• Title/Summary/Keyword: 전자기 유도 장비

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450 mm Wafer 가공을 위한 자화유도결합플라즈마 시뮬레이션 연구

  • Lee, Ho-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.411-411
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    • 2010
  • Cavity mode Whistler wave를 사용하는 자화유도결합플라즈마 (Magnetized Inductively Coupled Plasma, MICP)의 제반 특성을 비등방성 수송계수를 가지는 Drift-Diffusion 근사, 에너지 보존 방정식 및 유도전자계를 self-consistent 하게 고려하여 계산하였다. 이러한 접근법은 비충돌성 전자가열현상을 고려하지 못하는 단점에도 불구하고, 반도체 장비설계에 필수적인 전자온도, 밀도, 플라즈마 전위, 시스템의 임피던스 특성에 대한 경향성 파악에 매우 유용하다. 뿐만 아니라 전자밀도분포가 공간내에 형성되는 R-wave mode에 미치는 영향을 분석할 수 있다. 직경 320 mm를 가지는 작은 반응기에서 시뮬레이션과 실험결과를 비교하여 본 모델링 방법의 타당성을 검증한 후, 450 mm wafer가공에 적합한 대면적 플라즈마 반응기에서 플라즈마 특성을 연구하였다. 수 mTorr의 공정압력에서 약 10 Gauss전후의 약한 자장이 인가됨으로서 반경방향의 전자밀도 균일성이 대폭 향상되었다. 플라즈마 및 안테나의 대면적화에 수반되는 높은 Q값이 자장의 인가로 큰 폭으로 감소함으로서 임피던스메칭의 안정성이 비약적으로 개선되었고 전력전달 효율 또한 크게 증가함을 알 수 있었다. 본 연구 결과는 차세대 450 mm 반도체 공정장비의 개발에 있어 자화유도결합플라즈마가 매우 유용하게 사용될 수 있음을 보여준다.

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Measurement of Sea Ice Thickness in the Arctic Ocean Using an Electromagnetic Induction Instrument (전자기 유도 장비를 이용한 북극해 해빙의 두께측정)

  • Jeong, Seong-Yeob;Lee, Chun-Ju
    • Journal of the Society of Naval Architects of Korea
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    • v.49 no.2
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    • pp.189-195
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    • 2012
  • The ice trials of the first Korean icebreaking research vessel "ARAON" were performed at the Arctic Ocean in July-August 2010. The sea ice concentrations of Arctic Ocean were 4/10 to 10/10 and the range of sea ice thickness was roughly 1.0 to 3.5m. In this research, sea ice thickness characteristics at the old ice floes were determined from results of drill hole and apparent conductivity measurements. Especially we measured apparent conductivity using an electromagnetic induction instrument (EM31-MK2) and estimated the sea ice thickness through the empirical equation from Cold Regions Research & Engineering Laboratory, CRREL. The results of estimated sea ice thickness were compared to drill hole measurement results and then, we suggest the new empirical equation to estimate sea ice thickness of single layer type sea ice during the summer season of Arctic Ocean by curve fitting approach to these data.

A Study on the Reliability of Detecting Reinforcement Embedded in Concrete in Various Factors Using Electromagnetic Induction Method and Electromagnetic Wave Method (전자기유도법과 전자파레이더법을 이용한 각종인자에 따른 철근탐사의 신뢰성에 관한 연구)

  • Kim, Jong-Ho;Oh, Kwang-Chin;Park, Seung-Bum
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.12 no.4
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    • pp.179-186
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    • 2008
  • Probing inside of concrete structures is one of the important steps in assessing condition of the structure. For the assessment, electromagnetic induction method and electromagnetic wave method are currently applied to the measurement of cover depth, and the detection of reinforcement embedded in concrete. To determine detection capability of locating reinforcement embedded in concrete, commercially available nondestructive testing (NDT) equipments have been tested. The equipments include electromagnetic wave system and electromagnetic induction system. In the tests, nine concrete specimens which have the dimensions of 1,000mm(length))${\times}$300mm(width) with thickness varying from 125mm to 150mm are used. The reinforcement are located at 45, 60, 100mm depth from the concrete surface. Horizontal reinforcement spacing has been set over 100mm. From the outcome, it is shown that error is increased as the diameter of reinforcement enlarge in case of using electromagnetic induction method. In case of using electromagnetic wave method, the detection of reinforcement embedded in deep is good in the view of reliability because of using the relative permittivity on the real cover depth.

