• Title/Summary/Keyword: 재료 제거율

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Analysis of Material Removal Rate of Glass in MR Polishing Using Multiple Regression Design (다중회귀분석을 이용한 BK7 글래스 MR Polishing 공정의 재료 제거 조건 분석)

  • Kim, Dong-Woo;Lee, Jung-Won;Cho, Myeong-Woo;Shin, Young-Jae
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.2
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    • pp.184-190
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    • 2010
  • Recently, the polishing process using magnetorheological fluids(MR fluids) has been focused as a new ultra-precision polishing technology for micro and optical parts such as aspheric lenses, etc. This method uses MR fluid as a polishing media which contains required micro abrasives. In the MR polishing process, the surface roughness and material removal rate of a workpiece are affected by the process parameters, such as the properties of used nonmagnetic abrasives(particle material, size, aspect ratio and density, etc.), rotating wheel speed, imposed magnetic flux density and feed rate, etc. The objective of this research is to predict MRR according to the polishing conditions based on the multiple regression analysis. Three polishing parameters such as wheel speed, feed rates and current value were optimized. For experimental works, an orthogonal array L27(313) was used based on DOE(Design of Experiments), and ANOVA(Analysis of Variance) was carried out. Finally, it was possible to recognize that the sequence of the factors affecting MRR correspond to feed rate, current and wheel speed, and to determine a combination of optimal polishing conditions.

Removal of Heavy Metal Ions Using Wood Charcoal and Bark Charcoal (목탄 및 수피탄의 중금속 이온 제거)

  • Jo, Tae-Su;Lee, Oh-Kyu;Choi, Joon-Weon
    • Journal of the Korean Wood Science and Technology
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    • v.35 no.4
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    • pp.29-37
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    • 2007
  • To evaluate the effect of carbonization temperature of charcoal on the heavy metal adsorption property, Quercus mongolica wood and Larix kaempferi bark powder (100~60 mesh) were carbonized at between 400 and $900^{\circ}C$ at intervals of $100^{\circ}C$. In the properties of carbonized materials which affect the adsorption ability, pH increased with increasing the carbonization temperature, so that the pHs of wood and bark charcoal carbonized at $900^{\circ}C$ were 10.8 and 10.4, respectively. Also, in both materials, the carbon content ratio became larger as the carbonization temperature was raised. At the same carbonization temperature, carbon content ratio of the bark charcoal tended to be greater than that of the wood charcoal. In case of iodine adsorption which indicates the adsorption property in liquid phase, the wood charcoal showed higher adsorption value than the bark charcoal. From the investigation of adsorptive elimination properties of the charcoals against 15 ppm Cd, Zn, and Cu, the higher the carbonization temperature, the greater elimination ratio was. In comparison, the wood charcoal presented higher elimination ratio than that of the bark charcoal. In the wood charcoals carbonized at higher than $500^{\circ}C$, especially, 0.2 g of the charcoal was enough to eliminated almost 100% of the heavy metal ions. Heavy metal ion elimination ratio of the charcoals depended on the kinds of adsorbates. The effectiveness of adsorbates in adsorptive elimination by the charcoals were in order of Cu > Cd > Zn. This is because the physicochemical interaction between the adsorbate and adsorbent affects their adsorption properties, it is considered that subsequent researches are needed to improve the effectiveness of heavy metal adsorption by the charcoals.

Constitutive Model for Hardening Materials such as Rock or Concrete (암석이나 콘크리트와 같은 경화재료에 대한 구성모델)

  • Kang, Byung Sun
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.13 no.1
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    • pp.161-171
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    • 1993
  • The aim of this study is to provide the stress-strain behavior of hardening geological materials such as rock or concrete on three dimensional spaces by using Desai model based on plastic theory. To validate proposed model, truly triaxial tests with high pressure under variety of stress paths in which three principal stresses were controlled independently using concrete materials were performed. The main results are summerized as follows: 1. Various stress paths for hardening materials used are satisfactorily explained by performing the truly triaxial test with high pressure. This is very important to investigate constitutive equations for materials like rock or concrete. 2. Since the proposed yield function is continuous, it avoids the singularity point at the intersection of two function in the previous models, thus, reducing the difficulties for computer implementation. 3. Analytic predictions for yielding behavior on $J_1-{\sqrt{J_{2D}}}$ octahedral and triaxial plane, as well as volumetric strain and stress-strain behavior agree well with experimental results.

