• Title/Summary/Keyword: 적층조건

Search Result 419, Processing Time 0.031 seconds

형상계수법을 이용한 크라이오펌프용 냉각판의 기체분자 포획능력 해석

  • Im, Jeong-Bin;Gang, Byeong-Ha;Park, Seong-Je
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.12-12
    • /
    • 2010
  • 첨단 공정이 필요한 반도체와 LCD, PDP, LED 등의 디스플레이 및 IT 부품을 제조하는데 필요한 장비의 고성능화와 작업환경의 고청정화에 따른 초고진공펌프의 수요 확대와 앞으로 전개될 한-미 FTA에 따른 시장 확대로 인해 크라이오펌프의 국산화가 시급한 실정이다. 고성능 크라이오펌프를 만들기 위해서는 냉각판을 극저온으로 냉각하기 위한 극저온 냉동기 개발도 중요하지만 냉각판(cryoarray)에 최대한 많은 분자를 포획시키는 것 또한 최우선적으로 고려되어야 할 사항 중 하나이다. 이에 본 논문은 크라이오펌프용 냉각판의 분자포획능력에 대하여 연구하였다. 해석에 이용한 냉각판은 현재 상용화된 모델들 중 원형 중앙판에 $45^{\circ}$ 하향 skirt가 달린 형태이며 8장의 냉각판이 일정한 간격을 두고 아래쪽으로 적층되어 있다. 냉각판의 분자포획능력의 해석은 형상계 수법(view factor method)을 이용해 수행하였다. 형상계수법은 크라이오펌프를 n개의 미소면적으로 구성된 밀폐된 공간으로 가정하고 각 미소면적요소의 온도와 흡착계수, 표면조건 그리고 분자유속이 일정하다는 조건을 이용해 분자유속에 관해 n개의 대수연립방정식을 얻고 이 대수연립방정식을 풀어 냉각판의 분자포획능력을 구한다. 해석에 이용한 냉각판의 기체분자포획능력이 구속된 형상에서 얼마나 우수한 가를 알아보기 위해 중앙판의 직경, 입구와 냉각판 사이의 거리, 그리고 각 냉각판 사이의 거리를 변화시켜가며 해석을 수행하고 그 결과를 비교, 분석하였다.

  • PDF

질소유량 변화와 고온 열처리에 의한 HfN 박막의 Nano-electrotribology 특성 연구

  • Park, Myeong-Jun;Kim, Seong-Jun;Kim, Su-In;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2014.02a
    • /
    • pp.354.1-354.1
    • /
    • 2014
  • Hafnium nitride (HfN) 박막은 고온에서의 안정성과 낮은 비저항 그리고 산소확산에 대한 억제력을 가지고 있기 때문에 확산방지막으로 많은 연구가 진행 되고 있다. 현재까지 진행된 대부분의 연구는 HfN 박막의 전기적인 특성과 구조적인 특성에 대한 것이었고 다양한 연구 결과가 보고되었다. 하지만 기존의 연구들은 박막의 nano-electrotribology 특성에 대한 연구가 부족하여 박막 적층 공정시 요구되는 물성에 대한 연구가 절실하다. 따라서 본 연구에서는 HfN 박막의 증착조건 및 열처리조건에 따른 nano-electrotribology 특성 변화를 확인하고자 하였다. HfN박막은 rf magnetron sputter를 이용하여 Si 기판위에 Hf target으로 질소 유량을 변화시키며 증착하였고 가열로에서 $600^{\circ}C$$800^{\circ}C$로 20분간 열처리를 실시하였다. 열처리한 박막과 as-deposited 상태의 박막을 nano-indenter를 통하여 나노기계 전기적인 특성을 분석하였다. nano-indenter는 박막에 인가된 stress와 탄성계수(elastic modulus), 표면경도(surface hardness)와 같은 특성을 직접적인 tip 접촉을 통하여 in-situ로 분석할 수 있는 장비이다. 실험결과 HfN박막을 $600^{\circ}C$로 열처리 한 경우 표면경도가 16.20에서 18.59 GPa로 증가하였다. 표면경도의 증가는 열처리 시 박막내에 compressive stress가 생성되었기 때문이라고 생각된다. 그러나 $800^{\circ}C$로 열처리 한 경우 표면경도가 16.93 GPa로 감소하였는데 이는 표면균열 발생으로 인한 stress relaxation 때문인 것으로 생각된다. 증착 시 주입되는 질소의 유량과 열처리 온도는 HfN박막의 기계적 안정성에 영향을 미치는 중요한 요소임을 본 실험을 통해 확인하였다.

