• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2009.05a
• /
• pp.264-265
• /
• 2009

본 연구에서 유도결합 플라즈마 식각 장치외 $BCl_3/Ar/Cl_2$ 가스 혼합비를 이용하여 ZnO 박막을 식각 하였을 때, 식각 된 ZnO 박막의 표면 반응에 관하여 관찰하였다. ZnO 박막의 식각 실험 조건은 RF 전력 700 W, 직류바이어스 전압 - 150 V, 공정 압력 15 mTorr로 고정하였고, $Cl_2/(Cl_2+BCl_3+Ar)$ 가스 혼합비를 변경하면서 식각 실험을 수행하였다. $Cl_2$ 가스가 3 sccm 일 때, ZnO 박막의 식각속도는 53 nm/min으로 가장 높았으며, 이때 ZnO 박막에 대한 $SiO_2$의 선택비는 0.89 이었다. 식각된 ZnO 박막의 표면은 XRD (X-ray diffraction)와 AFM(atomic force microscopy)를 이용하여 결정상의 변화와 표면의 거칠기를 분석하였다. AFM 분석 결과에서 Ar, $BCl_3$와 $Cl_2$ 플라즈마를 이용하여 식각된 시료의 표면 거칠기 근 값이 식각전의 시료나 $BCl_3/Ar/Cl_2$ 플라즈마로 식각된 시료보다 큰 것을 확인하였다. 이는 식각된 시료에서의 Zn 양의 감소나 비휘발성 식각 잔류물에 의한 영향으로 판단된다. SIMS(secondary ion mass spectrometery) 분석을 통해 검증 하였다.

• 한국신재생에너지학회:학술대회논문집
• /
• 2006.06a
• /
• pp.419-423
• /
• 2006

Basic studies on natural gas hydrates in the East Sea were been carried out by the Korea Institute of Geoscience and Mineral Resources (KIGAM) from 2000 to 2004 involving 2D multichannel seismic lines and piston coring. 27 piston cores recovered from the deed-water Ulleung Basin of the East Sea were analyzed in this study. In piston cores cracks generally developed parallel to bedding suggest significant gas content. The core analyses showed high total organic carbon (TOC) content, sedimentation rate and heat flow of sediments. The cores recovered from the southern study area show also high residual hydrocarbon gas concentrations for the formation of natural gas hydrates. This study indicates that there is the potential for the generation of biogenic gas and the formation of natural gas hydrates in the near seafloor sediments of the study area.

• Journal of the Korean Institute of Gas
• /
• v.5 no.4 s.16
• /
• pp.85-91
• /
• 2001

This paper presents safety analysis of LNG leakage in a prestressed concrete outer tank, which is strongly related on the leak checking effects of the PC structure with and without a residual compression zone based on the BS 7777 codes. The full containment type outer tank which is constructed by a prestressed concrete may be destroyed by leaked cryogenic fluids. The FE calculated results show that the total leak checking time of the PC structure with $10\%$ residual compression zone is about 9 days for $-162^{\circ}C$ liquids. But, three primary pumps in an inner tank may operate to send cryogenic fluids for 6 days, which are stored in an inner tank of $140,000m^3$ capacity This means that the prestressed concrete outer tank may be safe for $-162^{\circ}C$ cryogenic fluids leaked from the demolished inner tank.

• Membrane Journal
• /
• v.24 no.3
• /
• pp.223-230
• /
• 2014

A numerical analysis was performed for concentration of methane from the biogas using a polysulfone hollow fiber membrane permeator. Governing equations were derived for the countercurrent flow and numerically solved by using the Compaq Visual Fortran 6.6 software. When the methane mole fraction of feed was 0.5, the mole fraction of retentate increased from 0.5 to 0.8; the normalized retentate flow rate to the feed flow rate decreased from 1.0 to 0.57 at the given typical operating condition as the feed gas flowed from the inlet to the outlet of the membrane. As the methane mole fraction of feed was changed to 0.9, the methane mole fraction of retentate became 0.93 and the normalized retentate flow rate was changed to 0.91. When the pressure ratio of the permeate to the feed was varied from 0.33 to 0.17, there was a little difference in the methane mole fraction of retentate for the low stage cut of 0.1, whereas there was an significant increment for the high stage cut of 0.3. The retentate methane mole fraction remained relatively high despite the change of a stage cut as the area of the membrane increased from $1.14m^2$ to $2.57m^2$.

