• Title/Summary/Keyword: 정전렌즈

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Development of Focused Ion Beam Column Using Ga Source (갈륨 소스를 이용한 집속이온빔 컬럼 개발)

  • Gim, Tzang-Jo;Lee, Jae-Seung;Choi, Yoon;Choi, Eun-Ha;Park, Chul-Woo;Kim, Jong-Kuk;Kim, Young-Gweon;Um, Chang-Yong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.3
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    • pp.185-189
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    • 2009
  • Focused ion beam system was designed, which includes LMIS, electrostatic lens and high voltage power supply. Control program is updated for high speed image processing. The details of vibration-free vacuum system and other important electrical parts were trouble-shooted for appropriately controlling high acceleration voltages.

Development of On-machine Measurement System utilizing a Capacitive-type Sensor (정전용량형 센서를 이용한 기상계측시스템의 개발)

  • 김건희;박순섭;박원규;원종호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.391-395
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    • 2002
  • This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

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Contact Probing Technique for Profile Measurement of Aspheric Lenses (비구면 렌즈의 형상 측정을 위한 접촉식 프로브 기술 개발)

  • 유승봉;장인철;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.603-606
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    • 2000
  • This dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a $\pm$3$\sigma$ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement.

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Fabrication of PDMS Microlens Using Electrohydrodynamic Atomization (정전분사를 이용한 PDMS 마이크로렌즈의 제작)

  • Kang, Tae-Ho;Yang, Sang-Sik
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.10
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    • pp.1841-1846
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    • 2008
  • In this paper, we present the fabrication of microlens by electrohydrodynamic atomization(EHDA) of PDMS prepolymer. The diameter and contact angle of PDMS microlens can be altered by changing the applied voltage and substrate temperature at the experimental setup. It is considered that PDMS microlens can be integrated into the Lab-on-a-chip directly without any photolithographic process by EHDA. The property of PDMS microlens is confirmed by transmitting and measuring the Gaussian beam through microlens.

A development of an independent electric power generating portable flashlight by using solar battery (태양전지를 이용한 자가발전 손전등 개발에 관한 연구)

  • Kim, Hong-Il
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.10 no.8
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    • pp.1795-1801
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    • 2009
  • In this study, a portable flashlight which can manually generate the electricity by using sunlight was developed so that it can be used in the extreme environmental condition such as no-electricity condition. Battery is charged by using solar battery during the day, but when sunlight is not avalible during the night or rainy day, a handle is rotated to generate the electricity in order to charge the battery manually. To improve the brightness of the light, light is concentrated by using the optical lens. Low electric consumption circuit is used for the longer operating time by suppress electrical consumption while lamp is discharged. A circuit is designed and used for steady electrical curris dand voltage to insure steady battery charging. Super-discharge circuit and protection circuit are used for the super discharge of battery when it is not used for a long time. Also the constant charge is possible by using houseware adapter. As a result, a portable flashlight is designed to charge with sunlight during day, and with houseware adapter during night. A portable flashlight is also designed to irradiate longer distances by improvement of the brightness of the light using the optical lens. Thus, it forms white natural ray of light making possible for night reading.

Sputtering yield of the MgO thin film grown on the Cu substrate by using the focused ion beam (집속이온빔을 이용한 구리 기판위에 성장한 MgO 박막의 스퍼터링 수율)

  • 현정우;오현주;추동철;최은하;김태환;조광섭;강승언
    • Journal of the Korean Vacuum Society
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    • v.10 no.4
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    • pp.396-402
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    • 2001
  • MgO thin films with 1000 $\AA$ thickness were deposited on Cu substrates by using an electron gun evaporator at room temperature. A 1000 $\AA$ thick Al layer was deposited on the MgO for removing the charging effect of the MgO thin film during the measurements of the sputtering yields. A Ga ion liquid metal was used as the focused ion beam(FIB) source. The ion beam was focused by using double einzel lenses, and a deflector was employed to scan the ion beams into the MgO layer. Both currents of the secondary particle and the probe ion beam were measured, and they dramatically changed with varying the applied acceleration voltage of the source. The sputtering yield of the MgO layer was determined using the values of the analyzed probe current, the secondary particle current, and the net current. When the acceleration voltage of the FIB system was 15 kV, the sputtering yield of the MgO thin film was 0.30. The sputtering yield of the MgO thin film linearly increases with the acceleration voltage. These results indicate that the FIB system is promising for the measurements of the sputtering yield of the MgO thin film.

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Miniaturized Conically Stepped COBRA for High Power Electromagnetic Generator (고출력 전자기파 발생 장치용 소형화 된 원뿔 계단형 COBRA)

  • Ahn, Ji-Hwan;Lee, Sang-Heun;Yoon, Young-Joong;Kim, Jun-Yeon;Lee, Woo-Sang;So, Joon-Ho;Han, In-Hee
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.19 no.9
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    • pp.947-956
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    • 2008
  • In this paper, miniaturized conically stepped COBRA is proposed. In order to prevent electrical breakdown, COBRA, which consists of hem and lens, has to get bigger if it is designed with conventional method. Because of the phase error increase, shortening the length of the antenna without changing the aperture size leads to the reduction of the antenna gain. To avoid this, the phase error at the aperture is compensated by transforming the COBRA lens into conically stepped form. The simulations result shows that the proposed antenna has higher gain than the conventional COBRA in spite of the size reduction from 1,300 mm to 600 mm. The fabricated and measured COBRA has the gain of 26.2 dBi.

Fabrication of Electrostatic Electron Lens for Electron Beam Microcolumn using the Laser Micromachining (레이저 미세가공 기술을 이용한 초소형 전자빔 장치용 정전장 전자렌즈의 제작)

  • Ahn, Seung-Jun;Kim, Dae-Wook;Kim, Ho-Seop;Kim, Yeong-Jeong;Lee, Yong-San
    • Korean Journal of Materials Research
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    • v.11 no.9
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    • pp.792-796
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    • 2001
  • For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

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Image Processing Algorithms for DI-method Multi Touch Screen Controllers (DI 방식의 대형 멀티터치스크린을 위한 영상처리 알고리즘 설계)

  • Kang, Min-Gu;Jeong, Yong-Jin
    • Journal of the Institute of Electronics Engineers of Korea SP
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    • v.48 no.3
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    • pp.1-12
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    • 2011
  • Large-sized multi-touch screen is usually made using infrared rays. That is because it has technical constraints or cost problems to make the screen with the other ways using such as existing resistive overlays, capacitive overlay, or acoustic wave. Using infrared rays to make multi-touch screen is easy, but is likely to have technical limits to be implemented. To make up for these technical problems, two other methods were suggested through Surface project, which is a next generation user-interface concept of Microsoft. One is Frustrated Total Internal Reflection (FTIR) which uses infrared cameras, the other is Diffuse Illumination (DI). FTIR and DI are easy to be implemented in large screens and are not influenced by the number of touch points. Although FTIR method has an advantage in detecting touch-points, it also has lots of disadvantages such as screen size limit, quality of the materials, the module for infrared LED arrays, and high consuming power. On the other hand, DI method has difficulty in detecting touch-points because of it's structural problems but makes it possible to solve the problem of FTIR. In this thesis, we study the algorithms for effectively correcting the distort phenomenon of optical lens, and image processing algorithms in order to solve the touch detecting problem of the original DI method. Moreover, we suggest calibration algorithms for improving the accuracy of multi-touch, and a new tracking technique for accurate movement and gesture of the touch device. To verify our approaches, we implemented a table-based multi touch screen.