Journal of the Institute of Electronics and Information Engineers (전자공학회논문지)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Temperature Dependence of Matching Characteristics of MIM Capacitor

MIM 커패시터에서의 정합특성의 온도에 대한 의존성

  • Jang, Jae-Hyung (Dept. of Electronics Engineering, Chungnam National University) ;
  • Kwon, Hyuk-Min (Dept. of Electronics Engineering, Chungnam National University) ;
  • Kwak, Ho-Young (Dept. of Electronics Engineering, Chungnam National University) ;
  • Kwon, Sung-Kyu (Dept. of Electronics Engineering, Chungnam National University) ;
  • Hwang, Seon-Man (Dept. of Electronics Engineering, Chungnam National University) ;
  • Sung, Seung-Yong (Dept. of Electronics Engineering, Chungnam National University) ;
  • Shin, Jong-Kwan (Dept. of Electronics Engineering, Chungnam National University) ;
  • Lee, Hi-Deok (Dept. of Electronics Engineering, Chungnam National University)
  • Received : 2012.10.05
  • Published : 2013.05.25
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Abstract

In this paper, temperature dependence of matching characteristics of $Si_3N_4$ MIM capacitor was analyzed in depth. The matching characteristics becomes worse as the temperature increases. That is, the matching coefficient of $Si_3N_4$ MIM capacitor at $25^{\circ}C$, $75^{\circ}C$, and $125^{\circ}C$ was 0.5870, 0.6151, and $0.7861%{\mu}m$, respectively. This phenomena is believed to be due to the reduction of the carrier mobility and the increase of the charge concentration of the inner capacitor at greater temperature. Therefore, the analysis of the matching characteristics of $Si_3N_4$ MIM capacitors at high temperatures is essential for application to analog and SoC (System on Chip) circuit.

본 논문에서는 절연물체로 $Si_3N_4$를 사용한 MIM 커패시터의 정합특성의 온도에 대한 의존성에 대해 분석하였다. 온도가 올라감에 따라 정합특성이 열화 되는 현상이 나타났다. 즉, $25^{\circ}C$, $75^{\circ}C$ 그리고 $125^{\circ}C$에서 $Si_3N_4$ MIM 커패시터의 정합특성 계수는 각각 0.5870, 0.6151, $0.7861%{\mu}m$으로 측정 되었다. 이러한 현상은 온도가 증가함에 따라 커패시터 내부의 캐리어들의 이동도가 감소하고 전하의 농도가 많아지기 때문이라고 할 수 있다. 따라서 고온에서의 $Si_3N_4$ MIM 커패시터의 정합특성의 분석은 아날로그 집적회로나 SoC (System on Chip)에 아주 중요하고 필수적인 연구라고 할 수 있다.

Keywords

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