• Journal of the Institute of Electronics and Information Engineers
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• v.49 no.10
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• pp.128-134
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• 2012

The performance evaluation and fabrication of integrated-optic electric-field sensor utilizing $Ti:LiNbO_3$ asymmetric Mach-Zehnder intensity modulator with a push-pull lumped electrode and a plate-type probe antenna to measure an electric field strength is described. The modulator has a small device size of $46{\times}7{\times}1\;mm$ and operates at a wavelength $1.3{\mu}m$. The devices are simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides. The minimum detectable electric field is 1.02 V/m and 6.91 V/m, corresponding to a dynamic range of ~35 dB and ~10 dB at the frequencies of 500 KHz and 5 MHz, respectively.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.12
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• pp.15-22
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• 2011

Integrated-optic symmetric/asymmetric Mach-Zehnder interferometers at $1.3{\mu}m$ wavelength were studied as sensing part for electric-field measurement system. The devices were simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides and lumped-type electrodes. A half-wave voltage of $V_{\pi}$=6.6V and modulation depth of 100% and 75% for a symmetric structure were measured for 200Hz and 1kHz electrical signal bandwidth, respectively. By the way, almost half-maximum power transmission was observed for asymmetric interferometers with ${\pi}$/2 intrinsic phase difference. Expected experimental measurements were observed for 1kHz electrical signal bandwidth.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.71-71
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• 2010

최근 나노선의 우수한 전기적, 광학적 특성을 다양한 종류의 전자소자, 광소자, 그리고 센서에 응용하는 연구가 활발히 진행되고 있다. 그 중 $SnO_2$ 나노선은 n-type의 전기특성과 우수한 광 특성을 보이며, 전자소자, 광소자 뿐 아니라 다양한 종류의 가스 센서 제작에 널리 사용되고 있다. 본 연구에서는 화학기상증착법 (Chemical Vapor Deposition)으로 $SnO_2$ 나노선을 성장하여 전계방출효과 트랜지스터 (field effect transistor: FET)를 제작하여 전기적 특성을 측정하였다. 나노선의 성장 조건 (온도와 산소 유량) 에 따른 나노선의 구조, 화학조성, 전기적 특성을 체계적으로 조사하였다. 산소의 유량이 낮을 때는 온도에 따라 나노선의 크기와 전기 특성에 변화가 없었으나, 산소의 유량을 높이면 온도에 따라 나노선의 두께와 전기적 특성이 크게 변화하였다. 본 연구에서는 특히, FET 구조에서 on/off current ratio 가 $10^5$ 이상으로 매우 높은 나노선 제작이 가능하였다. 전기적 특성과 나노선의 결정구조, 화학적 조성을 함께 비교하여 성장 메커니즘을 이해하고자 한다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.6 no.1
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• pp.89-98
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• 2002

Optical current sensor and optical voltage sensor modules were designed and fabricated to improve measurement error and insulation in automatic power distributor By using Faraday effect, optical current sensor with an $\alpha$-iron core was designed and fabricated to minimize current induction of the other phase and was optimized to maintain linearity. Optical voltage sensor was fabricated owing to the pockets effect and adopted spatial electric field type because of small room in an automatic power distributor. To connect a distributor with an external terminal for signal processing, optical multi connector was designed, fabricated and tested for coupling loss and gas leakage. The linearity of optical current sensor for applied current maintains variation of smaller than 2.5% for applied current range from 20A to 700A. The linearity of optical voltage sensor was smaller than 1% for appling voltage from 6.6kV to 19.8kV. Since the measured characteristics are good, these devices can be considered as being applicable in practice.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.269-269
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• 2010

$SnO_2$ 나노선은 n-type의 전기적 특성과 우수한 광 특성을 보이며, 전자소자, 광소자 뿐 아니라 다양한 종류의 가스 센서 등에 응용되고 있다. 그러나 $SnO_2$ 나노선은 공기중에서 전기적으로 불안정한 특성을 보이며, 도핑을 하지 않은 나노선 소자에서는 전자의 모빌러티가 높지 않다는 단점을 갖고 있다. 이를 개선하고자 본 연구에서는 화학기상증착법 (Chemical Vapor Deposition)으로 Sb을 도핑한 $SnO_2$ 나노선을 성장하여 전계방출효과 트랜지스터 (field effect transistor: FET)를 제작하여 전기적 특성과 UV 반응성의 변화를 측정하였다. Sb 도핑 양을 늘려감에 따라 전기적 특성이 반도체 특성에서 점점 금속 특성으로 변하는 것과 게이트 전압의 영향을 적게 받는 것을 확인하였다. 또한 도핑을 해준 $SnO_2$ 나노선의 경우 UV 반응과 회복 시간이 기존에 비하여 크게 감소하여 UV 센서에 더욱 적합해진 것을 확인하였다. 또한, 슬라이딩 트랜스퍼 공정을 이용하여 나노선을 원하는 기판에 정렬된 상태로 전이할 때 도핑한 나노선은 표면특성의 변화로 정렬도가 크게 감소하는 것을 확인하였고, 기판에 윤활제를 사용하여 정렬도를 높일 수 있었다.