Measurement and Analysis of Antenna Induced Voltage for Tactical Mobile Wireless Communication System under HEMP Environment (HEMP 상황 하 전술기동무선통신체계 안테나 유도전압 측정 및 분석)

  • Park, Kyoung-Je;Jeong, Kil-Soo;Kim, Jung-Sup;Park, Yong-Woo;Park, Jae-Hyun
    • Journal of the Korea Society for Simulation
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    • v.30 no.2
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    • pp.33-40
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    • 2021
  • The situation of high-altitude electromagnetic pulses (HEMP) arises from high-altitude nuclear explosions. The HEMP situation can be simulated through the threat level investigation (TLI). In this paper, the induced voltage according to the antenna type of the tactical mobile radio communication system was measured and analyzed by TLI. Under the influence of HEMP, electronic equipment can be paralyzed or damaged. HEMP protection filters are commercially available for power lines and signal lines. However, commercialization of HEMP filters for antennas is insufficient, and even some of them exist for lightning protection. In order to make an appropriate HEMP protection filter according to the frequency and type of the antenna, the induced voltage was measured and the maximum induced voltage was analyzed through extrapolation. It was found that the measured induced voltage decreased as the frequency increased, such as in the HF, VHF and UHF bands of the measurement results.

A Study on certification plan on Radio Frequency Identification for Airplane Use (항공산업에 활용되는 무선인식 기반 시스템 인증 방안)

  • Han, Sang-Ho
    • Aerospace Engineering and Technology
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    • v.7 no.1
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    • pp.236-244
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    • 2008
  • The evolution and application of RFID technologies have been at the forefront of allowing aviation industries to improve the quality of aircraft maintenance and air cargo handling. However, safety problems in airplane operation are arising from the hazards of frequencies transmitted due to RFID systems. Though the intensities of frequencies back-scattered from the tags are very weak, some malfunctions are anticipated due to induction coupling on aircraft wiring. Therefore, safety assessment such as electromagnetic compatability should be accomplished upon aircraft critical and essential equipments before installations.

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Development of Forming Equipment Using Electromagnetic Lorentz Force (전자기 로렌쯔력을 이용한 성형장비 개발)

  • Lee, H.M.;Ku, J.K.;Noh, H.G.;Song, W.J.;Ku, T.W.;Kang, B.S.;Kim, J.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.10a
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    • pp.313-317
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    • 2009
  • Electromagnetic forming(EMF) is a high-velocity forming process which uses electromagnetic Lorentz force. Advantages of this forming technique are improved formability, reduction in wrinkling, non-contact forming and applications of various forming process. But the application of electromagnetic forming technique is still limited in industry. Thus for continuous research and development of technique based on experiments, develop the forming equipment and carry out the forming experiments for validation of forming equipment.

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Development of Internal Defect Detector of Automotive Transmission Parts Using Eddy Current (와전류를 이용한 자동차 변속기 부품의 내부결함 검출기 개발)

  • Chai, Yong-Yoong
    • The Journal of the Korea institute of electronic communication sciences
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    • v.14 no.3
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    • pp.513-518
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    • 2019
  • The non-destructive testing equipment using an eddy current was developed to check for defect in the vehicle transmission component. A defect master sample was made to test all types of defects that occur in the component and also an eddy current detector was manufactured and used to test and detect all kinds of defects. In addition, testing was held against the actual defective items to investigate the cause and type of defects, and a comparative study was conducted based on results from the examination. The software system of the eddy current detector was developed so that even a non-specialist can make assessment of detect in the component from the test results displayed on the monitor.

