• Korean Journal of Materials Research
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• v.7 no.5
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• pp.417-422
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• 1997

본 연구에서는 LPCVD, PECVD, ECR plasma CVD방법을 이용하여 x선 노광 공정용 마스크의 투과막재료로써의 실리콘질화막의 증착과 그의 물성에 관하여 실험하였다. X선 노광 마스크용 투과막의 재질로써 요구되는 적정인장응력에 가지는 증착조건으로 실리콘질화막을 1$\mu\textrm{m}$정도의 두께로 증착하였으며 이 조건에서의 물성을 SIMS, XPS, ESR, AFM, spectrophoto-metry를 이용하여 비교 분석하였다. ECR plasma CVD방법으로 얻은 실리콘 질화막은 화학양론적 조성(Si/N=0.75)에 근접하는 막을 얻을 수 있었으며 표면 평활도와 가시광투과도가 가장 우수한 결과를 얻었다. 저온 증착법인 PECVD로 얻은 막은 Si/N비가 약 0.86정도이고 산소와 수소의 불순물함량이 가장 높게 나타났다. SiH$_{2}$CI$_{2}$를 이용한 LPCVD막의 경우는 Si-rich조성을 가지지만 수소 불순물의 함량이 가장 작게 나타났고 표면거칠기는 가장 나쁘게 나타났다. 그러나 위의 방법으로 얻은 실리콘 질화막의 최대 가시광투과도는 633nm파장에서 모두 90%이상의 값을 나타내었고, 또한 표면 평활도도 0.64-2.6nm(rms)로 현재 연구되고 있는 다른 X선 투과막재료보다 월등히 우수한 결과를 보였다.

• Applied Biological Chemistry
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• v.41 no.6
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• pp.437-441
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• 1998

The effects of sucrose fatty acid ester (SE, 1% w/w) and glycerin (GL, 1% v/w) additions, storage temperature$(0,\;20\;and\;70^{\circ}C)$, and time $(0{\sim}6\;day)$ on texture properties, hardness(H), cohesiveness(O), chewiness(C) and rheological property(R) of Baikseolgi were studied. The H of Baikseolgi increased sharply in the early stage of storage at 0 and $20^{\circ}C$, while increased gently at $70^{\circ}C$ with increasing storage time. After 6 days of storage, the H of Baikseolgi at $20^{\circ}C$ had a little lower than that at $0^{\circ}C$. However, the H of Baikseolgi at $70^{\circ}C$ was 10.7% of that at $0^{\circ}C$. The addition of GL had greater effect on the reduction of H than that of SE. The H of control, SE and GL additions were 336, 216 and $$174\;g_f, respectively, after 6 days at $70^{\circ}C$. The O of Baikseolgi at $70^{\circ}C$ were higher than those at $0^{\circ}C$. The O of GL added Baikseolgi had the highest value and the second and the third were SE added and control, respectively. The O of Baikseolgi decreased with increasing storage time. The C of Baikseolgi of increased with increasing storage time, which had similar curve patterns to the H of Baikseolgi. Instantaneous stress and equilibrium stress of Baikseolgi decreased with increasing storage temperature. The affection of viscous element increased and that of elastic element decreased with increasing storage temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.84-84
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• 2000

