• 월간산업보건
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• s.125
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• pp.14-16
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• 1998

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.100.1-100.1
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• 2015

중이온가속기에서 잔류기체 분자와 가속 이온의 충돌이 발생하면 이온빔 전류의 손실을 야기하는 직접적인 효과 외에 잔류 기체분자 중에서 전리된 이온들이 반발력에 의해 용기 벽에 부딪힐 때 표면에 흡착되어 있던 기체분자들을 충격탈리(stimulated desorption)시킨다. 더 심각한 경우는 산란된 고속 이온이 용기 벽과 충돌하면서 핵반응을 일으켜 방사화 시키거나 벽에서 다량의 기체를 방출시키는 것이다. 최악의 경우에는 고속이온의 에너지에 의해 용기벽이나 부품들이 열적인 손상을 입을 수도 있다. 현재 설계 및 연구개발이 진행중인 기초과학원(IBS) RISP (Rare Isotope Science Project)의 RAON 중이온가속기는 입사기에서 실험영역까지 각 부분의 진공도 조건이 일반적으로 10-8~10-9 mbar 대에 있어서 이온빔 전류의 손실이나 전리 이온들에 의한 충격탈리는 무시할 수도 있지만 고속이온의 기체방출 수율이 ~104 정도로 높은 것을 감안할 때 고속이온의 충격탈리에 의한 압력 증가가 감내할 수준인지 검토할 필요가 있다. 압력증가는 추가적인 손실을 유발하고 이것은 다시 압력을 상승시키는 진공 불안정성(vacuum instability)을 야기할 수 있다는 축면에서 조심하는 것이 좋다고 판단된다. 고속 중이온과 잔류기체 분자와의 충돌에서 이온이 손실되는 반응에는 쿨롬(coulomb) 산란과 전하교환(charge exchange)이 있는데 전자는 후자에 비해 일반적으로 1/10000 가까이 낮아서 무시할 수 있고, 전자 포획(electron capture) 또는 전자 손실(electron loss, 이온의 전리에 해당)로 대별되는 전하교환 반응이 이온 손실을 주도하는 것으로 알려져 있다. 이 연구에서는 다양한 전하교환 반응 단면적을 아우르는 비례칙(scaling law)을 사용하여 대표적인 중이온인 U33+ 및 U79+의 손실 및 잔류 기체의 전리율을 계산하고 충격탈리에 의한 표면방출 및 압력상승을 일차적으로 고려하여 진공도 조건의 타당성을 입증하려고 한다.

• Progress in Medical Physics
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• v.2 no.2
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• pp.155-160
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• 1991

We have studied the effective point of measurement for cylindrical ion chamber in water phantom for medical electron beams. Markus parallel plate chamber water phantom are used for the measurement of depth dose to determine the depth of the effective point of measurement for various energies(for electron 6MeV, 9MeV, 12MeV, 16MeV, and 20MeV; Co-60; for photon 6MV, 15MV). Cylindrical ion chambes(PTW233643 with r=2.75mm, PR-05P with r=2mm, and PM30 wiht r=15mm are used for the measurement of depth dose by same mtethod and the values of d$\_$50/ and R$\_$p/ obtained by three cylindrical chambers were compared with those of a flat chamber. From this we could evaluate the effective measuring points of cylindrical ion chamber. The effective point of measurement was estimated as 0.4～0.6r shifted toward surface from the center of the chamber for electron beam, 0.3～0.7r for $\^$60/Co X-ray.

• Journal of the Korean Vacuum Society
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• v.13 no.2
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• pp.54-58
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• 2004

Three hot cathode ionization gauges (HCIG) were used to study their responses of pressure measurements at the stainless steel high vacuum (HV) chamber around room temperatures. The pressure variations of HV measured by the three HCIGs between $20 ^{\circ}C$ and $26 ^{\circ}C$ were 5.0 %, 5.3 %, and 10.3 %, respectively. However, pressure differences between $21.5 ^{\circ}C$ and $22.5^{\circ}C$ were lower than the gauges uncertainty limits. The pressure variations of the HCIGs at the HV chamber was not directly affected by gauge characteristics, but pressure changes due to room temperatures.