  • PDF

Performance Evaluation of C/SiC Composites (C/SiC 복합재료의 내열성능 평가)

  • Kim, Yun-Chul
    • Proceedings of the Korean Society of Propulsion Engineers Conference
    • /
    • 2007.04a
    • /
    • pp.185-188
    • /
    • 2007
  • The main objective of this research effort was to develope the performance of C/SiC composites manufactured by LSI (Liquid Silicon Infiltration) method for solid and liquid rocket propulsion system and ensure the performance analysis technique. The various carbon preform were manufactured by filament winding, tape rolling, involute layup and stack molding process. For the best performance of thermal and mechanical properties, many process conditions were tested and selected by varying preform, the content of SiC, temperature, impregnation resin and chemical vapour reaction. In conclusion, the high performance and reliability of C/SiC composite were proved for solid and liquid rocket propulsion system. And the performance analysis technique related to mathematical ablation model was originated.

  • PDF

Vibration Analysis of the Sandwich Plates with very thin faces (얇은 면재를 갖는 샌드위치 평판의 진동해석)

  • In-Kyu Park;Ik-Tai Kim;Choong-Yul Son
    • Journal of the Society of Naval Architects of Korea
    • /
    • v.30 no.1
    • /
    • pp.134-144
    • /
    • 1993
  • Sandwich plate is consisted of equal two isotropic, thin, stiff and strong sheets of dense material separated symmetrically by an isotropic thick layer which may be much less stiff and strong. This study analyzed the dependency of the natural frequencies and mode shapes of sandwich plates on material properties, thicknesses of faces and cores, and various boundary conditions using Rayleigh-Ritz method. E-glass Woven Roving and another two kinds of materials were selected as a face, P.V.C. and another kinds of materials were selected as a core. Natural frequencies and mode shapes obtained by Rayleigh-Ritz method were compared with F.E.M. solutions using ADINA program.

  • PDF

Hydraulic Conditions to Density Currents in the Estuary (하구에 있어서의 밀도유적 수리조건)

  • 이문옥;이삼노
    • Journal of Korean Society of Coastal and Ocean Engineers
    • /
    • v.2 no.1
    • /
    • pp.1-10
    • /
    • 1990
  • Experimental studies oil the density currents were made in order to investigate their hydraulic conditions in the estuary. Interfacial forms in the flow direction became sharply with increasing densimetric Froude number in the estuary which arrested saline wedge exists. Interfacial thicknesses were almost constant in the open channel, while they abruptly increased out of channel and they also decreased as overall Richardson number increases. Densimetric Froude number of river mouth showed that it was not necessarily 1.0 and varies with the upper layer thickness. On the other hand, water level there tended to increase with increasing relative densities. It is observed in the Sumjin River Estuary that a strong density front has been formed between freshwater and ocean waters.

  • PDF

다결정 실리콘 박막을 사용한 비휘발성 메모리 장치의 OSO 적층구조에 따른 전하 저장량의 증가

  • Baek, Il-Ho;Jeong, Seong-Uk;Lee, Won-Baek;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.02a
    • /
    • pp.150-150
    • /
    • 2010
  • 비휘발성 메모리의 구조는 ONO($SiO_2$, $SiN_X$, $SiN_XN_Y$), 혹은 NNO($SiN_X$, $SiN_X$, $SiN_XN_Y$)등으로 구성된 blocking layer, charge storage layer, tunneling layer 등이 일반적이다. 본 연구에서 제작된 OSO구조는charge storage layer를 a-Si을 사용한 것으로, 기존에 사용되던 charge storage layer인 $SiN_x$ 대신에 a-Si:H 를 사용하였다. 최적의 전하 저장층 조건을 알기 위하여 가스비에 따른 raman 및 bandgap 측정, 그리고 C-V 통하여 트랩된 전하 저장량 및 flatband 전압의 shift 값을 측정 및 분석하였다. 실험 결과, bandgap이 작아 band edge 저장 가능하며, SiNx 와 마찬가지로 a-Si:H 내 트랩에 저장이 가능하였다. 또한 $SiO_2$/a-Si:H와 a-Si:H/SiOxNy 계면의 결함 사이트에 전하의 저장되며, bandgap이 작아 트랩 또는 band edge에 위치한 전하들이 높은 bandgap을 가지는 blocking 또는 tunneling layer를 통하여 빠져 나오기 어려운 특성이 있었다. 본 연구에서는 최적의 전하 저장 층 조건을 알기 위하여 가스비에 raman 및 bandgap 측정, 그리고 C-V 통하여 트랩된 flatband 전압의 shift 값을 측정하여 결과를 논의하였다. 또한 OSO 구조의 두께에 있어 MIS 결과와 poly-Si 상에 실제 제작된 NVM 소자의 switching 특성을 논의하였다.