수소화된 비정질 실리콘(a-Si:H)과 미세결정질 실리콘 ($\mu$c-Si:H)은 저온.건식 공정인 PECVD로 값싼 유리 기판을 사용하여 넓은 면적에 증착이 가능하다는 큰 장점으로 인해 광전소자(photovoltaic device)와 박막 트랜지스터(TFTs)등에 폭넓게 응용되어 왔으며 최근에는 nm 크기의 실리콘 결정(nc-Si)에서 가시광선 영역의 발광 현상이 발견됨에 따라 광소자로서의 특성을 제어하기 위해서는 성장 조건과 공정 변수에 따른 구조 변화에 대한 연구가 선행되어야 한다. 본 연구에서는 UHV-ECR-PECVD 법을 이용하여 H2로 희석된 SiH4로부터 a-Si:H과 $\mu$c-Si:H를 증착하였다. 그림 1은 SiH4 20sccm/H2 50sccm/25$0^{\circ}C$에서 기판의 DC bias를 변화시키면서 박막을 증착시킬 때 나타나는 박막의 구조 변화를 raman spectrum의 To phonon peak의 위치와 반가폭의 변화로 나타낸 것이다. 비정질 실리콘 박막은 DC bias를 증가시킴에 따라 무질서도가 증가하다가 어떤 critical DC bias에서 최대치를 이룬후 다시 질서도가 증가한다. 이온의 충격력에 의해 박막내에 응력이 축적되면 박막의 에너지 상태가 높아지고 이 축적된 응력이 ordering에 대한 에너지 장벽을 넘을 수 있을 만큼 커지게 되면 응력이 풀리면서 ordering이 가능해지는 것으로 생각된다. 그림 2는 수소 결합 형태의 변화이다. 박막의 무질서도가 증가할 경우 알려진 바와 같이 2000cm-1근처의 peak은 감소하고 2100cm-1 부근이 peak이 증가하는 현상을 보였다. 본 논문에서는 여러 공정 변수, 특히 DC bias에 따르는 박막의 구조 변화와 다른 성장 조건(온도, 유량비)이 critical DC bias나 결정화, 결정성 등에 미치는 영향에 대한 분석결과를 보고하고자 한다.등을 이용하여 광학적 밴드갭, 광흡수 계수, Tauc Plot, 그리고 파장대별 빛의 투과도의 변화를 분석하였으며 각 변수가 변화함에 따라 광학적 밴드갭의 변화를 정량적으로 조사함으로써 분자결합상태와 밴드갭과 광 흡수 계수간의상관관계를 규명하였고, 각 변수에 따른 표면의 조도를 확인하였다. 비정질 Si1-xCx 박막을 증착하여 특성을 분석한 결과 성장된 박막의 성장률은 Carbonfid의 증가에 따라 다른 성장특성을 보였고, Silcne(SiH4) 가스량의 감소와 함께 박막의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다. 이것은 quinua 대체량 증가에 따른 반죽의 안정성이 저하되어 버린 것으로 생각되어진다. 더욱이 lipase를 첨가하면 반죽이 분화하는 경향이 보여졌지만 첨가량 75ppm에 있어서 상당히 비용적의 증대가 보였다. 이것은 lipase의 가수분해에 의해

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.4
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• pp.89-94
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• 2008

Purpose: To observe the high temperature creep test and the fracture surface of the samples of 9% Ni alloy steel generally used for all kinds of mahine parts and predict the durability of that by determining a constant of C with a Larson-Miller variable. Methods: The equipment of this test was made into lever-beam style designed by Andrade and F. Garofalo et al.. The condition of creep test was set under 16 kinds of conditions after fixing 4 kinds of temperature condition and 4 kinds of stress condition to check how it effects the samples. Results: The temperature of creep test was increased, the stress index (n) of creep deformation was gradually decreased from 3.97 to 3.55. The activation energy of creep deformation was decreased from 90.39 to 83.64 kcal/mol when the stress was increased. A constant of C value by calculation of larson-Miller variable was about 22 and if temperature for use is suggested, the durability could be calculated. Conclusions: By analyzing the fracture phenomenon and suggesting the observation result of the fracture surface of the samples and creep test of 9% Ni alloy steel, the basic design data for the practical use of accessories in the field of equipment could be constructed and used to predict the durability of the equipment.

• Journal of the Mineralogical Society of Korea
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• v.16 no.1
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• pp.91-106
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• 2003

XRD results on annealing studies of Na-feldspars (Amelia albite) show rapid changes in the lattice parameters of the $1073^{\circ}C$-heated samples owing to disordering of Al and Si as well as lattice distortions upon quenching of the heated specimens. While a low albite transformed to a high albite by 7-days annealing at $1073^{\circ}C$, it remains as an early intermediate albite even by 140-days annealing at $924^{\circ}C$ due to the slower Al-Si disordering rate. From the heated samples tweed structures of $100∼200\AA$ were typically observed by TEM, which showed different ways of development between the $1073^{\circ}C$ -heated one and the $923 ^{\circ}C$ -heated one. The former locally trans-farmed to rnicrostructures similar to albite twin, while the latter transformed to domain structures containing albite twin plane in the wider area. The origin of tweed structures is suggested to be formation of incipient twins (albite twin and pericline twin) to reduce the lattice instability which is increased by disordering of Al and Si as well as quenching.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.2
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• pp.29-37
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• 2021

The effect of Ar/N₂ two-step plasma treatment on the quantitative interfacial adhesion energy of low temperature Cu-Cu bonding interface were systematically investigated. X-ray photoelectron spectroscopy analysis showed that Ar/N₂ 2-step plasma treatment has less copper oxide due to the formation of an effective Cu4N passivation layer. Quantitative measurements of interfacial adhesion energy of Cu-Cu bonding interface with Ar/N₂ 2-step plasma treatment were performed using a double cantilever beam (DCB) and 4-point bending (4-PB) test, where the measured values were 1.63±0.24 J/m² and 2.33±0.67 J/m², respectively. This can be explained by the increased interfacial adhesion energy according phase angle due to the effect of the higher interface roughness of 4-PB test than that of DCB test.

