• Title/Summary/Keyword: 입방정질화붕소

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Effect of hydrogen addition on the compressive residual stress of cubic boron nitride film (입방정 질화붕소 박막의 압축잔류응력에 미치는 수소첨가 효과)

  • Park, Jong-Geuk;Baek, Yeong-Jun;Lee, Uk-Seong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2013.05a
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    • pp.46-47
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    • 2013
  • 다이아몬드와 같은 $sp^3$ 결합을 가지며, 다이아몬드 다음으로 경도가 강한 입방정 질화붕소(cBN)는 철계금속가공에의 적합성 및 낮은 증착온도로 인하여 표면 코팅소재로의 응용이 크게 기대되어 왔다. 그러나 증착시 cBN 상의 핵생성 이전에 필연적으로 증착되는 비정질 질화붕소(aBN) 및 육방정 질화붕소(hBN) 층의 대기 하에서의 불안정성 그리고 cBN 상의 증착에 수반되는 높은 압축 잔류응력으로 인해 모재와의 밀착력이 낮아지는 문제점 등으로 인해 응용이 크게 제한되어져 왔다. 본 발표에서는 아르곤(Ar)과 질소($N_2$)를 반응가스로 이용하여 스퍼터링법으로 증착한 질화붕소에서 발생하는 높은 잔류응력의 원인과 이를 낮추기 위해 반응가스에 첨가한 수소의 효과에 대해서 상세히 고찰해 보고자 한다.

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Synthesis of Boron-Nitride Film by Plasma Assisted Chemical Vapor Deposition Using $BCl3-NH3-Ar$ Mixed Gas ($BCl3-NH3-Ar$계의 플라즈마화학증착공정을 이용한 질화붕소막의 합성)

  • 박범수;백영준;은광용
    • Journal of the Korean Ceramic Society
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    • v.34 no.3
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    • pp.249-256
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    • 1997
  • The effect of process parameter of plasma assisted chemical vapor deposition (PACVD) on the variation of the ratio between cubic boron nitride (c-BN) and hexagonal boron nitride (h-BN) in the film was in-vestigated. The plasma was generated by electric power with the frequency between 100 and 500 KHz. BCl3 and NH3 were used as a boron and nitrogen source respectively and Ar and hydrogen were added as a car-rier gas. Films were composed of h-BN and c-BN and its ratio varied with the magnitude of process parameters, voltage of the electric power, substrate bias voltage, reaction pressure, gas composition, sub-strate temperature. TEM observation showed that h-BN phase was amorphous while crystalline c-BN par-ticle was imbedded in h-BN matrix in the case of c-BN and h-BN mixed film.

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The Grinding Characteristics of 5 kind metals for CBN Wheel (CBN휠에 의한 5종 재료의 연삭 특성 비교)

  • 원종호;김건희;안병민;박순섭;이진오
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.925-929
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    • 2001
  • Ultra-abrasives such as diamond and CBN have used to maintain accuracy and form deviation for superalloy etc. This study contains the dry cylindrical grinding of metals with Vitrified-bond CBN wheel and Resinoid-bond CBN wheel. For various conditions of grinding speed, workpiece speed, grinding depth and feed speed of table, the grinding resistance, the surface roughness, and the material removal are measured and discussed.

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A study Grinding Characteristic of CBN Wheel (CBN 휠의 연삭특성에 관한 비교연구)

  • 안병민;원종호;김건희
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2001.04a
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    • pp.315-320
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    • 2001
  • Ultra-abrasives such as diamond and CBN have used to maintain accuracy and form deviation for superalloy etc. This study contains the dry cylindrical grinding of metals with Vitrified-bond CBN wheel and Resinoid-bond CBN wheel. For various condition of grinding speed, workpiece speed, grinding depth and feed speed of table, the grinding resistance, the surface roughness, and material removal are measured and discussed.

