• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.4
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• pp.347-353
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• 2002

A structure of a glass electrode-type pH sensor for measuring any concentration of $H^+$ in an aqueous solution was embodied with bulk micromachining technology. Two open well structures were formed, and a reference electrode was secured by the Ag/AgCl thin film in the sloped side of the etched structure. A sensitive membrane of an indicator electrode for generating a potential by an exchange reaction to $H^+$ was made with a glass containing Na 20% or more finely so that its thickness might be $100{\mu}m$ or so, and then it was bonded to one pyramidal structure. A liquid junction for a current path was formed by filling an agar in the anisotropically etched part of the Si wafer, which had a size of $50{\mu}m{\times}50{\mu}m$, and then bonded it to the other. After complete fabrication of each part, it was filled with a 2M KCl reference solution and encapsulated the sensor structure with a cold expoxy. The potential value of fabricated pH sensor was about 90mV/pH in the standard pH solutions.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.71-71
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• 2015

반도체 및 디스플레이 소자 제조를 위한 진공 플라즈마는 다양한 공정 조건하에서 다양한 공정 가스의 물리화학적 반응에 의한 박막의 형석 및 식각 반응을 유도한다. 실 공정 하에서 기체 성분의 환경 조건에 의하여 박막층 및 식각 구조 형성에 심각한 영향이 발생할 수 있으며, 공정 조건에서 기체 압력을 완벽하게 컨트롤 하는 것은 현실상 불가능하므로 기체 부분압력이 실시간으로 반드시 모니터링 되고 이를 피드백으로 하여 압력 변수가 조정되어야 완벽하게 공정을 제어할 수 있다. 이를 위하여 현장에서 플라즈마 공정을 실시간 in-situ 모니터링 할 수 있는 다양한 진단 방법이 도입되고 있으며 접촉신 진단 방법은 플라즈마와 섭동으로 인한 교란을 유발하고, 이온에너지 측정의 한계가 존재하며 비접촉식 방법 중의 하나인 유도형광법(LIF)은 측정 물질의 제한으로 인하여 플라즈마 내에 존재하는 다양한 가스 종의 거동을 살필 수 없는 등 현실 적용 측면에서 실 공정에 적용하는데 단점이 존재한다. 공정 상태 및 RF에 의한 영향을 주고받지 않고, 민감한 공정 변화의 감지 및 혼합가스를 사용하는 실시간 공정 진단을 위하여 비접촉 광학 측정 방식인 발광 분광 분석법(optical emission spectroscopy, OES)이 각광받고 있으며, 본 강습에서는 분광학의 기본 개념 및 OES를 이용한 진공 플라즈마 진단 방법에 관한 전반적인 개요를 설명하도록 한다

• Journal of Korea Society of Industrial Information Systems
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• v.19 no.3
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• pp.49-56
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• 2014

Generally, the tool presetter is utilized to align and measure some specific dimensions of a machine tool. It is classified into two types(contact and contactless) according to the measurement method, and the optical sensor based contactless scheme has the advantages of measurement flexibility and convenience. This paper describes the design and realization of an industrial tool presetter using machine vision and linear scaler. Before measurement, the objective tool is attached to the mechanical mount and is aligned with the optical apparatus. After capturing tool images, the suggested image processing algorithm calculates its dimesions accurately, combining the traversing distance from the linear scaler. Experimental results conforms that the present tool presetter system has the precision within ${\pm}20um$ error.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2021.10a
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• pp.673-675
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• 2021

Biometric technology is a next-generation information security technology that provides reliability and convenience. As a core technology in the post-corona era, then on-contact biometric access control system is capable of non-face-to-face and automated technology, and is active not only in Korea but also in overseas markets such as the United States, Europe, and the Middle East. There are precautions that must be taken to reflect requirements such as cooperation between companies and approval of the US Food and Drug Admin is tration in developing IoT-based smart device customized sensors and securing H/W systems.

