• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.6-6
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• 2010

Indium Tin Oxide (ITO)를 포함한 Transparent Conduction Oxide (TCO)는 LCD, OLED와 같은 Display, 그리고 Solar Cell 등 광신호와 전기신호간 변환이 필요한 모든 Device에 반드시 필요한 핵심 물질로, 특히 고특성 Display의 투명전극에서 요청되는 95% 이상의 투과도와 $15\;{\Omega}/{\square}$ 이하의 면저항 특성을 동시에 만족할 수 있는 기술은 현재까지 Plasma Sputtering 공정으로 $160^{\circ}C$ 이상에서 증착된 ITO 박막이 유일하다. 그러나, 최근 차세대 기술로서 Plastic Film을 기반으로 하는 Flexible Display 및 Flexible Solar Cell 구현에 대한 요구가 급증하면서, Plastic Film 기판위에 Plasma Damage이 없이 상온에 가까운 저온 ($100^{\circ}C$ 이하)에서 특성이 우수한 ITO 투명전극을 형성 할 수 있는 기술의 확보가 중요한 현안이 되고 있다. 지난 10년 동안 $100^{\circ}C$이하 저온에서 고특성의 ITO 또는 TCO 박막을 얻기위한 다양한 연구와 구체적인 공정이 활발히 연구되어 왔으나, ITO의 결정화 온도 (통상 $150{\sim}180^{\circ}C$)이하에서 증착된 ITO박막은 비정질 상태의 물성적 특성을 보여 원하는 전기적, 광학적 특성확보가 어려웠다. 본 논문에선 기본적으로 절연체 특성을 가져야 하는 산화물인 TCO가 반도체 또는 도체의 물리적 특성을 보여주는 기본원리의 고찰을 토대로, 재료학적 특성상 Crystalline 구조를 보여야 하는 ITO (Complex Cubic Bixbyte Structure)가 Plasma Sputtering 공정으로 저온에서 증착될 때 비정질 구조를 갖게 되는 원인을 규명하고, 이를 바탕으로 저온에서 증착된 ITO가 Crystalline 구조를 유지 할 수 있게 하고, Stress Control에 유리한 Nano-Crystalline 박막을 형성하면서 Crystallinity를 임의로 조절 할 수 있는 새로운 기술인 Magnetic Field Shielding Sputtering (MFSS) 공정과 최근 성과를 소개한다. 한편, 또 다른 새로운 저온 TCO 박막형성 기술로서, 유기반도체와 같은 Process Damage에 매우 취약한 유기물 위에 Plasma Damage 없이 TCO 박막을 직접 형성할 수 있는 Neutral Beam Assisted Sputtering (NBAS) 기술의 원리를 설명하고, 본 공정을 적용한 Top Emission OLED 소자의 결과를 소개한다. 또한, 고온공정이 수반되는 Solar Cell용 투명전극의 경우, 통상의 TCO박막이 고온공정을 거치면서 전기적 특성이 열화되는 원인을 규명하고, 이에 대한 근본적 해결 방법으로 ITO 박막의 Dopant인 Tin (Sn) 원자의 활성화를 증가시킨 Inductively Coupled Plasma Assisted DC Magnetron Sputtering (ICPDMS)의 원리와 박막의 물성적 특성과 내열 특성을 소개한다.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.24 no.5
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• pp.106-113
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• 2010

If leakage current is neglected, it can become a cause for disasters such as electric shock and fire, therefore a continuous monitoring is necessary. However in most cases, because management of substations is performed by unmanned systems, or walk-around inspections, continuous monitor is difficult. So when an accident occurs and the cause is not immediately resolved causing the emergency generator's OCGR getting activated by the leakage current that in turn cut off the ACB, the emergency generator may stop working. To prevent such a problem, a real-time integrated monitoring system for monitoring the leakage current returning to the grounding wire of neutral point of the low voltage side of transformer is proposed. Therefore in this paper, the effects of flow of leakage current, which is caused by insulation degradation phenomena or insulation destroy phenomena, were identified by simulation. And through cases studies; the excellence of integrated monitoring system was verified.