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Electrochemical Deburring System by the Electroplated CBN Wheel (입방정질화붕소입자 전착지석에 의한 전해디버링 시스템)

  • Choe, In-Hyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.21 no.3
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    • pp.430-438
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    • 1997
  • Deburring and edge finishing technology as the final process of machining operation is required for manufacturing of advanced precise conponents. But, deburring is considered as a difficult problem on going to the high efficient production and automation in the FMS. Removal of burr couldn't have a standard of its definition because of its various shapes, dimensions and properties and mostly depends on manual treatment. Especially, deburring for cross hole inside is very difficult owing to its shape passing through out perpendicular to a main hole. The electrochemical method is suggested as its solution in practical aspect. Therefore, electrochemical deburring technology needs to be developed for the high efficiency and automation of internal deburring in the cross hole. In this study, the new process in the eliminating burr inside cross hole, electrochemical deburring by the wheel electroplated with Cubic-Boron-Nitrade abrasives, is suggested. Its deburring mechanism is described and machining performances is investigated. Also, CBN electroplated wheel is designed and manufactured and then characteristics of electrochemical deburring are investigated through experiments. Overall electrochemical deburring performance against burr inside cross hole is examined in the various power sources such as peak current and direct current.

Electrochemical Deburring System by the Electroplated CBN Wheel (입방정질화붕소입자 전착지석에 의한 전해디버링 시스템)

  • 최인규;김정두
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1996.04a
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    • pp.19-23
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    • 1996
  • Deburring and edge finishing technology as the last process of machining operation is required for manufacturing of advanced procesion components, duburring has treated as a difficult problem on going tothe highefficency, automation in the FMS. Removal of butt with various shapes, dimensions and properties coultn't has a standard and has depended on manual treatment. Especially, deburring for cross hole inside owing to passing through out perpendicular to a main hole is more difficult, the electrolytic method is proper as its solution at practical aspects. Therefore, for the high effciency and automation of intermal deburring in the cross hole, development of electrolytic debutting technology is needed. So, the new process in the burr treatment is supposed. In this study, in the eliminating burr inside cross hole, the principle and machining performances of electrochemical deburring by Cubic-Boron-Nitrade abrasive electroplate wheel are investigated, Design and manufacture of CBN electroplated wheel and analysis of characteristics with electrolytic debutting are achieved. Also deburring efficiency and electrolytic performance for cross hole were examined according to electrolytic current and electrolytic deburring condition corresponding to acquired edge quality was found out.

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Evaluation of Surface Roughness add Grinding Force Using CBN Wheel (CBN 숫돌을 이용한 연삭에서 표면거칠기와 연삭력 평가)

  • Ha, Man-Kyung;Kwak, Jae-Seob;Lee, Young-Suk;Koo, Yang;Yoon, Moon-Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.2
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    • pp.58-64
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    • 2002
  • In these days, according to increasing the technical development, the dimension of a product goes up for ultra-precision. For the net shape manufacturing, grinding is a important process that influences directly the accuracy and the integrity of produced products. In this study, an experimental evaluation was carried out. Workpiece materials were used STD11, SUS304, and STB2 in accordance with varing condition of feedrate and depth of cut. From measuring the grinding force and the surface roughness, material characteristics of grinding by using CBN wheel were examined.

Machining Characteristics of Ni-based Heat Resisting Alloy (니켈기 초내열합금의 절삭성에 관한 연구)

  • 강신호;김대은
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.4
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    • pp.27-35
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    • 1998
  • Ni-based heat resisting alloys are commonly used for high temperature applications such as in aircraft engines and gas turbines. In this work, the machinability of Nimonic 263 alloy is investigated with respect to optimum tool type and cutting conditions for both continuous and discontinuous machining as well as weld region. Among the five types of tools tested, K25 tool experienced the least of damage in machining the weld region. Furthermore, despite their superior high temperature hardness, Si-Al-O-N and CBN tools peformed poorly in machining Nimonic 263.

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