  • PDF

A Study on the Shaped-Beam Antenna with High Gain Characteristic (고이득 특성을 갖는 성형 빔 안테나에 대한 연구)

  • Eom, Soon-Young;Yun, Je-Hoon;Jeon, Soon-Ick;Kim, Chang-Joo
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.18 no.1 s.116
    • /
    • pp.62-75
    • /
    • 2007
  • This paper describes a shaped-beam antenna for increasing the antenna gain of a radiating element. The proposed antenna structure is composed of an exciting element and a multi-layered disk array structure(MDAS). The stack micro-strip patch elements were used as the exciter for effectively radiating the electromagnetic power to the MDAS over the broadband, and finite metallic disk array elements - which give the role of a director for shaping the antenna beam with the high gain - were finitely and periodically layered onto it. The efficient power coupling between the exciter and the MDAS should be carried out in such a way that the proposed antenna has a high gain characteristic. The design parameters of the exciter and the MDAS should be optimized together to meet the required specifications to meet the required specifications. In this study, a shaped-beam antenna with high gain was optimally designed under the operating conditions with a linear polarization and the frequency band of $9.6{\sim}10.4\;GHz$. Two methods constructed using thin dielectric film and dielectric foam materials respectively were also proposed in order to implement the MBAS of the antenna. In particular, through the computer simulation process, the electrical performance variations of the antenna with the MDAS realized by the thin dielectric film materials were shown according to the number of disk array elements in the stack layer. Two kinds of antenna breadboard with the MDAS realized with the thin dielectric film and dielectric foam materials were fabricated, but experimentation was conducted only on the antenna breadboard(Type 1) with the MDAS realized with the thin dielectric film materials according to the number of disk array elements in the stack layer in order to compare it with the electrical performance variations obtained during the simulation. The measured antenna gain performance was found to be in good agreement with the simulated one, and showed the periodicity of the antenna gain variations according to the stack layer number of the disk array elements. The electrical performance of the Type 1 antenna was measured at the center frequency of 10 GHz. As the disk away elements became the ten stacks, a maximum antenna gain of 15.65 dBi was obtained, and the measured return loss was not less than 11.4 dB within the operating band. Therefore, a 5 dB gain improvement of the Type 1 antenna can be obtained by the MDAS that is excited by the stack microstrip patch elements. As the disk array elements became the twelve stacks, the antenna gain of the Type 1 was measured to be 1.35 dB more than the antenna gain of the Type 2 by the outer dielectric ring effect, and the 3 dB beam widths measured from the two antenna breadboards were about $28^{\circ}$ and $36^{\circ}$ respectively.

Improvement of the Characteristics of PZT Thin Films deposited on LTCC Substrates (LTCC 기판상에 증착한 PZT 박막의 특성 향상에 관한 연구)

  • Hwang, Hyun-Suk;Kang, Hyun-Il
    • The Journal of the Institute of Internet, Broadcasting and Communication
    • /
    • v.12 no.1
    • /
    • pp.245-248
    • /
    • 2012
  • In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

Study on the Influence of Fungi for Thermal Protective Cork-based Exterior Insulator (열방호용 코르크계 외부 인슈레이션 재료의 곰팡이 영향 연구)

  • Chung, Sang Ki;Park, Hee Moon;Kang, Eun Hye;Kim, Hyung Geun;Kim, Yun Chul;Park, Young Chul;Park, Byeong Yeol;Choi, Dong Hyun;Lee, Seung Goo
    • Proceedings of the Korean Society of Propulsion Engineers Conference
    • /
    • 2017.05a
    • /
    • pp.933-935
    • /
    • 2017
  • This paper deals with the influence of fungi for the thermal protective cork-based exterior insulator which protect a missile system from aerodynamic loads and heating during flight of missile. We consider the adhesion of cork-based composite on the composite motor case which fabricated by filament winding process. We also consider the importance of the requirement analysis for effective, successful system development under given system conditions. In order to develop the basic requirement analysis for the thermal protective cork-based exterior insulator, an experimental requirement analysis was accomplished, and some experimental comparing results, the study for preventing fungi are presented.

  • PDF

Prediction of Compressive Behavior of FRP-Confined Concrete Based on the Three-Dimensional Constitutive Laws (3차원 구성관계를 고려한 FRP-구속 콘크리트의 압축거동 예측모델)

  • Cho Chang-Geun;Kwon Min-ho
    • Journal of the Korea Concrete Institute
    • /
    • v.16 no.4 s.82
    • /
    • pp.501-509
    • /
    • 2004
  • The proposed model can predict the compressive behaviors of concrete confined with fiber reinforced polymer (FRP) jacket. To model confining concrete by FRP jackets, the hypoelasticity-based constitutive law of concrete In tri-axial stress states has been presented. The increment of strength of concrete has been determined by the failure surface of concrete in tri-axial states, and its corresponding peak strain is computed by the strain enhancement factor that is proposed in the present study, Therefore, the newly proposed model is a load-dependent confinement model of concrete wrapped by FRP jackets to compare the previous models which are load-independent confinement models. The behavior of FRP jackets has been modeled using the mechanics of orthotropic laminated composite materials in two-dimension. The developed model is implemented into the incremental analysis of compressive tests. The verification study with several different experiments shows that the model is able to adequately capture the behavior of the compression test by including better estimations of the axial responses as well as the lateral response of FRP-confined concrete cylinders.