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Study on Preparation of High - Efficiency Filter Media for Cabin Filters Optimization of the Filter Component Materials - (고효율 캐빈필터여재 제조에 관한 연구(I) - 필터구성재료 최적화중심 -)

  • Son, Eun-Jong;Shin, Yu-Shik;Bae, Ggot-Ha-Yan;Jo, Yong-Seok
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2012.03a
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    • pp.56-56
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    • 2012
  • 본 연구는 가정용 및 산업용 유해가스제거용 필터여재의 제조에 관한 것으로 핫멜트(hot-melt) 분사 시스템에 의한 다층구조의 부직포와 활성탄 등의 흡착물질로 구성되는 샌드위치 복합시트 및 필터여 재의 제조에 사용되는 구성재료의 최적화에 관한 연구이다. 스프레이 본딩 시스템에 의한 공정은 종래의 유해가스제거용 필터 미디어의 제조하는 방법인 활성탄과 바인더 역할을 하는 핫멜트 수지를 혼합하여 부직포 원단에 도포하여 활성탄을 부착시키는 공정에 비해 도포되는 핫멜트 수지의 양이 감소에 의한 생산비절감과 충분한 활성탄 도포에 의한 기능성 향상 등에 의해 유해가스 포집율을 높일 수 있으며 공정 이후 스프레이에 의해 도포된 핫멜트수지의 자연건조 방식에 의한, 열원이 불필요하며, 에너지가 절감되며, 속도 향상에 의한 생산성 향상, 분진발생 최소화로 인한 제조현장의 환경개선이 가능할 것으로 사료된다. 1차적으로 본 연구의 필터제조의 최적화를 위해서 스프레이 본딩시스템에 효율적으로 사용가능한 다양한 수지를 검토하였으며, 기존 외산 캐빈필터여재의 미세구조 및 성능특성, 다양한 활성탄의 흡착성능검토, 사용 가능한 여재의 특성분석을 통해 다층구조의 필터 여재에 사용 가능한 구성재료의 최적화에 중심을 두었다.

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Deodorization of H2S, CH3SH in Soil Filter Reactors Packed with Montmorillonites, Rice Hulls and Thickening-activated Sludge (Montmorillonites, 왕겨 및 농축활성슬러지를 충진한 토양상에서의 H2S, CH3SH의 제거)

  • Kim, Hwan-Gi;Park, Chan-Soo
    • Journal of Korean Society of Environmental Engineers
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    • v.22 no.1
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    • pp.43-52
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    • 2000
  • Deodorization characteristics and removal rate of sulfur-containing odor have been investigated in the soil filter reactors packed with montmorillonites (Mont.), rice hulls(Rh.), and thickening-activated sludge(Ts.). And variation of pH and $SO_4{^{2-}}$ with the removal of malodorous sulfur compounds have been investigated together. As compared removal rate of montmorillonites between wet and dry condition for sulfur compounds through batch test, it showed that wet condition was better than dry one; removal ratio, as wet/dry, was $H_2S$ of 1.2 and $CH_3SH$ of 1.9, and decrease of pH and increase of $SO_4{^{2-}}$ concentration in the wet condition also showed to be larger than in dry condition. In continuous test for biological deodorization experiment, removal rate of sulfur compounds in reactor packed with Mont., Rh. and Ts, was more than 98 %, and the variation of static pressure was maintained stably under condition of SV $150h^{-1}$, LV 4.2 mm/sec and SV $200h^{-1}$, LV 5.6 mm/sec, and in reactor packed with Mont. and Rh., $H_2S$ was 76.4 % to 87.2 % and $CH_3SH$ was 87.8 % to 93.3 % under the same condition. From above results, it ascertained that it can obtain the high deodorization efficiency by inoculating thickening-activated sludge in soil filter using montmorillonites.