• The Journal of the Petrological Society of Korea
• /
• v.18 no.4
• /
• pp.279-291
• /
• 2009

Radon is a natural radionuclide originated from radioactive decay of radium in rocks and soil. It is colorless, odorless and tasteless elements that mainly distributed as gaseous phase in soil pore space. The present study analyzed the characteristics of long-term radon variation in granitic residual soil at Mt. Guemjeong in Guemjeong-gu, Busan and determined the effects of atmospheric temperature, rainfall and soil temperature and moisture. Periodic measurements of radon concentrations in soil gas were conducted by applying two types of in-situ monitoring methods (chamber system and tubing system). Radon concentration in soil gas was highest in summer and lowest in winter. The variations in soil temperature and atmospheric temperature were most effective factors in the long-term radon variations and showed positive co-relations. The air circulation between soil air and atmosphere by the temperature difference between soil and atmosphere was analyzed a major cause of the variation. However, other factors such as atmospheric pressure, rainfall and soil moisture were analyzed relatively less effective.

• Journal of Korean Society of Environmental Engineers
• /
• v.30 no.5
• /
• pp.552-559
• /
• 2008

Three dimensional numerical analysis were performed to investigate the combustion characteristics in a tangentially fired pulverized coal boiler. The predicted values at the outlet of economizer for the gas temperature, O$_2$, NO, CO were been compared with the measured data. By using the actual operating conditions of the power plant, the distribution of velocity, gas temperature, O$_2$, CO, CO$_2$ and NO as well as the particle tracking in the boiler were investigated. Throughout the present study, the non-uniform distribution of flue gas temperature in front of the final superheater might be resulted from the residual swirl flow in the upper furnace of the boiler. The present analysis on non-uniform distribution of the gas temperature could provide the useful information to prevent the frequent tube failure from happening in the final superheater of the tangentially coal-fired boiler.

• Proceedings of KOSOMES biannual meeting
• /
• 2006.11a
• /
• pp.169-174
• /
• 2006

A distinctive difference of hydrocarbon in crude oil and petroleum products exists. Depending on the origin where it comes from, crude oil shows its own unique pattern which is different from petroleum products containing characteristics according to their operating process and production period. A process of mixing behavior in a tank containing residual amounts of oil draws its own pattern when analysis is conducted. The analytical process described above is named oil fingerprint method. This study investigates an effectiveness of the method for comparing data sets produced by conventional gas chromatography with mass spectrometer (GC/MS) and comprehensive two-dimensional gas chromatography (GC X GC) which is known as powerful new technology for chemical analysis.

• Journal of the Korean Institute of Gas
• /
• v.2 no.3
• /
• pp.78-87
• /
• 1998

The mechanical properties, heat treatment and the history for the development of Ni-bearing ferritic steels for the application at low temperatures are reviewed. Ni-bearing ferritic steels are classified into $2-3\%$ Ni steels, $5.5\%$ Ni steel, $9\%$ Ni steel and $13\%$ Ni steel., of which $9\%$ Ni steels are most widely used for the large LNG storage tanks owing to their encellent fracture toughness up to $-196^{\circ}C$. The effect of retained austenite on the tensile properties and toughness was precisely discussed. As the size of LNG storage tank increases, thicker plates are needed. Thus, the recent efforts for the improvement of low temperature toughness and homogeneity are also introduced.

• Applied Chemistry for Engineering
• /
• v.22 no.1
• /
• pp.31-36
• /
• 2011

Tetrafluoromethane ($CF_4$) has been used as the plasma etching and chemical vapor deposition (CVD) gas for semiconductor manufacturing processes. However, the gas need to be removed efficiently because of their strong absorption of infrared radiation and the long atmospheric lifetime which cause global warming effects. A waterjet gliding arc plasma system in which plasma is combined with the waterjet was developed to effectively produce OH radicals, resulting in efficient destruction of $CF_4$ gas. Design factors such as electrode shape, electrode angle, gas nozzle diameter, electrode gap, and electrode length were investigated. The highest $CF_4$ destruction of 93.4% was achieved at Arc 1 electrode shape, $20^{\circ}$ electrode angle, 3 mm gas nozzle diameter, 3 mm electrode gap and 120 mm electrode length.

• Transactions of the Korean Society of Pressure Vessels and Piping
• /
• v.5 no.2
• /
• pp.20-26
• /
• 2009

The dominant incidents category for onshore and offshore natural gas transmission pipelines in the world is associated with outside forces. Incidents in the outside forces category embrace acts of nature, which typically cause widespread structural damage, as well as act of man, whose effects tend to cause dents and/or gouges localized at point of contact that are referred to as mechanical damage. Therefore, these damage types must be better addressed to avoid unnecessary and costly repairs and the possibility of catastrophic events. First of all, the characterizing features of mechanical damage in gas pipelines were evaluated by using of excavator or boring machine. There is no reliable method for evaluating the safe operating pressure of pipeline affected by mechanical damage. It is especially important to evaluate the remaining strength of damaged pipelines due to outside force. Therefore, the full scale burst tests were conducted to evaluate the remaining strength of pipe with mechanical damage that combines a dent and a gouge. This paper is supposed to provide information that will assist in developing a criterion to assess serviceability in pipelines with mechanical damage.