• Progress in Medical Physics
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• v.15 no.1
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• pp.9-16
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• 2004

The intensity modulated radiation therapy (IMRT) is believed to be on of the best treatment techniques for the goal of radiation therapy: to irradiate fatal dose to tumor region while minimizing dose to critical organs. It is essential to have comprehensive quality assurance program to assure the precision and the accuracy of the treatment due to the characteristic of the IMRT. The quality assurance technique for the Corvus treatment planning system was developed and its effectiveness was tested with the treatment planning of H&N region. Acrylic phantom, film and ionization chamber were used for this study, the discrepancy between the treatment planning and the film measurements showed 0.03 cm and 0.28 cm for the 90% of isodose line in each directions. Dose measurements showed 1% and 1.2% differences for ionization chamber and TLD, respectively. This concluded that the system can be used for clinic.

• Korean Journal of Materials Research
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• v.11 no.4
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• pp.251-257
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning, high temperature process which consumes vast chemicals and ultra Pure water(UPW). This technology gives rise to the many environmental issues, therefore some alternatives have been studied. In this study, intentionally contaminated Si wafers were cleaned using the electrolyzed water(EW). The EW was generated by an electrolysis equipment which was composed of anode. cathode, and toddle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case $NH_4$Cl electrolyte, the oxidation-reduction potential(ORP) and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.7, and -750mV and 9.8, respectively. For cleaning metallic impurities, AW was confirmed to be more effective than that of CW, and the particle distribution after various particle removal processes was shown to be same distribution.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4427-4432
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• 2010

Parabens have been widely used as preservatives in cosmetics due to the presumed low toxicity and long history of safe use. However, recent studies have shown the potent toxicity of parabens. In order to know if electrolyzed reduced water could suppress the oxidative DNA damage of HDF cell by methylparaben, one of the frequently used parabens, we performed comet assay in this study. As a result, interestingly, electrolyzed reduced water could suppress methylparaben-induced oxidative DNA damage in HDF cells.

• Clean Technology
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• v.10 no.1
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• pp.47-51
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• 2004

현재 반도체 공정에서 사용되는 세정기술은 대부분이 1970년대 개발된 RCA 세정법인 과산화수소를 근간으로 하는 습식 세정으로, 표면의 입자를 제거하기 위한 SC-1 세정액은 강력한 산화제인 과산화수소에 의한 표면과 입자의 산화와 암모니아에 의한 표면의 에칭이 동시에 일어나 입자를 표면으로부터 분리시킨다. 금속 불순물을 제거하기 위한 SC-2 세정액은 염산과 과산화수소 혼합액을 사용하며 금속 불순물을 용해시켜 알칼리나 금속 이온을 형성하거나 용해 가능한 화합물을 형성시켜 제거한다. 또한 황산과 과산화수소를 혼합한 Piranha 세정액은 효과적인 유기물 제거제로서 웨이퍼에 오염된 유기물을 용해 가능한 화합물로 만들거나 과산화수소에 의해 형성되는 산화막내에 오염물을 포함시켜 불산 용액으로 산화막을 제거할 때 함께 제거된다. 최근 금속과 산화막을 동시에 제거하기 위해 희석시킨 불산에 과산화수소를 첨가한 세정공정이 사용되고 있으며 불산에 의해 표면의 산화막이 제거될 때 산화막내에 포함된 금속 불순물을 동시에 제거시킬 수 있다. 그러나 이와 같이 습식세정액 내에 공통적으로 포함되어 있는 과산화수소의 분해는 그만큼 가속화되어 사용되는 화학 약품의 양이 그만큼 증가하게 되고 조작하기 어려운 단점도 있다. 이를 해결하기 위해 환경친화적인 관점으로 화학약품의 사용을 최소화하는 등 RCA세정을 보완하는 연구가 계속 진행되고 있다. 본 연구에서는 RCA세정법을 환경적으로 대체할 수 있는 세정에 사용되는 전리수의 pH변화에 따른 전리수 분석을 하였다. 전리수의 제조를 위하여 전해질로는 NH4CI (HCI:H2O:NH4OH=1:1:1)를 사용하였다. pH 11 이상, ORP -700mV~-850mV인 환원수와 pH 3 이하, ORP 1000mV~1200mV인 산화수를 제조하였으며, 초순수를 첨가하여 pH 7.2와 ORP 351.1mV상태까지 조절하였다. 이렇게 만들어진 산화수와 환원수를 시간 변화와 pH 변화에 따라 Clean Room 안에서 FT-IR과 접촉각 측정기로 실험하였다. FT-IR분석에서 산화수는 pH가 높아질수록, 환원수는 낮아질수록 흡수율이 낮아졌다. 접촉각 실험에서는 산화수의 pH가 높아질수록 환원수의 pH가 낮아질수록 접촉각이 커짐을 확인하였다. 결론적으로 전리수를 이용하여 세정을 하면, 접촉성을 조절할 수 있어 반도체 세정을 가능하게 할 수 있으며, 환경친화적인 결과를 도출할 것으로 전망된다.