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Mechanical Strength Characteristics of Fiber Bragg Gratings with Fabrication Process (광섬유 브래그 격자의 제작 방법에 따른 기계적 강도 특성)

  • Park S. O.;Kim C. G.;Kang D. H.
    • Composites Research
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    • v.18 no.1
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    • pp.16-22
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    • 2005
  • Application fields on structural health monitoring of fiber Bragg gratings (FBGs) are gradually expanded even to a primary structure as well as a secondary structure and a specimen. For the reason, verification for the reliability of FBGs such as signal characteristics and mechanical strength becomes much more important. In this study, mechanical strength characteristics of FBGs with their fabrication process and reflectivity are investigated with various grating lengths. From the results of tension tests, it is shown that the mechanical strength of optical fibers decreases about $50\%$ just by jacket stripping and the amount of decrease is dependent on stripping methods. About $55\%$ of mechanical strength of stripped optical fibers decreases if gratings are formed in the core and it is regardless of grating lengths and reflectivity. However, the width of strength distribution increases relative to increases in reflectivity.

The CH3CHO Removal Characteristics of Lightweight Aggregate Concrete with TiO2 Spreaded by Low Temperature Firing using Sol-gel Method (Sol-gel법으로 이산화티탄(TiO2)을 저온소성 도포시킨 경량골재콘크리트의 아세트알데히드(CH3CHO) 제거 특성)

  • Lee, Seung Han;Yeo, In Dong;Jung, Yong Wook;Jang, Suk Soo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.31 no.2A
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    • pp.129-136
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    • 2011
  • Recently studies on functional concrete with a photocatalytic material such as $TiO_2$ have actively been carried out in order to remove air pollutants. The absorbtion of $TiO_2$ from those studies is applied by it being directly mixed into concrete or by suspension coated on the surface. When it comes to the effectiveness, the former process is less than that of the latter compared with the $TiO_2$ use. As a result, the direct coating of $TiO_2$ on materials' surface is more used for effectiveness. The Surface spread of it needs to have a more than $400^{\circ}C$ heat treat done to stimulate the activation and adhesion of photocatalysis. Heat treat consequently leads hydration products in concrete to be dehydrated and shrunk and is the cause of cracking. The study produces $TiO_2$ used Sol-gel method which enables it to be coated with a low temperature treat, applies it to pearlite using Lightweight Aggregate Concrete fixed with a low temperature treat and evaluates the spread performance of it. In addition to this, the size of pearlite is divided into two types: One is 2.5 mm to 5.0 mm and the other is more than 5.0 mm for the benefit of finding out the removal characteristics of $CH_3CHO$ whether they are affected by pearlite size, mixing method and ratio with $TiO_2$ and elapsed time. The result of this experiment shows that although $TiO_2$ produced by Sol-gel method is treated with 120 temperature, it maintains a high spread rate on the XRF(X ray Florescence) quantitative analysis which ranks $TiO_2$ 38 percent, $SiO_2$ 29 percent and CaO 18 percent. In the size of perlite from 2.5 mm to 5.0 mm, the removal characteristic of $CH_3CHO$ from a low temperature heated Lightweight concrete appears 20 percent higher when $TiO_2$ with Sol-gel method is spreaded on the 7 percent of surface. In other words, the removal rate is 94 percent compared with the 72 percent where $TiO_2$ is mixed in 10 percent surface. In more than 5.0 mm sized perlite, the removal rate of $CH_3CHO$, when $TiO_2$ is mixed with 10 percent, is 69 percent, which is similar with that of the previous case. It suggests that the size of pearlite has little effects on the removal rate of $CH_3CHO$. In terms of Elapsed time, the removal characteristic seems apparent at the early stage, where the average removal rate for the first 10 hours takes up 84 percent compared with that of 20 hours.

