• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.421-422
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.1425-1426
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.381-382
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• 2010

• Journal of the Korean Association of Geographic Information Studies
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• v.19 no.1
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• pp.53-63
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• 2016

In this paper, we proposed the improvements for performance test and surveying equipment regulations, standards, methods and procedures, depending on the need of improving the legal system for surveying equipment in a diverse and sophisticated surveying industry. This research was performed first investigating the existing legal systems(Act on the establishment and management of spatial data, Framework act on national standards, ISO 17123, JIS B 7912) with respect to the surveying equipment performance testing and the research for IOS and KOLAS suggested the improvements on the application for the surveying equipment performance testing standard. More exactly, first, two years were presented for the surveying equipment performance testing cycle considering the precise accuracy of the instrument stability, purpose and frequency of use, etc. Second, the abolition of the measurement distance by grade and the upward or cross-grade adjustment of the single prism standards about the light wave rangefinder and total station were suggested for the improvement on survey equipment performance criteria. Third, since the main function of total station is focused on a three-dimensional coordinate measurement due to the improvement of surveying equipment performance testing, it was proposed to use the precision(repeatability) of the coordinate measuring method as an evaluation method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.192-197
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• 1993

반도체 기억소자의 급격한 발전추세에 대응하기 위해서는 노광(exposure) 장비의 증첩정밀도 (overlay accuracy)가 같이 개선되어야 한다. 본 연구에서는 64M ERAM 제조를 목적으로개발된 스텝 퍼(stepper) 시스템의 성능평가 항목 중에서 증첩정밀도에대한 측정방법 및 현재까지의 연구결과를 기술하였다. 제작된 웨이퍼 정렬계는 off-axis 및 TTL 광학계와 이들 정렬신호에 따라 움직이는 웨이 퍼 구동계로 구성되어 있다. off-axis 광학계는 화상처리와 회절의 두 가지 방식이 가능하도록 설계 제작되었으며, TTL 광학계는 dual beam interferometric method를 이용하였다. 본 실험의 결과는 웨이퍼 정렬계의 특성을 평가한 것으로서, 현재까지 off-axis 정렬 방법만으로 얻은 증첩정밀도는 0.26-0.29$\mu$m (m+3 $\sigma$ )이다. 따라서 여기에 이미 제작되어 있는 TLL 정렬광학계를 추가로 사용하면 0.1 $\mu$m 이하의 정밀도에 이를 것으로 예측된다.

• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.58-59
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• 2000

레이저를 이용한 속도측정은 비접촉식 정밀측정이라는 장점 때문에 산업현장의 생산라인에서 온-라인 계측장비로 이용되고 있다. 특히, 철강업에서는 각종 설비의 제어를 위한 속도측정이나 연신률 측정 및 길이측정에 활용되고 있으며 제지분야나 고무생산 현장에서도 계측장비로 활용성이 점점 높아지고 있다. 본 연구는 레이저를 이용하여 비접촉식 속도계(Laser Doppler Velocimeter; LDV)를 제작하고 특성을 연구하였다. 기본 원리는 두 개의 레이저 빔을 측정대상의 한 지점에 입사시키고 이 지점에서 산란된 빛의 세기를 광검지기로 측정한 후 광검지기 출력의 주파수를 분석하여 측정대상의 속도를 산출하는 방법으로 두 개의 레이저 빔의 주파수가 같은 homodyne type과 주파수가 다른 heterodyne type으로 나누어지고 있다. Heterodyne type의 LDV 시스템은 속도값과 함께 측정대상의 이동방향을 알 수 있고, 측정신호가 고주파 대역에 있으므로 레이저의 불안정성이나 전원잡음 등에 의한 저주파 잡음을 용이하게 제거할 수 있는 장점을 가지고 있다. (중략)

• International Journal of Highway Engineering
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• v.8 no.3 s.29
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• pp.89-103
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• 2006

This study develops the tire/pavement noise measuring trailer that can minimize the effect of various environmental noise and evaluate road noise characteristics without regard to time and spots. As literature reviews, it is examined into road noise characteristics and case studies of various CPX Trailer, and made a development plan of device. Based on these, HEART CPX Trailer is developed and conduct experiments for verification of the semi-anechoic chamber suitability, precision and field application of device. In the result of the experiment for verification of semi-anechoic chamber suitability, we can make sure that it is suitable and reliable among frequency bands. In the test of repetition measurement, we can verify excellent measurement accuracy among speeds and microphone's locations. In case of field tests using HEART CPX Trailer, it is founded that the result is similar to CPB test result carried out by Chung-Ang university in 2003. It can be concluded caused that the effect of environmental noise in and around the road including mechanical noise of a tow car was excluded. This paper confirmed and suggested that HEART CPX Trailer is suitable for evaluation of real road noise characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.299-302
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• 2000

Various types of measuring devices are used for reverse engineering and inspection in different fields of industry such as automotive, aerospace, computer graphics, and home appliance. In order to measure a part easily and efficiently, it is important to select appropriate measuring device considering the characteristics of each measuring machine and part information. In this research, an optimal measuring device selection system using neural networks is proposed. There are two major steps: Firstly, the measuring information such as curvature, normal, type of surface, edge, and facet approximation is extracted from the CAD model. Second, the best suitable measuring device is proposed using the neural network system based on the knowledge of the measuring parameters and the measuring resources. An example of machine selection is implemented to evaluate the performance of the system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.1
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1581-1582
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• 2006

본 논문은 그루빙(grooving), 타이닝(tining), 텍스쳐(texture) 등의 포장도로의 표면 상태를 차량에 장착된 고성능의 레이저 변위센서를 사용하여 주행 중에 정밀하게 측정하는 도로 표면 측정 장비 개발에 관한 논문이다. 본 논문에서는 전체 시스템을 설계 및 시험제작 하였으며, 차량 주행을 모사한 실험 모형을 이용한 실내 실험 및 시험도로에서의 실제 도로 표면 측정 실험을 실시하였다. 실내 포장도면 모사장비를 이용한 실험 결과 타이닝 폭 오차 2%, 깊이 오차 4%(60km/h)를 얻었으며, 실외에서 차량에 레이저센서를 장착 후 측정한 실험에서는 폭 오차 3.24%, 깊이 오차 5% (50km/h)가 측정되었다. 이러한 실험 결과를 토대로 시험도로 상의 실제 도로 표면 측정 실험에서는 25mm, 18mm, 26mm, 그리고 임의의 간격의 횡 방향 및 종 방향 타이닝을 측정하였고 이를 확인하였다.