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Development of Cu CMP process for Cu-to-Cu wafer stacking (Cu-to-Cu 웨이퍼 적층을 위한 Cu CMP 특성 분석)

  • Song, Inhyeop;Lee, Minjae;Kim, Sungdong;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.20 no.4
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    • pp.81-85
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    • 2013
  • Wafer stacking technology becomes more important for the next generation IC technology. It requires new process development such as TSV, wafer bonding, and wafer thinning and also needs to resolve wafer warpage, power delivery, and thermo-mechanical reliability for high volume manufacturing. In this study, Cu CMP which is the key process for wafer bonding has been studied using Cu CMP and oxide CMP processes. Wafer samples were fabricated on 8" Si wafer using a damascene process. Cu dishing after Cu CMP and oxide CMP was $180{\AA}$ in average and the total height from wafer surface to bump surface was approximately $2000{\AA}$.

Science Teachers' Perception of the Refractive Index of Media (굴절률에 대한 과학교사들의 인식)

  • Park, Sang-Tae;Yeom, Jun-Hyeok;Yoon, Yeo-Won;Seok, Hyojun
    • Korean Journal of Optics and Photonics
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    • v.28 no.6
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    • pp.334-338
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    • 2017
  • This research aims at investigating science teachers' perception of the refractive index of materials, and thus achieving proper information transmission and teaching of refractive index. Specifically, we have made questionnaires on what physical factors influence the refractive index of a liquid easily available in secondary schools. It was found that 80.0% of science teachers perceived that the density has the greatest influence on the refractive index, among a variety of factors such as molecular structure, the number of molecules per unit volume, mass of each molecule, and the wavelength of light, to mention just a few. This may be due to the fact that current textbooks deal with the refraction of light based on analogy to a mechanical wave. Such a misunderstanding may lead to confusion and misunderstanding for students.

Fatigue Behavior and Probabilistic Fatigue Analysis of Concrete Offshore Structures (콘크리트 해양구조물(海洋構造物)의 피로거동(疲勞擧動)과 확률론적(確率論的) 피로해석(疲勞解析))

  • Oh, Byung Hwan;Kim, Jee Sang
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.8 no.3
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    • pp.31-41
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    • 1988
  • Recently, the offshore structures are increasingly constructed to explore the natural resources. These offshore structures are to be designed to resist the repetitive wave forces. A probabilistic method for the fatigue analysis of offshore concrete structures is presented in this study. The present spectral fatigue analysis calculates wave forces first and then the transfer functions for unit waves from which stress spectra are determined. The calculated fatigue stresses may then be used to evaluate the fatigue damage of concrete structures. A simplified model for the estimation of fatigue damage of the structures, which employs only the probabilistic moments of the peak stress distribution without direct integration, is also proposed. The present study allows more realistic fatigue analysis of offshore concrete structures.

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Effect of AC Electric Fields on Counterflow Diffusion Flame of Methane (메탄의 대향류 확산화염에 대한 AC 전기장의 영향)

  • Choi, Byung-Chul;Kim, Hyung-Kuk;Chung, Suk-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.8
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    • pp.849-855
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    • 2012
  • The effect of electric fields on the response of diffusion flames in a counterflow has been investigated experimentally by varying the AC voltage and frequency. The result showed that the flame was stationary with high AC frequency above the threshold frequency, and it increased with the applied voltage and then leveled off at 35 Hz. Below the threshold frequency, however, the flame oscillated with a frequency that was synchronized with the applied AC frequency. This oscillation can be attributed to the ionic wind effect due to the generation of bulk flow, which arises from the momentum transfer by molecular collisions between neutral molecules and ions, where the ions in the reaction zone were accelerated by the Lorentz force.

Mesoscale Simulation of Polymeric Membranes for Energy and Environmental Application (에너지-환경 분야용 분리막의 Mesoscale Simulation 동향 연구)

  • Park, Chi Hoon;Nam, Sang Yong
    • Membrane Journal
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    • v.27 no.2
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    • pp.121-128
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    • 2017
  • Mesoscale simulation is a type of molecular simulation techniques where groups of atoms are defined as a single bead for calculations, and accordingly, is possible to simulate longer time ($ns{\sim}{\mu}s$) and bigger size ($nm{\sim}{\mu}m$). There are two types of mesoscale simulations : (1) particle-based mesoscale which simulates the system by calculating the movement of the particles themselves and (2) field theory which simulates the system by calculating changes in the chemical potential filed or density field. Mesoscale simulations are powerful tools to study the macroscopic properties of polymers for various applications of energy and environment. In this review, we report the trends and useful information in mesoscale simulation and provide an opportunity for membrane researchers working in the energy-environment field to understand mesoscale simulation techniques.

Structural Design of Optical Access Network for IPOW Service (IPOW 서비스를 위한 광액세스망 구조 설계)

  • Lee, Sang-Wha
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.10
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    • pp.5140-5147
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    • 2013
  • This paper presents a new idea of structural design of the optical access network for IPOW(IP over WDM) services. More efficient network can be constructed, because the IP packets are transmitted directly to the WDM without going through an intermediate layer of networks. The wavelength Routing is based on a label switching technology. The ability to transmission of high volume traffics and QoS capability of the optical label switching directly to the end user of the IPOW optical internet networks is provided. As in AON(Active Optical Network) flexible bandwidth on demand subscribers is allocated. By the Simulation of the proposed optical access networks to measure the BER(Bits Error Ratio) at the end of the nodes the network characteristics are analyzed. These results are based on the design of efficient optical network.

