• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.282-283
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• 2003

광학 렌즈가 빛의 경로에 영향을 주는 것처럼 전자 렌즈는 전자들의 궤적에 영향을 준다. 광학 렌즈의 효과와 전자 렌즈의 효과는 유사성이 매우 높으며 광학에서 사용하는 용어를 전자광학에서 그대로 쓸 뿐만이 아니라 이미 잘 알려져 있는 광학 렌즈에 대한 원리를 전자렌즈 연구에 활용하고 있다. 이러한 유사성에도 불구하고 빛과 전자 그리고 광학 렌즈와 전자 렌즈 사이에는 근본적으로 다른 점이 있기 때문에 전자 렌즈에 대한 체계적인 연구가 요구되고 있다. (중략)

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.163-167
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• 2007

A field emission electron gun including 3 electrodes including one cathode and two anodes is very important for high resolution electron microscope. To have functions to control the initially-emitted electron beam, two anodes act as an electrostatic lens according to equipotential lines by adjusting the spot size, intensity, and working distance. To verify the action of the electron beam by the electrostatic lens by changing several parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated and then their performances were analyzed with angular beam intensity(distribution), electrical optic axis variation and their stability.

• Laser Solutions
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• v.18 no.4
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• pp.12-16
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• 2015

The research on multi electron beam systems is being carried out by various methods. We are studying multi electron beam system using miniaturized electron beam columns. The column consists of electrostatic lenses, electrostatic deflector and tip emitter. Our operating system controls 4 column array, captures images of each column and maintains the instrument. We present the usefulness of our operating system for multi columns by capturing images of each column.