• Journal of the Korean Electrochemical Society
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• v.2 no.1
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• pp.17-22
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• 1999

Since the use of porous silicon for microsensors and microactuators is in the euly stage of study, only several application devices, such as light-emitting diodes and chemical sensors have so far been demonstrated. In this paper we present an overview of the present status of porous silicon sensors and actuators research with special emphasis on the applications of chemical sensors and optical devices. The capacitive type porous silicon humidity sensors had a nonlinear capacitance-humidity characteristic and a good sensitivity at higher humidity above $40\%RH$. The porous silicon $n^+-p-n^+$ device showed a sharp increase in current when exposed to an ethanol vapor. The $p^+-PSi-n^+$ diode fabricated on porous silicon diaphragm exhibited an optical switching characteristic, opening up its utility as an optical sensor or switch. The photoluminescence (PL) spectrum, taken from porous silicon under 365 nm excitation, had a broad emission, peaked at -610 nm. The electroluminescence(EL) from ITO/PSi/In LED had a broader spectrum with a blue shifted peak at around 535nm than that of the PL.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.165-172
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• 2012

Integrated-optic asymmetric Mach-Zehnder interferometer at $1.3{\mu}m$ wavelength and segmented electrode structure were designed and fabricated as a sensing part for the electric-field measurement system. The device was simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides and lumped-type electrodes. Almost half-maximum power transmission was observed for asymmetric interferometers with ${\pi}/2$ intrinsic phase difference. Expected experimental measurements were observed for 1KHz electrical signal bandwidth.

• Clean Technology
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• v.30 no.1
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• pp.13-22
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• 2024

In this study, blended 6,13-Bis(triisopropylsilylethynyl)pentacene (TP):2-Decyl-7-phenyl[1]benzothieno[3,2-b][1] benzothiophene (BT):Poly styrene (PS) TFT at different ratios were explored for their potential application as light absorption sensors. Due to the mixing of BT, both off current reduction and on/off ratio improvement were achieved at the same time. In particular, the TP:BT:PS (1:0.25:1 w/w) sample showed excellent light absorption characteristics, which proved that it is possible to manufacture a high-performance light absorption device. Through analysis of the crystal structure and electrical properties of the various mixing ratios, it was confirmed that the TP:BT:PS (1:0.25:1 w/w) sample was optimal. The results of this study outline the expected effects of this innovation not only for the development of light absorption devices but also for the development of mixed organic semiconductor (OSC) optoelectronic systems. Through this study, the potential to create a multipurpose platform that overcomes the limitations of using a single OSC and the potential to fabricate a high-performance OSC TFT with a fine-tuned optical response were confirmed.

• Journal of Sensor Science and Technology
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• v.9 no.1
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• pp.83-89
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• 2000

BST thin films were deposited on the ITO coated glass for using TFELD insulating layer by rf magnetron sputtering method. $O_2/(Ar+O_2)$ mixing ratio was 10%, substrate temperature was changed from R.T. to $500^{\circ}C$, and working pressure was changed from 5 mTorr to 30 mTorr. BST thin films deposited with various conditions were investigated electrical, optical, structural properties, and stoichiometry. The result of investigation was achieved good fabrication condition that substrate temperature of $400^{\circ}C$, and working pressure of 30 mTorr. Relative dielectric constant of 254 at 1 kHz, leakage current density was below $3.3{\times}10^{-7\;}A/cm^2$ at 5\;MV/cm applied electric field, and transmittance was over 82% at visible range.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.350-350
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• 2011

ZnO는 II-VI족 화합물 반도체로서 3.37 ev의 band gap energy와 60 mv의 exciton binding energy를 가지며 차세대 소자로 다양한 분야에서 연구되어지고 있다. ZnO 박막과는 다르게 ZnO nano structure는 효율성과 특성 향상의 이점으로 태양전지와 투명전극 소자에 많은 연구가 되고 있으며 UV 레이저, 가스센서, LED, 압전소자, Field Emitting Transistor (FET) 등 다양한 응용분야에서 연구되고 있다. 본 연구에서는 유리 기판 위에 RF Magnetron sputtering법을 이용해 ZnO buffer layer를 다양한 두께(~1,000${\AA}$)로 증착한 뒤, Zn powder (99.99%)를 지름 2inch 석영관 안에 넣어 Thermal furnace장비를 이용하여 Thermal Evaporation법으로 약 500$^{\circ}C$에서 30분 동안 촉매 없이 성장 하였다. 수직성장된 ZnO 나노 구조체의 특성을 전계방출주사전자현미경(SEM), X-선 회절패턴(XRD), UV-spectra를 이용하여 분석하였다. SEM 분석을 통하여 ZnO buffer layer위에 성장된 ZnO 나노 구조체는 직경이 약 ~50 nm, 길이가 ~2 um까지 성장을 보였으며, XRD 측정결과, ZnO 우선 성장 방향(002)을 확인하였다. 두 가지 측정을 통하여 ZnO buffer layer의 유무에 따라 성장 특성이 향상되었음을 확인하였으며, 이는 buffer layer가 seed 역할을 한 것으로 사료된다. UV-spectra 측정을 통하여 가시광 영역(400~780 nm)에서 60%대의 투과도를 보여 가시광 영역에서 투명성을 요구하는 전자 소자 및 광소자 등에 적용 가능성을 확인하였다. 이 연구를 통하여 우수한 투과도를 가지며 유리 기판위에 수직성장된 ZnO 나노구조체는 태양전지와 플렉서블 디스플레이 등 다양한 활용 분야를 제시할 수 있다.