• Journal of Aerospace System Engineering
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• v.11 no.5
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• pp.42-49
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• 2017

The solid rocket motor(SRM) consists of a motor case, igniter, propellants, nozzle, insulation, controller, and driving device. The liquid rocket propulsion systems(LRPSs) cools the nozzle by the fuel and oxidizer but SRM does not cool the nozzle. The nozzle of SRM is high temperature condition and high velocity condition so occurs the erosion by combustion gas. This erosion occurs the change of nozzle throat and reduces thrust performance of rocket. The material of Rocket nozzle is minimization of erosion and insulation effect and endure the shear force, high temperature and high pressure. The purpose of this study is to investigate the erosion characteristics of solid rocket nozzles by each combustion time. Through the structure inspection of Graphite and C-C composite, identify the characteristics of the microstructure before and after erosion.

• Journal of the Korea institute for structural maintenance and inspection
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• v.15 no.1
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• pp.120-128
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• 2011

Recently, safety diagnosis of the existing structures has been emerged as important issue. In particular, systematical and precise safety diagnostics for steel structures for power substation, have been required. Steel structures for power substation are under the periodical impact loads from operations of gas insulated switchgear. These loading condition accelerates damage and aging of structure. The objective of this research is to evaluate damage of structure under periodical impact loads. To evaluate the integrity of structures as organizing mathematical models including the dynamic characteristics of structures, Frequency Domain Decomposition method was choiced and an algorism was proposed. For verifying this methods and algorism, a mathematical model is composed of the development of a variety of reverse analysis and a signal processing technology reflecting physical damage of structures. A series of analysis and test results indicatge that proposed method has a confidence for applying a filed test. Therefore, it is expected to be able to take advantage of system identification to detect damage for the maintenance and management of steel structures under periodical impact loads such as power substation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.2
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• pp.683-688
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• 2018

In this study, we analyzed the heat generation state of a flat heating element by using image processing technology in conjunction with carbon fiber. The flat heating element is manufactured by chopping the carbon fiber to a small size and bonding it again using a dispersing agent. The solution of carbon fiber, bound together using the dispersant, is then filtered onto the nonwoven fabric. The last step is to obtain flat carbon fibers in the form of nonwoven fabrics for the purpose of drying the filtered carbon fibers. In the flat heating element, electricity may be applied to the carbon fiber on the surface produced in this manner. In this study, the flat heating element was analyzed by four methods. The analysis of the heat generation characteristics and heating rate of the flat heating element confirmed that the fabricated sheet heating element corresponds to a normal army. The analysis of the insulation coating and flat heating element module, which can be used for actual product manufacturing, involves two dimensional image analysis using image processing technology. The thermal image analysis of the flat heating element is a programming technique that not only analyzes the heat generation state in both two and three dimensions, but also displays the upper and lower 15 to 20% ranges of temperature corresponding to the heat generation in the image. In the final analysis, it is possible to easily find the erroneous part in the manufacturing process by directly showing the state of the fabricated flat heating element on the screen. By combining this image analysis method of the flat heating element with the existing method, we were able to more accurately analyze the heat generation state.

• Fire Science and Engineering
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• v.24 no.5
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• pp.136-141
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• 2010

