• Title/Summary/Keyword: 자기스퍼터링

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Sputering Pressure and Temperature Effects on Magnetization Reversal Behaviors of $Co(2\AA)/Pd(13\AA)$ Multilayers (스퍼터링압력 및 온도 효과에 의한 $Co(2\AA)/Pd(13\AA)$ 다층박막의 자화반전 거동)

  • 김성봉;정순영
    • Journal of the Korean Magnetics Society
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    • v.6 no.4
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    • pp.199-203
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    • 1996
  • To study the magnetization reversal behavior of Co/Pd multilayers, we first demagnetized the samples by the field-demagnetized method and then measured initial curves and minor loops. The coercivity and the perpendicular magnetic anisotropy were obtained from the perpendicular and parallel magnetization curves measured at different temperatures. We interpret our experimental results by applying several qualitative and semiquantative approaches. From these study, we found that the magnetization reversal behavior is dominated by the domain wall pinning for all samples and the coercivity incremental tendency can be explained by Kronmuller's formula $H_c(T)\;{\propto}\;r_0.K_u$.

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Variations of Magnetic Properties and Composition with Deposition Ratio in GdFe Thin film (GdFe 박막의 증착속도에 따른 조성 및 자기특성의 변화)

  • Choe, Yeong-Geun;Park, Chang-Man;Baek, Ju-Yeol;Lee, Gi-Am;Hwang, Do-Geun
    • Journal of the Korean Magnetics Society
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    • v.2 no.3
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    • pp.257-262
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    • 1992
  • We have studied the variations of composition and magnetic properties with deposition rate in GdFe thin films by means of DC magnetron sputtering with the enhanced complex target method. Gd atomic percent was decreased with the increase of deposite rate. It appeared the transition phenomena at 1.0 ${\AA}/s the deposition rate. Also, the deposition rate increased with input power and the sputtering efficience was proportional to the number of Gd chip. An increase of the coercivity with input power can be interpreted by the large size of Fe crystal grains. We have introduced by the diffusion guard sputtering and it was effective for reproducibility of the sample. We have measured ${\theta}_k$ with Kerr angle gauge, and could observe that the ${\theta}_k$ was little varied with input power.

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Ta Buffer Layer Effect on the Growth of Fe3O4 Thin Films Prepared by RF-sputtering (RF-스퍼터링 기법으로 제작한 Fe3O4 박막에 Ta 기저층이 미치는 효과)

  • Gook, Jihyeon;Lee, Nyun Jong;Bae, Yu Jeong;Kim, Tae Hee
    • Journal of the Korean Magnetics Society
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    • v.25 no.2
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    • pp.43-46
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    • 2015
  • $Si(100){\backslash}200nm$ $SiO_2{\backslash}5nm$ $Ta{\backslash}5nm$ $MgO{\backslash}35nm$ $Fe_3O_4$ multi-layers were prepared by using RF-sputtering and ultra-high vacuum molecular beam epitaxy (UHV-MBE) techniques. After post-annealing the multi-layers at $500^{\circ}C$ for 1 hour under the high vacuum of ${\sim}1{\times}10^{-6}Torr$, we observed ferromagnetic properties at room temperature as well as the Verwey transition which is the typical features of magnetite crystals formed. We have carried out a comparative study of the effect of Ta buffered layer on the crystallinity and magnetic properties of $Fe_3O_4$ thin films prepared under different growth and annealing conditions.

Effects of Sputtering Conditions on the Growth of Ag/CoFeB Layer on MgO(100) Substrate (MgO(100) 기판 위에 증착된 Ag/CoFeB 박막의 스퍼터링 조건에 따른 미세성장구조 변화 연구)

  • Jeon, Bo-Geon;Jeong, Jong-Ryul;Takahashi, Hirokazu;Tsunoda, Masakiyo;Takahashi, Migaku
    • Journal of the Korean Magnetics Society
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    • v.21 no.6
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    • pp.214-218
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    • 2011
  • In this study, we have systematically investigated the effect of sputtering conditions on the microstructural properties of Ag/CoFeB thin film on MgO substrate. It was found that the crystallinity and surface roughness of the Ag film strongly depends on the Ar sputtering pressure and sputtering power. Epitaxial growth of Ag(100) film on MgO(100) substrate was achieved under the sputtering conditions of high sputtering power and elevated temperature. XRR (X-ray reflectivity) and high-resolution TEM (transmission electron microscopy) measurements also revealed the interfacial roughening in the Ag/CoFeB interface due to the island structure formation and intermixing between Ag and CoFeB.

