• Title/Summary/Keyword: 전산모사 분석

Search Result 307, Processing Time 0.025 seconds

Characterization and annealing effect of tantalum oxide thin film by thermal chemical (열CVD방법으로 증착시킨 탄탈륨 산화박막의 특성평가와 열처리 효과)

  • Nam, Gap-Jin;Park, Sang-Gyu;Lee, Yeong-Baek;Hong, Jae-Hwa
    • Korean Journal of Materials Research
    • /
    • v.5 no.1
    • /
    • pp.42-54
    • /
    • 1995
  • $Ta_2O_5$ thin film IS a promising material for the high dielectrics of ULSI DRAM. In this study, $Ta_2O_5$ thin film was grown on p-type( 100) Si wafer by thermal metal organic chemical vapo deposition ( MCCVD) method and the effect of operating varialbles including substrate temperature( $T_s$), bubbler temperature( $T_ \sigma$), reactor pressure( P ) was investigated in detail. $Ta_2O_5$ thin film were analyzed by SEM, XRD, XPS, FT-IR, AES, TEM and AFM. In addition, the effect of various anneal methods was examined and compared. Anneal methods were furnace annealing( FA) and rapid thermal annealing( RTA) in $N_{2}$ or $O_{2}$ ambients. Growth rate was evidently classified into two different regimes. : (1) surface reaction rate-limited reglme in the range of $T_s$=300 ~ $400 ^{\circ}C$ and (2: mass transport-limited regime in the range of $T_s$=400 ~ $450^{\circ}C$.It was found that the effective activation energies were 18.46kcal/mol and 1.9kcal/mol, respectively. As the bubbler temperature increases, the growth rate became maximum at $T_ \sigma$=$140^{\circ}C$. With increasing pressure, the growth rate became maximum at P=3torr but the refractive index which is close to the bulk value of 2.1 was obtained in the range of 0.1 ~ 1 torr. Good step coverage of 85. 71% was obtained at $T_s$=$400 ^{\circ}C$ and sticking coefficient was 0.06 by comparison with Monte Carlo simulation result. From the results of AES, FT-IR and E M , the degree of SiO, formation at the interface between Si and TazO, was larger in the order of FA-$O_{2}$ > RTA-$O_{2}$, FA-$N_{2}$ > RTA-$N_{2}$. However, the $N_{2}$ ambient annealing resulted in more severe Weficiency in the $Ta_2O_5$ thin film than the TEX>$O_{2}$ ambient.

  • PDF

Evaluation of Factors Used in AAPM TG-43 Formalism Using Segmented Sources Integration Method and Monte Carlo Simulation: Implementation of microSelectron HDR Ir-192 Source (미소선원 적분법과 몬테칼로 방법을 이용한 AAPM TG-43 선량계산 인자 평가: microSelectron HDR Ir-192 선원에 대한 적용)