• Journal of the Korean Society of Radiology
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• v.12 no.3
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• pp.381-387
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• 2018

A Effect on physiological metabolism of microorganism which irradiated by visible light of non-ionization radiation(12,000 Lux) was investigated. The microorganism used in this experiment was a Rhodospirillum rubrum KS-301 of chemosynthetic microorganism. Batch fermentation of glucose were implement, and based on the data resulted from the fermentation. First, physiological characteristic of microorganism which was not irradiated was investigated. As a result, the decrease of the residual quantity of the substance(5.03 g/L - 2.17 g/L) was increased with the quantity of the bacteria(1.08 g/L - 3.14 g/L)and the quantity of the hydrogenous production(0.186 g - 0.3 g) respectively. Second, physiological characteristic of microorganism which was irradiated was investigated. As a result, the decrease of the residual quantity of the substance(13.17 g/L - 5.2 g/L) was increased with the quantity of the bacteria(4.7 g/L - 10.57 g/L)and the quantity of the hydrogenous production(0.186 g - 0.3 g) respectively. As the physiological characteristic of microorganism which was irradiated by visible light of non-ionization radiation(12,000 Lux) was active with its life, but the cell damages irradiated by with gamma-ray, X-ray, electron-ray in ionization radiation were appeared at cell.

• Journal of Astronomy and Space Sciences
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• v.26 no.4
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• pp.467-478
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• 2009

The super-geomagnetic storms called 2003 Halloween event globally occurred during the period of 29 through 31 which are the following days when the solar flares of X18 class exploded on 28 October 2003. The S4 index from GPS signal strength and the peak electron density ($NmF_2$) from GPS tomography method are analyzed according to the date. The occurrences of the cycle slip and scintillation in the GPS signals are 1,094 and 1,387 on 28 and 29 October, respectively and these values are higher than 604 and 897 on 30 and 31 October. These mean the ionospheric disturbances are not always generated by the period of geomagnetic storm. Therefore, GPS S4 index is useful to monitor the ionospheric disturbances. Behaviors of ionospheric electron density estimated from GPS tomography method are analyzed with the date. At UT = 18 hr, the maximum $NmF_2$ is shown on 28 October. It agrees with $NmF_2$ variation measured from Anyang ionosonde, and the GPS signal are better condition on 30 and 31 October than 28 October. In conclusion, GPS signal condition is relation with geomagnetic activities, and depend upon the variation of the electron density. We will study the long-term data to examine the relationship between the GPS signal quality and the electron density as the further works.