• 한국정밀공학회지
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• 제21권9호
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• pp.167-173
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• 2004

The heterodyne He-Ne laser interferometer is the most widely used sensing unit to measure the position error. It measures the positioning error from the displacement of a moving reflector in terms of the wave length. But, the wave length is affected by the variation of atmospheric temperature. Temperature variation of 1$^\circ C$ results in the measuring error of 1ppm. In this paper, for measuring more accurately the position error of the ultra precision stage, the refractive index compensation method is introduced. The wave length of the laser interferometer is compensated using the simultaneously measured room temperature variations in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur$\circledR$ plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.34${\mu}m$ to 0.11${\mu}m$ by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of an aerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.1${\mu}m$.

• 한국정밀공학회지
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• 제21권2호
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• pp.186-194
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• 2004

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.573-576
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• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• 한국정밀공학회지
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• 제30권12호
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• pp.1281-1286
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• 2013

In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of $30{\mu}m$, the resolution of 20 nm, and the bandwidth of 400 Hz in each axis were obtained in the experiments.

• 한국정밀공학회지
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• 제34권1호
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• 한국정밀공학회지
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• 제27권10호
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• pp.34-39
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• 2010

We developed a path algorithm for ultrafast/wide area laser processing. Demands for high precision laser processing with a wide area has been increasing for a number of applications such as in solar cell battery, display parts, electronic component and automobile industry. Expansion of the area in which laser processing is an important factor to handle the ultrafast/wide area processing, it will require a processing path. Processing path is path of 2- axis stage and stage of change in velocity can be smooth as possible. In this paper, we proposed a smoothingnurbs method of improved speed profile. This method creates soft path from edge part, it is main purpose that scan area ($50mm{\times}50mm$) inside processing path makes path of topology of possible straight line. We developed a simulation tool using Visual C++.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.229.1-229.1
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• 2015

생체 시료인 세포나 조직을 분석을 위해 임의로 파괴하거나 훼손하지 않은 본래의 상태에서 세포에 존재하는 다양한 생체분자 물질의 질량과 조성을 분석하고 영상화할 수 있는 대기압 표면 질량분석 이미징 기술을 개발했다. 생체 시료의 표면을 질량 분석을 하기 위해서는 대기압 분위기에서 시료에 열적 손상이 없는 조건으로 시편의 이온화 및 탈착 과정이 이루어지게 하기 위해 저온 대기압 탈착/이온화원으로 저온대기압 플라즈마 젯과 펨토초 적외선 레이저를 결합하여 대기압 이온화원을 제작하였다. 기존에 잘 알려진 저온 대기압 플라즈마 젯 소자는 유리관에 방전기체를 흘려주고 전극에 고전압을 인가하는 방식으로 제작했으며, 또 다른 대기압 이온화원으로서 근적외선 대역의 고출력 펨토초 레이저 빔을 현미경용 대물렌즈로 집속하여 생체시료에 조사시켰다. 수백 나노미터에서 수 마이크로미터 수준으로 빔을 집속할 수 있는 펨토초 레이저는 금나노로드의 도움으로 생체 시료를 매우 작은 수준으로 탈착하는 데 주로 사용하며, 수십 마이크로미터에서 수 밀리미터 정도의 크기를 가지는 저온 대기압 플라즈마 젯은 탈착된 물질을 이온화시키는데 사용하여, 이 두 가지 이온화원을 결합하여 이온화원으로 사용한다. 시료에서 발생한 이온을 질량분석기 입구까지 잘 끌고 갈 수 있도록 이온 전달관을 설계하고 보조펌프를 장착 사용한다. 이렇게 자체 개발한 대기압 이온화원을 상용 질량분석기기와 결합하여 대기압 분위기에서 시료의 표면을 질량분석할 수 있는 시스템과 측정 기술을 개발했다. 현미경 스테이지에 정밀 2-D 자동 스캐닝 스테이지를 장착하여 질량분석 정보에 공간 정보를 더할 수 있는 질량분석 이미징 기술 방법을 개발하여 생체 시편의 질량분석 이미징을 얻었다. 수분을 포함하는 생채시료로부터 단백질, 지질, 대사물질을 직접 분리하여 분석하는 이 새로운 질량분석법은 기존의 분석법에 비해 훨씬 더 많은 생체분자 정보를 얻을 수 있으며 공간정보를 더해 영상화할 수 있는 큰 장점이 있다. 대기압 표면 질량분석 기술은 생체시료를 파괴해서 용액화할 필요도 없으며, 진공 챔버에 넣기 위해 필요한 복잡한 전처리 과정 단계를 간략화 할 수 있으며 최종적으로는 살아있는 세포나 생체 조직도 정량 분석이 가능하여 생명과학 및 의료진단 분야에서 응용할 수 있는 분야는 무궁무진할 것이다.

• 한국광학회지
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• 제23권3호
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• pp.97-102
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• 2012

일반적으로 왜곡을 측정하는 방법으로 패턴의 전체 이미지를 분석하여 왜곡을 평가하는 방법을 이용하고 있으나 정확도가 높지 않아 카메라 등의 광학계에 많이 적용되고 있다. 1um이하의 정확도를 요구하는 왜곡수차를 측정하는 방법으로는 고가의 정밀 스테이지를 이용하여 마스크의 이미지 위치를 정확히 측정하는 방법이 주로 이용된다. 본 논문에서는 정확도가 요구되지 않는 매뉴얼 스테이지를 이용하여 왜곡을 정확히 측정하는 방법을 연구 하였다. 주요 아이디어로는 CCD나 CMOS를 이용하여 마스크 이미지를 일부 중첩되도록 분할측정하고 인접중첩영역의 이미지를 통합하여 마스크 이미지 위치를 정확히 계산하는 것이다. 마스크 이미지의 정확한 위치정보를 얻기 위해 Canny Edge Detection 기법을 사용하였으며 이렇게 확보된 위치정보로부터 좌표변환과 최소자승법을 사용하여 정확한 왜곡수차를 계산하는 과정을 연구하였다.