  • Ahn, Woo-Sang;Jang, Won-Woo;Park, Sung-Ho;Jung, Sang-Hoon;Cho, Woon-Kap;Kim, Young-Seok;Ahn, Seung-Do
    • Progress in Medical Physics
    • /
    • v.22 no.4
    • /
    • pp.190-197
    • /
    • 2011
  • Currently, the dose distribution calculation used by commercial treatment planning systems (TPSs) for high-dose rate (HDR) brachytherapy is derived from point and line source approximation method recommended by AAPM Task Group 43 (TG-43). However, the study of Monte Carlo (MC) simulation is required in order to assess the accuracy of dose calculation around three-dimensional Ir-192 source. In this study, geometry factor was calculated using segmented sources integration method by dividing microSelectron HDR Ir-192 source into smaller parts. The Monte Carlo code (MCNPX 2.5.0) was used to calculate the dose rate $\dot{D}(r,\theta)$ at a point ($r,\theta$) away from a HDR Ir-192 source in spherical water phantom with 30 cm diameter. Finally, anisotropy function and radial dose function were calculated from obtained results. The obtained geometry factor was compared with that calculated from line source approximation. Similarly, obtained anisotropy function and radial dose function were compared with those derived from MCPT results by Williamson. The geometry factor calculated from segmented sources integration method and line source approximation was within 0.2% for $r{\geq}0.5$ cm and 1.33% for r=0.1 cm, respectively. The relative-root mean square error (R-RMSE) of anisotropy function obtained by this study and Williamson was 2.33% for r=0.25 cm and within 1% for r>0.5 cm, respectively. The R-RMSE of radial dose function was 0.46% at radial distance from 0.1 to 14.0 cm. The geometry factor acquired from segmented sources integration method and line source approximation was in good agreement for $r{\geq}0.1$ cm. However, application of segmented sources integration method seems to be valid, since this method using three-dimensional Ir-192 source provides more realistic geometry factor. The anisotropy function and radial dose function estimated from MCNPX in this study and MCPT by Williamson are in good agreement within uncertainty of Monte Carlo codes except at radial distance of r=0.25 cm. It is expected that Monte Carlo code used in this study could be applied to other sources utilized for brachytherapy.

Reliability Verification of FLUKA Transport Code for Double Layered X-ray Protective Sheet Design (이중 구조의 X선 차폐시트 설계를 위한 FLUKA 수송코드의 신뢰성 검증)

  • Kang, Sang Sik;Heo, Seung Wook;Choi, Il Hong;Jun, Jae Hoon;Yang, Sung Woo;Kim, Kyo Tae;Heo, Ye Ji;Park, Ji Koon
    • Journal of the Korean Society of Radiology
    • /
    • v.11 no.7
    • /
    • pp.547-553
    • /
    • 2017
  • In the current medical field, lead is widely used as a radiation shield. However, the lead weight is very heavy, so wearing protective clothing such as apron is difficult to wear for long periods of time and there is a problem with the danger of lethal toxicity in humans. Recently, many studies have been conducted to develop substitute materials of lead to resolve these problems. As a substitute materials for lead, barium(Ba) and iodine(I) have excellent shielding ability. But, It has characteristics emitting characteristic X-rays from the energy area near 30 keV. For patients or radiation workers, shielding materials is often made into contact with the human body. Therefore, the characteristic X-rays generated by the shielding material are directly exposured in the human body, which increases the risk of increasing radiation absorbed dose. In this study, we have developed the FLUKA transport code, one of the most suitable elements of radiation transport codes, to remove the characteristic X-rays generated by barium or iodine. We have verified the reliability of the shielding fraction of the structure of the structure shielding by comparing with the MCPDX simulations conducted as a prior study. Using the MCNPX and FLUKA, the double layer shielding structures with the various thickness combination consisting of barium sulphate ($BaSO_4$) and bismuth oxide($Bi_2O_3$) are designed. The accuracy of the type shown in IEC 61331-1 was geometrically identical to the simulation. In addition, the transmission spectrum and absorbed dose of the shielding material for the successive x-rays of 120 kVp spectra were compared with lead. In results, $0.3mm-BaSO_4/0.3mm-Bi_2O_3$ and $0.1mm-BaSO_4/0.5mm-Bi_2O_3$ structures have been absorbed in both 33 keV and 37 keV characteristic X-rays. In addition, for high-energy X-rays greater than 90 keV, the shielding efficiency was shown close to lead. Also, the transport code of the FLUKA's photon transport code was showed cut-off on low-energy X-rays(below 33keV) and is limited to computerized X-rays of the low-energy X-rays. But, In high-energy areas above 40 keV, the relative error with MCNPX was found to be highly reliable within 6 %.