The purpose of this study is to examine the structure and heat generation mechanism of low voltage switches used to turn on or off the power supply to an indoor lighting system and investigate how the fixtures and movable contacts of the switches are damaged depending on the types of energy sources in order to secure the judgment base for expected PL disputes. Based on the Korean Standard (KS) testing method for incombustibility, this study applied a general flame to the switch. In addition, current was supplied to the switch using the PCITS (Primary Current Injection Test System). The ambient temperature and humidity were maintained at $22{\pm}2^{\circ}C$ and 40~60% respectively while performing the test. It is thought that the switch generated heat due to a defective connection of the wire and clip, insulation deterioration and defective contact of the movable contact, etc. The surface of the switch damaged by the general flame was uniformly carbonized. When the flame source was removed, the fire on the switch was extinguished naturally. From the result obtained by disassembling the switch carbonized by the general flame, it could be seen that fixtures and movable contacts remained in comparatively good shape but the enclosure, clip support, movable contact, indicating lamp, etc. showed carbonization and discoloration. In the case of the switch damaged by overcurrent, the clip connecting the wires, clip support, etc. showed almost no trace of damage, but the fixtures, movable contact, indicating lamp, etc. were severely carbonized. That is, the sections with high contact resistance were intensively damaged and showed a damage pattern indicating that carbonization progressed from the inside to the outside. Therefore, it is possible to judge the initial energy source by analyzing the characteristics of the carbonization pattern and the metal fixtures of damaged switches.

• Korean Journal of Materials Research
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• v.3 no.5
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• pp.459-465
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• 1993

By making the inter-metal PECVD $SiO_2$ as a Si rich oxide under the SOG, the hydrogen and water related diffusants could be captured a t SI dangling bonds. This gettering process was known to prevent the device characteristics degradations related to the H, $H_20$. The basic characteristics of Si rich oxide have been studied according to changing high/low frequency power and $SiH_4/N_2O$ gas flow ratio in PECVD. As increase in low frequency power, deposition rate decreased but K.I. and compressive stress increased. Decrease of the water peaks of FTIR spectra at the wave number range of 3300~3800$\textrm{cm}^{-1}$' also indicated that intensty the films were densified. As increase in SiH, gas flow rate, deposition rate, R.I. and etch rate increased while compressive stress decreased. F'TIK spectra showed that peak intensity corresponding to Si-0-Si stretching vibration decreased and shifted to the lower wave numbers. But AES showed that Si dangl~ng bonds were increased as a result of lower Si:O(l: 1.23) ratlo inthe Si rich oxide as compared to Si : O(1 : 1.98) ratio of usual oxide.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.5
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• pp.61-66
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• 2013

In this paper, temperature dependence of matching characteristics of $Si_3N_4$ MIM capacitor was analyzed in depth. The matching characteristics becomes worse as the temperature increases. That is, the matching coefficient of $Si_3N_4$ MIM capacitor at $25^{\circ}C$, $75^{\circ}C$, and $125^{\circ}C$ was 0.5870, 0.6151, and $0.7861%{\mu}m$, respectively. This phenomena is believed to be due to the reduction of the carrier mobility and the increase of the charge concentration of the inner capacitor at greater temperature. Therefore, the analysis of the matching characteristics of $Si_3N_4$ MIM capacitors at high temperatures is essential for application to analog and SoC (System on Chip) circuit.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.106-106
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• 1999