Video Scene Segmentation Technique based on Color and Motion Features (칼라 및 모션 특징 기반 비디오 씬 분할 기법)

  • 송창준;고한석;권용무
    • Journal of Broadcast Engineering
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    • v.5 no.1
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    • pp.102-112
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    • 2000
  • The previous video structuring techniques are mainly limited to shot or shot group level. However, the shot level structure couldn't provide semantics within a video. So, researches on high level structuring are going on for getting over the drawbacks of shot level structure, recently. To overcome the drawbacks of shot level structure, we propose video scene segmentation technique based on color and motion features. For considering various color distribution, each shot is divided into sub-shots based on color feature. A key frame is extracted from each sub-shot. The motion feature in a shot is extracted from MPEG-1 video's motion vector. Moreover adaptive weights based on motion's property in search range are applied to color and motion features. The experiment results of proposed technique show the excellence in view of the over-segmentation and the reflection of semantics, comparing with those of previous techniques. The proposed technique decomposes video into meaningful hierarchical structure and provides video browsing or retrieval based on scene.

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Effect of Gas Diffusion Layer Property on PEMFC Performance (기체확산층 물성이 고분자전해질 연료전지 성능에 미치는 영향)

  • Kim, Junseob;Kim, Junbom
    • Applied Chemistry for Engineering
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    • v.31 no.5
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    • pp.568-574
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    • 2020
  • Gas diffusion layer (GDL) is one of the main components of PEMFC as a pathway of reactants from a flow field to an electrode, water transport in reverse direction, heat management and structural support of MEA. In this study, the effect of GDL on fuel cell performance was investigated for commercial products such as 39BC and JNT30-A3. Polarization curve measurements were performed at different flow rates and relative humidity conditions using 25 ㎠ unit cell. The parameters on operating conditions were calculated using an empirical equation. The electrical resistance increased as the GDL PTFE content increased. The crack of microporous layer had influence on the concentration loss as water pathway. In addition, the ohmic resistance increased as the relative humidity decreased, but decreased as the current density increased due to water formation. Curve fitting analysis using the empirical equation model was applied to identify the tendency of performance parameters on operating conditions for the gas diffusion layer.

Multi-Modal Instruction Recognition System using Speech and Gesture (음성 및 제스처를 이용한 멀티 모달 명령어 인식 시스템)

  • Kim, Jung-Hyun;Rho, Yong-Wan;Kwon, Hyung-Joon;Hong, Kwang-Seok
    • Proceedings of the Korea Institute of Convergence Signal Processing
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    • 2006.06a
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    • pp.57-62
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    • 2006
  • 휴대용 단말기의 소형화 및 지능화와 더불어 차세대 PC 기반의 유비쿼터스 컴퓨팅에 대한 관심이 높아짐에 따라 최근에는 펜이나 음성 입력 멀티미디어 등 여러 가지 대화 모드를 구비한 멀티 모달 상호작용 (Multi-Modal Interaction MMI)에 대한 연구가 활발히 진행되고 있다. 따라서, 본 논문에서는 잡음 환경에서의 명확한 의사 전달 및 휴대용 단말기에서의 음성-제스처 통합 인식을 위한 인터페이스의 연구를 목적으로 Voice-XML과 Wearable Personal Station(WPS) 기반의 음성 및 내장형 수화 인식기를 통합한 멀티 모달 명령어 인식 시스템 (Multi-Modal Instruction Recognition System : MMIRS)을 제안하고 구현한다. 제안되어진 MMIRS는 한국 표준 수화 (The Korean Standard Sign Language : KSSL)에 상응하는 문장 및 단어 단위의 명령어 인식 모델에 대하여 음성뿐만 아니라 화자의 수화제스처 명령어를 함께 인식하고 사용함에 따라 잡음 환경에서도 규정된 명령어 모델에 대한 인식 성능의 향상을 기대할 수 있다. MMIRS의 인식 성능을 평가하기 위하여, 15인의 피험자가 62개의 문장형 인식 모델과 104개의 단어인식 모델에 대하여 음성과 수화 제스처를 연속적으로 표현하고, 이를 인식함에 있어 개별 명령어 인식기 및 MMIRS의 평균 인식율을 비교하고 분석하였으며 MMIRS는 문장형 명령어 인식모델에 대하여 잡음환경에서는 93.45%, 비잡음환경에서는 95.26%의 평균 인식율을 나타내었다.

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Analysis of Disk Array Architecture as a Storage Server of a Small-Sacle VOD Server (소규모 VOD 시스템의 저장 서버로서 디스크 배열 구조의 분석)

  • Go, Jeong-Guk;Kim, Gil-Yong
    • The Transactions of the Korea Information Processing Society
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    • v.4 no.3
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    • pp.811-820
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    • 1997
  • Disk arrays are using to enhance data trandfer rate and I/O performance in multimedia applications which need a high-performance storage device with large storage capacity and high-speed network.As performance varies with configuration and data layout scheme,disk array characteristic variables must be approrpriately deter-mined in desibning disk array archetecture for a speciffic applicatoin. In this paper,in order to design a disk array architecturte as a storage server of a small-scale VOD system,we evaluate performance of a disk array to chose the number of disks in the array,disk array cinfiguration,a degree of declustering for a given data block size of continous media file system and I/D request size through simulation.Simulation result shows that RAID level 5 with 5 disks ios a suitable candidate for the disk array architecture which privides MPEG-2 files with a rate of 6 Mbps,Moreover,we whow that stripe unit is 64 KB and a layout scheme is contigous placement.

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