Monte Carlo Simulation of the Carbon Beam Nozzle for the Biomedical Research Facility in RAON (한국형 중이온 가속기 RAON의 의생물 연구시설 탄소 빔 노즐에 대한 Monte Carlo 시뮬레이션)

  • Bae, Jae-Beom;Cho, Byung-Cheol;Kwak, Jung-Won;Park, Woo-Yoon;Lim, Young-Kyung;Chung, Hyun-Tai
    • Progress in Medical Physics
    • /
    • v.26 no.1
    • /
    • pp.12-17
    • /
    • 2015
  • The purpose of the Monte Carlo simulation study was to provide the optimized nozzle design to satisfy the beam conditions for biomedical researches in the Korean heavy-ion accelerator, RAON. The nozzle design was required to produce $C^{12}$ beam satisfying the three conditions; the maximum field size, the dose uniformity and the beam contamination. We employed the GEANT4 toolkit in Monte Carlo simulation to optimize the nozzle design. The beams for biomedical researches were required that the maximum field size should be more than $15{\times}15cm^2$, the dose uniformity was to be less than 3% and the level of beam contamination due to the scattered radiation from collimation systems was less than 5% of total dose. For the field size, we optimized the tilting angle of the circularly rotating beam controlled by a pair of dipole magnets at the most upstream of the user beam line unit and the thickness of the scatter plate located downstream of the dipole magnets. The values of beam scanning angle and the thickness of the scatter plate could be successfully optimized to be $0.5^{\circ}$ and 0.05 cm via this Monte Carlo simulation analysis. For the dose uniformity and the beam contamination, we introduced the new beam configuration technique by the combination of scanning and static beams. With the combination of a central static beam and a circularly rotating beam with the tilting angle of $0.5^{\circ}$ to beam axis, the dose uniformity could be established to be 1.1% in $15{\times}15cm^2$ sized maximum field. For the beam contamination, it was determined by the ratio of the absorbed doses delivered by $C^{12}$ ion and other particles. The level of the beam contamination could be achieved to be less than 2.5% of total dose in the region from 5 cm to 17 cm water equivalent depth in the combined beam configuration. Based on the results, we could establish the optimized nozzle design satisfying the beam conditions which were required for biomedical researches.

Effect of Bottom Hole Pressure and Depressurization Rate on Stability and Gas Productivity of Hydrate-bearing Sediments during Gas Production by Depressurization Method (감압법을 이용한 가스 생산 시 하이드레이트 부존 퇴적층의 지반 안정성 및 가스 생산성에 대한 시추 공저압 및 감압 속도의 영향)

  • Kim, Jung-Tae;Kang, Seok-Jun;Lee, Minhyeong;Cho, Gye-Chun
    • Journal of the Korean Geotechnical Society
    • /
    • v.37 no.3
    • /
    • pp.19-30
    • /
    • 2021
  • The presence of the hydrate-bearing sediments in Ulleung Basin of South Korea has been confirmed from previous studies. Researches on gas production methods from the hydrate-bearing sediments have been conducted worldwide. As production mechanism is a complex phenomenon in which thermal, hydraulic, and mechanical phenomena occur simultaneously, it is difficult to accurately conduct the productivity and stability analysis of hydrate bearing sediments through lab-scale experiments. Thus, the importance of numerical analysis in evaluating gas productivity and stability of hydrate-bearing sediments has been emphasized. In this study, the numerical parametric analysis was conducted to investigate the effects of the bottom hole pressure and the depressurization rate on the gas productivity and stability of hydrate-bearing sediments during the depressurization method. The numerical analysis results confirmed that as the bottom hole pressure decreases, the productivity increases and the stability of sediments deteriorates. Meanwhile, it was shown that the depressurization rate did not largely affect the productivity and stability of the hydrate-bearing sediments. In addition, sensitivity analysis for gas productivity and stability of the sediments were conducted according to the depressurization rate in order to establish a production strategy that prevents sand production during gas production. As a result of the analysis, it was confirmed that controlling the depressurization rate from a low value to a high value is effective in securing the stability. Moreover, during gas production, the subsidence of sediments occurred near the production well, and ground heave occurred at the bottom of the production well due to the pressure gradient. From these results, it was concluded that both the productivity and stability analyses should be conducted in order to determine the bottom hole pressure when producing gas using the depressurization method. Additionally, the stress analysis of the production well, which is induced by the vertical displacements of sediments, should be evaluated.