반도체 소자가 소브마이크론 이하로 집적화 되어감에 따라, RC 신호 지연 및 간섭 현상, 전력 소비의 증가 문제가 심각하게 대두되고 있다. 이러한 문제를 개선하기 위해서는, 현재 층간 절연막으로 상용화되어 있는 SiO2 박막을 대체할 저유전율 박막의 개발이 필수적이며, 많은 연구자들이 여러 가지 새로운 유기물질과 무기물질은 제안하고 있다. 반도체 공정상의 적합성을 고려할 때, 이들 여러물질 중에서 알킬기를 함유한 SiO2 박막(이하 'Si-O-C-H 박막'으로 표기)에 많은 관심이 집중되고 있다. Si-O-C-H 박막은 알킬기에 의해 형성된 나노 스케일의 기공에 의해 작은 유전율을 가지게 된다. 따라서, 박막내의 알킬기의 함유량이 많을수록 보다 작은 유전율을 얻을 수 있다. 그러나 과다한 알킬기의 함유는 Si-O-C-H 박막의 열적 특성을 열화시키는 부정적인 효과도 있다. 본 연구에서는 bis-trimethylsilylmethane(BTMSM, H9C3-Si-CH2-Si-C3H9) precursor를 이용하여 Si-O-C-H 박막을 증착하였다. BTMSM precursor의 중요한 특징중 하나는, 두 실리콘 원자 사이에 Si-CH2 결합이 존재한다는 사실이다. Si-CH2 결합은 양쪽의 Si에 의해 강하게 결합되어 있어서, BTMSM precursor를 사용하여 Si-O-C-H 박막은 유전상수도 작을 뿐 아니라, 열적으로도 안정된 특성이 얻어질 것으로 기대된다. Si-O-C-H 박막의 열적 안정성을 평가하기 위하여, 고온 열처리 전후의 FT-IR 스펙트럼 분석과 C-V(capacitance-voltage) 측정에 의한 유전상수 변화를 살펴보았다. 또한 증착된 박막의 미세구조 및 step coverage 특성 관찰을 위하여 SEM(scanning electron microscopy) 및 TEM(transmission electron micfroscopy) 분석을 하였다. 변화하였으며 이는 포토루미네슨스의 변화의 원인으로 판단된다. 연구하였다. CeO2 와 Si 사이의 계면을 TEM 측정에 의해 분석하였고, Ce와 O의 화학적 조성비를 RBS에 의해 측정하였다. Si(100) 기판위에 증착된 CeO2 는 $600^{\circ}C$ 낮은 증착률에서 seed layer를 하지 않은 조건에서 CeO2 (200) 방향으로 우선 성장하였으며, Si(111) 기판 위의 CeO2 박막은 40$0^{\circ}C$ 높은 증착률에서 seed layer를 2분이상 한 조건에서 CeO2 (111) 방향으로 우선 성장하였다. TEM 분석에서 CeO2 와 Si 기판사이에서 계면에서 얇은 SiO2층이 형성되었으며, TED 분석은 Si(100) 과 Si(111) 위에 증착한 CeO2 박막이 각각 우선 방향성을 가진 다결정임을 보여주었다. C-V 곡선에서 나타난 Hysteresis는 CeO2 박막과 Si 사이의 결함때문이라고 사료된다.phology 관찰결과 Ge 함량이 높은 박막의 입계가 다결정 Si의 입계에 비해 훨씬 큰 것으로 나타났으며 근 값도 증가하는 것으로 나타났다. 포유동물 세포에 유전자 발현벡터로써 사용할 수 있음으로 post-genomics시대에 다양한 종류의 단백질 기능연구에 맡은 도움이 되리라 기대한다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상 분사기술의 최적화에 의한 기능성 나노 입자 제조 기술을 확립하고 2차 오염 발생원인 유기계 항균제를 무기계 항균제로 대

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.23 no.2
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• pp.157-162
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• 2023

Among the failures of photovoltaic power generation facilities, failures caused by surges account for 20% of the total failure rate, and energy emissions of tens to hundreds [A] during power generation and electrical damage to inverters and connection boards lead to electrical safety accidents. In particular, in the case of lightning, an abnormal voltage is induced in an electric circuit to destroy insulation, and the current flowing at this time causes a fire and acts as a factor that accelerates the deterioration of parts. Due to this action, the problem of electrical safety of solar power generation devices spreading from outside the city center to the inside of the city center such as houses, apartments, and government offices is emerging. Since lightning strikes cause both field-based and conducted electrical interference, this effect increases with increasing cable length or conductor loops. In addition, surge damages not only solar modules, inverters and monitoring devices, but also building facilities, which can eventually cause operational shutdown due to fire of the photovoltaic power generation system and consequent financial loss. Therefore, in this paper, a lightning protection system for solar power generation devices is studied for the purpose of reducing property damage and human casualties due to the increase in fire and electrical safety accidents caused by lightning strikes in photovoltaic power generation systems.