DBD 플라즈마 처리 후 산화된 적혈구 막지질의 에너지밴드 측정

  • Kim, Tae-Su;Lee, Jin-Yeong;Baek, Gu-Yeon;Jo, Sang-Yeon;Choe, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.517-517
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    • 2013
  • 세포막지질의 산화는 심각한 세포막의 기능저하를 유발하고 심하면 세포를 죽음에 이르게하여 생물학적으로 중요한 지표이다. 세포막지질의 산화는 간접적인 화학적 방법으로 측정하거나, 지질을 추출해내어 질량분석기나 핵자기공명분광기 같은 물리적 방법으로 분석한다. 우리는 이온유도 이차전자 방출계수(${\gamma}$) 변화를 측정하여 세포막지질의 산화를 지질추출 없이 측정할 수 있는지 조사해 보았다. 세포막분리가 쉬운 적혈구를 모델세포로 사용하였고, 다양한 라디칼을 발생시키는 대기압 공기 DBD플라즈마 장치를 이용하였다. 적혈구를 플라즈마에 노출하는 시간으로 산화의 정도에 차이를 만들어 측정값과 비교하였다. ${\gamma}$값은 Auger의 중화이론에 바탕을 둔 이온유도 이차전자 방출빔(${\gamma}$-FIB)장비를 이용하여 측정하였다. 측정결과 적혈구가 산화됨에 따라서 ${\gamma}$값이 증가함을 볼 수 있었고, 동시에 workfunction값이 변화함을 보았으며, 그 결과를 화학적 방법과 비교해 보았다.

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Vibration Reduction Control of Marine Electronic Horizontal Balancer (선박용 전자식 수평진동감쇠장치의 진동감쇠제어)

  • Yang, Hyun-Suk;Yoon, Kyoung-Kuk;Kim, Yoon-Sik;Seo, Dong-Hoan;Kim, Sung-Hwan;Kwon, Yeong-Gwal;Lee, Sung-Geun
    • Journal of Advanced Marine Engineering and Technology
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    • v.34 no.8
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    • pp.1153-1158
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    • 2010
  • In this paper, We make horizontal balancer (HB) and confirm a possibility of the technique that can be applied to ship through horizontal vibration reduction experiment. We use MATLAB as the simulator tool and experimental equipment consists of two induction motors shafts of which cam type unbalanced loads are fixed to, DSP and inverter circuit. Two induction motors perform roles as vibrator and balancer respectively, DSP control softwares such as speed, phase and vector control program. The simulation and experimental results show that the balancer characterizes good vibration reduction by phase control.

A Method of Plotting Component A Scaled Waveform for Aircraft Lightning Test (항공기 낙뢰 시험을 위한 Component A 축소 파형 도식화 방법)

  • Jo, Jae-Hyeon;Kim, Yun-Gon;Kim, Dong-Hyeon;Lee, Hak-Jin;Myong, Rho-Shin
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.49 no.9
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    • pp.801-811
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    • 2021
  • Lightning can deliver large amounts of energy to the aircraft in a short period of time, resulting in catastrophic consequence. In particular, lightning strikes accompanied by high temperature heat and current can damage aircraft surface and internal electronic equipment, seriously affecting flight safety. Lightning experiments to analyze this effect use a Component A waveform with a maximum current of 200 kA as specified in SAE ARP 5412B. However, the actual lightning occurs mostly below 35kA and lightning indirect tests are conducted by reducing waveforms to prevent damage to internal electronic equipment. In this study, we examine previous methods to plot the Component A reduced waveform and identify their limitations. We then propose a new method to plot the reduced waveform based on adjusting the correction factor of the aircraft lightning Component A waveform. Finally, the electromagnetic analysis software EMA3D was used to compare the internal induced current size reduction ratio of the internal cable harness of the EC-155B helicopter.