Feasibility of Automated Detection of Inter-fractional Deviation in Patient Positioning Using Structural Similarity Index: Preliminary Results (Structural Similarity Index 인자를 이용한 방사선 분할 조사간 환자 체위 변화의 자동화 검출능 평가: 초기 보고)

  • Youn, Hanbean;Jeon, Hosang;Lee, Jayeong;Lee, Juhye;Nam, Jiho;Park, Dahl;Kim, Wontaek;Ki, Yongkan;Kim, Donghyun
    • Progress in Medical Physics
    • /
    • v.26 no.4
    • /
    • pp.258-266
    • /
    • 2015
  • The modern radiotherapy technique which delivers a large amount of dose to patients asks to confirm the positions of patients or tumors more accurately by using X-ray projection images of high-definition. However, a rapid increase in patient's exposure and image information for CT image acquisition may be additional burden on the patient. In this study, by introducing structural similarity (SSIM) index that can effectively extract the structural information of the image, we analyze the differences between daily acquired x-ray images of a patient to verify the accuracy of patient positioning. First, for simulating a moving target, the spherical computational phantoms changing the sizes and positions were created to acquire projected images. Differences between the images were automatically detected and analyzed by extracting their SSIM values. In addition, as a clinical test, differences between daily acquired x-ray images of a patient for 12 days were detected in the same way. As a result, we confirmed that the SSIM index was changed in the range of 0.85~1 (0.006~1 when a region of interest (ROI) was applied) as the sizes or positions of the phantom changed. The SSIM was more sensitive to the change of the phantom when the ROI was limited to the phantom itself. In the clinical test, the daily change of patient positions was 0.799~0.853 in SSIM values, those well described differences among images. Therefore, we expect that SSIM index can provide an objective and quantitative technique to verify the patient position using simple x-ray images, instead of time and cost intensive three-dimensional x-ray images.

Numerical Calculations of IASCC Test Worker Exposure using Process Simulations (공정 시뮬레이션을 이용한 조사유기응력부식균열 시험 작업자 피폭량의 전산 해석에 관한 연구)

  • Chang, Kyu-Ho;Kim, Hae-Woong;Kim, Chang-Kyu;Park, Kwang-Soo;Kwak, Dae-In
    • Journal of the Korean Society of Radiology
    • /
    • v.15 no.6
    • /
    • pp.803-811
    • /
    • 2021
  • In this study, the exposure amount of IASCC test worker was evaluated by applying the process simulation technology. Using DELMIA Version 5, a commercial process simulation code, IASCC test facility, hot cells, and workers were prepared, and IASCC test activities were implemented, and the cumulative exposure of workers passing through the dose-distributed space could be evaluated through user coding. In order to simulate behavior of workers, human manikins with a degree of freedom of 200 or more imitating the human musculoskeletal system were applied. In order to calculate the worker's exposure, the coordinates, start time, and retention period for each posture were extracted by accessing the sub-information of the human manikin task, and the cumulative exposure was calculated by multiplying the spatial dose value by the posture retention time. The spatial dose for the exposure evaluation was calculated using MCNP6 Version 1.0, and the calculated spatial dose was embedded into the process simulation domain. As a result of comparing and analyzing the results of exposure evaluation by process simulation and typical exposure evaluation, the annual exposure to daily test work in the regular entrance was predicted at similar levels, 0.388 mSv/year and 1.334 mSv/year, respectively. Exposure assessment was also performed on special tasks performed in areas with high spatial doses, and tasks with high exposure could be easily identified, and work improvement plans could be derived intuitively through human manikin posture and spatial dose visualization of the tasks.