Innovation Society
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• v.15 no.1
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• pp.105-128
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• 2012

This paper proposes the technological level assessment which improved reliability and the efficient noise elimination methods in the process of establishing patent map analysis data. In order to eliminate efficiently noise (removed by the manual process in the past), the paper applies the Logical Operator 'AND', makes it a program in excel VBA(Visual Basic Application), and obtains the valid data. For the improved reliability technological level assessment of the patents, the study calculates average number of claims, Patent Family Size(PFS), Cites Per Patent (CPP), Triad Patent Families, Standardization Patent Diversification Index (stdPCPI), and haF-index(Hirsch a Family index). The result which applied noise exclusion work showed less than 10% of acquired patent data ratio and confirmed high reliability. The result that apply proposed technological level assessment index makes sure that balanced technological level assessment which improved reliability by producing synthetic technological level assessment.

• Journal of the Korean Applied Science and Technology
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• v.36 no.2
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• pp.668-675
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• 2019

Fine dust in air pollutants is recognized as one of the most serious social environmental problems. Most of the NOx is generated in a combustion process such as that of a coal-fired power plant, and therefore efficient elimination of the NOx from the coal-fired power plants is needed. This study investigates the removal efficiency of using $TiO_2$, a photocatalyst, to remove NOx by Selective Catalytic Reduction (SCR). To evaluate the NOx removal efficiency, $TiO_2$ catalyst and phosphate binder were mixed on the surface of the $Al_2O_3$ substrate with the exothermic agent, and the substrate was heat-treated. The NOx removal efficiency of the catalysts was evaluated according to the temperature, and XRD, SEM, TG-DTA and BET analyzes were performed to investigate the physicochemical properties of the catalysts. NOx removal efficiency was 58.7%~65.9% at 20min, 63.7~66.0% at 30min with temperature change according to time($250^{\circ}C{\sim}500^{\circ}C$). The $TiO_2$ used in the SCR for NOx removal is judged to have the most efficient removal efficiency at $300^{\circ}C$.