Polishing Behavior and Characterization of Cu Surface in Citric Acid based Slurry with Corrosion Inhibitor (BTA) (부식방지제(BTA)가 첨가된 Cu CMP 슬러리에서의 연마거동과)

  • Kim, In-Kwon;Kang, Young-Jae;Hong, Yi-Kwan;Kim, Tae-Gon;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.42-43
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    • 2005
  • 본 연구에서는 Cu 슬러리에 부식방지제인 BTA를 첨가하여 슬러리내의 과수의 농도, pH 의 변화, 연마입자의 종류에 따라 연마거동에 미치는 영향과 각 chemical 변화에 따른 Cu surface의 변화를 살펴보았다. BTA (Benzotriazole, $C_6H_4C_3H$)를 첨가함으로써 본 연구에서 시행된 pH 와 과수의 변화에 상관없이 Cu-BTA film을 형성하여 Cu의 dissolution을 최대한 억제하는 것을 확인할 수 있었다. 또 그로인해 BTA를 첨가하지 않았을 때보다 얇은 passivation layer를 형성함을 알 수 있었고 contact angle도 더 높았다. 연마율의 경우에도 BTA가 첨가됨으로써 감소됨을 확인할 수 있었고 연마입자로 alumina particle을 사용한 경우에는 pH6, 과수 10vol%이상에서는 오히려 연마율이 증가하였다. fumed silica의 경우에는 hardness가 작아 mechanical적인 제거력이 낮아 BTA가 첨가되어도 연마율에는 큰 영향이 없었다.

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Fatigue Properties of $Pb(Zr,Ti)O_3$ Thin Film Capacitor by Cleaning Process in Post-CMP (CMP 공정후 세정공정 여부에 따른 $Pb(Zr,Ti)O_3$ 박막 캐패시터의 피로 특성)

  • Jun, Young-Kil;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.139-140
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    • 2006
  • PZT박막은 비휘발성 재료로 유전율이 높고 항전력이 작으면서 잔류 분극랑이 크기 때문에 적합한 특성을 가지고 FeRAM에 매력적인 물질이다. CMP(chemical mechanical polishing)는 기존의 회생막의 전면 식각 공정과는 달리 특정 부위의 제거 속도를 조절함으로써 평탄화 하는 기술로 wafer 전면을 회전하는 탄성 패드 사이에 액상의 Slurry를 투입하여 연마하는 기술이다. 본 논문에서는 CMP 공정으로 제조한 PZT박막 캐패시터에서 CMP 후처리공정(세척)의 유무 및 종류에 따라 피로특성에 대하여 연구하였다, PZT 박막의 캐패시터의 피로 특성을 연구한 결과 CMP 후처리공정 SC-l용액을 사용하여 세정공정을 하였을때 가장 향상된 PZT 캐패시터의 피로특성이 나타났다.

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A Study on the Electrochemical Mechanism using Liner Sweep Voltammetry (LSV) Method (LSV법을 이용한 전기화학적 메커니즘 연구)

  • Lee, Young-Kyun;Han, Sang-Jun;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.164-164
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    • 2008
  • 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 최근 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결하고자, 본 논문에서는 Cu 표면에 Passivation layer를 형성 및 제거하는 개념으로 공정시 연마제를 사용하지 않으며, 낮은 압력조건에서 공정을 수행하기 위해, 전해질의 농도 변화에 따른 Liner sweep voltammetry 법을 사용하여 전압활성화에 의한 전기화학적 반응이 Cu전극에 어떤 영향을 미치는지 연구하였으며, 표면 조성을 알아보기 위하여 Energy Dispersive Spectroscopy (EDS) 분석을 하였고, Cu disk의 결정성과 배향성 관찰을 위해 X-Ray diffraction (XRD)로 금속 표면을 비교하여 실험 결과로 얻어진 데이터를 통하여 ECMP 공정에 적합한 전해액 선정과 농도를 선택하였다.

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