• Proceedings of the Korean Society for Emotion and Sensibility Conference
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• 2009.11a
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• pp.148-151
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• 2009

본 연구에서는 광섬유를 이용하여 반사형과 투과형의 MR-Compatible Photoplethysmograph (PPG) 측정 시스템을 개발하고, 그 성능을 비교하고자 한다. 반사형 타입은 광섬유 다발의 끝단을 피부에 접촉 시킨 후 반사현상을 이용하여 PPG 신호를 측정하고, 투과형 타입은 광섬유 사이에 피부를 접촉시킨 후 투과현상을 이용하여 PPG 신호를 계측한다. PPG 측정 시스템은 광 신호를 검출하는 센서 부분, 근적외선 광 신호를 송수신하는 광케이블 부분, 신호 증폭 부분, 잡음 제거를 위한 필터부분으로 구성되어 있다. 반사형 및 투과형 PPG 신호의 SNR을 비교한 결과 반사형은 23.5dB이고 투과형은 22.2dB로 차이가 거의 없었다. 그러므로 실험 환경이나 목적에 따라 두 가지 타입 중 효율성이 좀 더 높은 것을 선택하여 사용할 수 있을 것이다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1991.11a
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• pp.121-125
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• 1991

In order to minimize fixing error of workpieces, prismatic and cylindrical types. Modification Rule by Indexing Table and Modification Rule by NC Program are developed for machining centers by using touch trigger probes. The Modification Rule by Indexing Table means the alignment of workpiece to NC program through degree of freedoms of indexing table. The Modification Rule by NC Program is the alignment of NC program to workpiece set-up condition via the generation of NC program. A postprocessing module is also developed for generating NC-part Program (User Macro) to compensate for Machining errors in end milling and boring processes. Developed methods are verified by experiments.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.630-635
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• 2002

This work is concerned with the damage size estimation by using propagating bending wave signals in a beam. For the accurate estimation, we apply the continuous wavelet transforms to the incident waves and the reflected waves from a small damage in a long cylindrical beam. In particular, we propose to use the ratio of the magnitude of the incident and reflected waves along the ridges in the wavelet-transformed time-frequency plane. This technique is applied to the signals measured by non-contact magnetostrictive sensors. Experimental results indicate that the present method using the magnetostrictive sensor can be quite effective for accurate damage size estimation with simple measurements.

• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.199-201
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• 2006

풍력발전기에 있어서 블레이드의 Yaw방향 제어는 끊임없이 변화하는 풍향에 대해 효율의 극대화와 블레이드의 강도 및 진동측면에서 대단히 중요하다. 기존의 블레이드 Yaw 방향 측정은 접촉 및 비접촉 센서가 이용되어왔다. 본 논문에서는 풍력발전기의 원격모니터링 시스템에서 기본적으로 설치되는 카메라를 이용하여 블레이드의 Yaw방향을 측정하는 방법을 제안한다. 블레이드가 풍향에 따라 회전할 때 영상 누적을 행하고, 누적영상에 대해 경계점을 추정하여 타원의 궤적을 추정한다. 추정된 경계점들을 이용하고 최소자승법을 적용하여 타원방정식을 추정하고, 장축과 단축을 연산한다. 장축과 단축의 변화를 이용하여 카메라의 촬영방향의 기준점으로부터 Yaw방향의 변화를 정량적인 값으로 산출하여 이를 바탕으로 Yaw회전각을 추정한다. Yaw 방향 추정의 검증을 위해 블레이드 속도와 Yaw 방향의 제어가 가능한 모형풍력발전기를 제작하고 실험을 통하여 제안한 추정알고리즘의 유효성을 검증한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.603-606
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• 2000

This dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a $\pm$3$\sigma$ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.10a
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• pp.3-7
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• 2000

The authors have realized reconstruction of 3D shape using contacting method with pins and TCP/IP communication. In this paper, the working principal of the mechanism is proposed and tested. A special sensor system is designed as 148 matrix form to measure 3D shape. When contact occurs between pin and the plate of the sensor matrix, the position information of pins is sent to computer and raised height data of the pin is obtained by counter which accumlates encoder signal. So, all datum which contain 3-dimensional coordinate, is transferred using TCP/IP communication. Finally, 3D shape is reconstructured by Web browser of remote computer. The measuring result shows that the proposed mechanism is reliable and promising as a remote measuring device through Internet.