Magneto-Optical Properties of Bi-YIG Nanoparticles Dispersed in a Organic Binder (유기결합제에 분산된 Bi-YIG 나노분말의 자기 광학 특성)

  • 이재욱;오재희
    • Proceedings of the Korean Magnestics Society Conference
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    • 2002.12a
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    • pp.100-101
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    • 2002
  • 자성가넷 박막은 가시광선 영역에서 큰 값의 페러데이 회전각을 갖고, 광흡수가 적어 우수한 자기광학 특성을 나타내는 재료로 널리 알려져 있다.[1]. 또한 가넷에 Bi를 치환하면 성능지수가 크게 증가하는 것이 알려져 있으므로 현재 연구개발의 초점이 Bi치환 가넷 박막에 모아지고 있다. 가넷박막을 제조하는 방법에 있어 종래에는 스퍼터링법, LPE법, 열분해법 등으로 연구되어 왔으나, 스퍼터링법과 LPE법의 경우 공정이 복잡하고 고가의 장치가 필요한 단점이 있으며, 열분해법의 경우에는 잔존하는 일부 분해가스로 인하여 박막이 다공질화 될 우려가 있다.[2]. (중략)

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A Study on Corrosion CoCrMo Magnetic Thin Films (CoCrMo 자성박막의 부식에 관한 연구)

  • 남인탁;홍양기
    • Journal of the Korean Magnetics Society
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    • v.3 no.3
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    • pp.221-228
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    • 1993
  • The general requirements of recording media include recording performance, environmental stability, runnability on the drive or deck, and manufacturability. CoCrMo thin films were prepared using RF sputtering system for a study on chemical stability. Surface degradation of the CoCrMo thin film was studied by SEM, XPS and AES. Surface degradation was found to be dependent of sputtering condition and Mo content. Addition of Mo to CoCr thin film improved dramatically its surface degradation resistance in dilute sulfuric acid, as indicated by active-passive transition appeared in electrochemical polarization curve. Futhermore, the passive current density was decreased with increasing Mo content. The reduction in a number density of corrosion sites by Mo addition vms observed, after accelerated corrosion test. AES survey indicated that corrosion occured on the site with Cr depletion and highly concentrated chloride ions.

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A Study on the Perpendicular Magnetic Anisotropy in Co/Pd artificial Superlattices Prepared by RF Magnetron Sputtering (고주파 마그네트론 스퍼터링에 의해 형성된 Co/Pd 인공초격자의 수직자기이방성에 관한 연구)

  • Park, Ju-Uk;Ju, Seung-Gi
    • Journal of the Korean Magnetics Society
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    • v.2 no.3
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    • pp.251-256
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    • 1992
  • Artificial superlattices of Co/Pd were prepared by RF magnetron sputtering Multilayered structure and compositional modulation were analyzed with a side angle x-ray diffractometer. It has been found that expansion of Co lattice occured in this artificial superlattice due to the lattice mismatch between Co and Pd. Perpendicular magnetic anisotropy could be observed when the Co layer thickness became less than 8${\AA}$ and maximum coercivity of 2350 Oe could be obtained in [Co(2.5 ${\AA}$)/Pd(9.3 ${\AA})]_{50}$/Pd$(200\;{\AA})$ with a perfect squareness of magnetic hysteresis loop. Characteristic of perpendicular magnetic anisotropy in Co/Pd superlattices could be related to the expansion of Co lattice caused by Pd layer and it turned out that as the thickness of Pd layer increased, perpendicular magnetic anisotropy increased. The interface anisotropy energy and volume anisotropy energy were calculated to be 0.29 ergs/$cm^2$ and -$6.9{\times}10^6$ ergs/$cm^3$ respectively, which are consistent with the values reported elsewhere.

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