• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2043-2045
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• 2003

본 연구에서는 자기부상 방식의 스테이지 시스템 설계 및 제작을 행하고 시스템의 제어성능평가를 하고자 한다. 본 논문에서는 제어성능의 효율성을 향상시키기 위하여 부상체(Platen)의 기계적인 모델링을 행하고 Platen의 PTP(point to point) 및 궤도추종제어가 가능한 슬라이딩 모드제어기를 제안하였다. 제안한 슬라이딩 모드제어기는 모델링 오차 및 외란에 대해서도 강인한 제어성능을 얻을 수 있으며 수치시뮬레이션을 통하여 그 유용성을 확인하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.162-162
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• 2004

위치결정 기술은 초정밀 미세 기술의 발달과 제품의 소형화, 경량화에 대한 요구가 늘어나면서 고정밀화가 가속화되어 현재는 나노미터 수준의 위치정밀도를 요구하고 있다 현재 널리 사용되어지는 표면형상 측정기인 AFM은 분해능과 정밀도는 우수하지만, 이송 스테이지의 제한으로 측정영역이 좁은 단점이 있다. 이를 극복하기 위해서 이중서보를 사용한 방식들이 많이 제안되어 왔고 단일 서보를 사용하는 방식들도 연구되고 있다. 하지만 이중서보 방식은 여러 가지 액츄에이터와 컨트롤러를 사용해야하므로 제어알고리즘과 시스템이 복잡해지는 단점을 가지고 있다.(중략)

• Journal of Advanced Marine Engineering and Technology
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• v.27 no.7
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• pp.862-871
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• 2003

In this paper, we addressed a modeling for the magnetic levitation stage. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for propulsion. Therefore. this stage can generate six degrees of freedom motion by the combination of forces. We derived a mechanical dynamics equation using Lagrangian method and electromechanical dynamics equation by using Co-energy method. Based on the derived dynamics, we can analyze the stage motion that is subject to the input currents and forces.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.164-169
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• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.76-83
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• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.121-124
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• 2004

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force fer suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system. the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used fer solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage table's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1863-1872
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• 2001

In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.5 s.182
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• pp.85-92
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• 2006

Recently in the field of precision positioning device, the contact-free stages are gaining focuses with their outstanding performances by eliminating mechanical frictions. This paper presents the driving algorithm for contact-free linear stage based on switched reluctance principle. The proposed driving algorithm has a similar structure of that of switched reluctance motor but this study has its own originality in terms of reducing the normal farces and force ripple at the same time. The simulation and experiment are executed to verify the proposed algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.3
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• pp.158-164
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• 2000

In recent year, desire and request fer micro automation are growing rapidly covering the whole range of the industry. This has been caused mainly by request of more accurate manufacturing process due to a higher density of integrated circuits in semiconductor industry. This paper presents a six d.o.f fine motion stage using magnetic levitation technique, which is one of actuating techniques that have the potential for achieving such a micro motion. There is no limit in motion resolution theoretically that the magnetically levitated part over a fixed stator can realize. In addition, it Is possible to manipulate the position and the force of the moving part at the same time. Then, the magnetic levitation technique is chosen into the actuating method. However, we discuss issues of design, kinematics, dynamics, and control of the proposed system. And a few experimental results fur step input are given.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.894-897
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• 2004

In this paper, we address a position control scheme for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal forces. Dynamic equations of the stage system are derived based on Newton-Euler method and its special Jacobian matrix describing a relation between the Joint velocity and platen velocity is done. There are proposed two control schemes for positioning, which are Cartesian space controller and Joint space controller. The control performance of the Cartesian space controller is better than the Joint space controller in task space trajectory while the Joint space controller is simpler than the Cartesian space controller in controller realization.