• Journal of the Microelectronics and Packaging Society
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• v.6 no.1
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• pp.1-10
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• 1999

InGaP epilayers were grown on the flat, $2^{\circ}$off, $6^{\circ}$ off, and $10^{\circ}$off GaAs substrates by organo-metallic vapor phase epitaxy, and influences of crystallographic misorientation of the substrate on the structural and optical properties such as lattice mismatch, elastic strain, lattice curvature, misfit stress, and PL intensity /line-width were investigated in this study. Material characterizations were carried out by TXRD( tripple-axis x-ray diffractometer) and low temperature (11K) PL (photoluminescence). With increase of the substrate misorientation angle (S.M.A.), the relative incorporation of Ga atoms on the substrate surface was found to be enhanced. Also, with increase of the S. M. A., the x-ray line-width of the InGaP epilayer was reduced, indicating that the crystal quality of the epilayer could be improved tilth a misoriented substrate. It was also found that the elastic accommodation of the strain-free lattice misfit was more remarkable in a misoriented sample. PL intensity increased, and PL line-width and emission wavelength decreased with the increase of S. M. A. The results conclude that the elastic characteristics and the crystal quality of the InGaP epilayer could be remarkably enhanced when the misoriented substrates were employed.

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.213-220
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• 2009

The optimal condition of low temperature deposition of transparent conductive Al-doped zinc oxide (AZO) films is studied by RF magnetron sputtering method. To achieve enhanced-electrical property and good crystallites quality, we tried to deposit on glass using a two-step growth process. This process was to deposit AZO buffer layer with optimal growth condition on glass in-situ state. The AZO film grown at rf 120 W on buffer layer prepared at RF $50{\sim}60\;W$ shows the electrical resistivity $3.9{\times}10^{-4}{\Omega}cm$, Carrier concentration $1.22{\times}10^{21}/cm^3$, and mobility $9.9\;cm^2/Vs$ in these results, The crystallinity of AZO film on buffer layer was similar to that of AZO film on glass with no buffer later but the electrical properties of the AZO film were 30% improved than that of the AZO film with no buffer layer. Therefore, the cause of enhanced electrical properties was explained to be dependent on degree of crystallization and on buffer layer's compressive stress by variation of $Ar^+$ ion impinging energy.

• Nuclear Engineering and Technology
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• v.5 no.1
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• pp.55-64
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• 1973

The effect of compression in the strain ageing of Ferrovac E iron has been examined with compressive testing following the prestrain in compression. Both prestraining and testing were preformed at room temperature with the strain rate of 1.9$\times$10$^{-4}$ se $c^{-1}$ and that of 0.95$\times$10$^{-4}$ se $c^{-1}$ , respectively. Ageing was carried out at several temperatures below 8$0^{\circ}C$ using thermostatically controlled oil baths with a temperature control within$\pm$1$^{\circ}C$. It was found that the rate of strain ageing obeyed the $t^{2}$3/ law up to about five hours ageing at 6$0^{\circ}C$. The rate was slower than theses reported in case of the tensile prestrained iron. Activation energy for strain ageing has been estimated as 21.5 Kcal/mole at tile first stage of the aging process. At the second stage of ageing where the $t^{2}$3/ law is still valid, however, the activation energy was somewhat decreased. The activation energy at the first stage of ageing was about 10% larger than published results on the tensile-prestraining. This difference between the activation energies is explained in terms of the residual stress field in lattice.

• Composites Research
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• v.36 no.4
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• pp.246-252
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• 2023

A secondary barrier made of glass fiber reinforced composites has been installed infinitely using automatic bonding machine(ABM) in membrane type LNG cargo containment system (CCS). At the same time, significant thermal stress due to cryogenic heat shrinkage has occurred in the composite on the non-bonding area between the adhesive fixation at both ends. There have been studies from the perspective of structural safety evaluation taking this into account, but none that have analyzed mechanical property taking an prolonged length into account. In this study, 2-parameter Weibull distribution statistical analysis was used to standardize reliable mechanical property for actual length, taking into account the composite's brittle fracture of ceramic material with wide fracture strength dispersion. Related experimental data were obtained by performing uniaxial tensile tests at specific temperatures below cryogenic condition considering LNG environment. As a result, the mechanical strength increased about 1.5 times compared to -20℃ at -70℃ and initial non-linear behavior of fiber stretched was suppressed. As the temperature decreased until the cryogenic, the mechanical strength continued to increase due to cold brittleness. The suggested mechanical property in this study would be employed to secure reliable analysis support material property when assessing the safety of secondary barrier's structures.