• 제목/요약/키워드: 입방정질화붕소

검색결과 30건 처리시간 0.031초

입방정 질화붕소 박막의 압축잔류응력에 미치는 수소첨가 효과 (Effect of hydrogen addition on the compressive residual stress of cubic boron nitride film)

  • 박종극;백영준;이욱성
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2013년도 춘계학술대회 논문집
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    • pp.46-47
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    • 2013
  • 다이아몬드와 같은 $sp^3$ 결합을 가지며, 다이아몬드 다음으로 경도가 강한 입방정 질화붕소(cBN)는 철계금속가공에의 적합성 및 낮은 증착온도로 인하여 표면 코팅소재로의 응용이 크게 기대되어 왔다. 그러나 증착시 cBN 상의 핵생성 이전에 필연적으로 증착되는 비정질 질화붕소(aBN) 및 육방정 질화붕소(hBN) 층의 대기 하에서의 불안정성 그리고 cBN 상의 증착에 수반되는 높은 압축 잔류응력으로 인해 모재와의 밀착력이 낮아지는 문제점 등으로 인해 응용이 크게 제한되어져 왔다. 본 발표에서는 아르곤(Ar)과 질소($N_2$)를 반응가스로 이용하여 스퍼터링법으로 증착한 질화붕소에서 발생하는 높은 잔류응력의 원인과 이를 낮추기 위해 반응가스에 첨가한 수소의 효과에 대해서 상세히 고찰해 보고자 한다.

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$BCl3-NH3-Ar$계의 플라즈마화학증착공정을 이용한 질화붕소막의 합성 (Synthesis of Boron-Nitride Film by Plasma Assisted Chemical Vapor Deposition Using $BCl3-NH3-Ar$ Mixed Gas)

  • 박범수;백영준;은광용
    • 한국세라믹학회지
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    • 제34권3호
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    • pp.249-256
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    • 1997
  • 100-500KHz범위의 주파수전원을 인가하여 발생한 플라즈마를 이용하여 질화붕소(boron nitride)막의 합성시 육방정상(hexagonal phase)과 입방정상(cubic phase)의 생성거동을 관찰하였다. BCl3와 NH3를 붕소와 질소의 공급기체로 선택하였고 Ar과 수소를 carrier기체로 사용하였다. 합성변수로는 플라즈마전원의 전압, 기판의 bias, 합성압력, 기체의 조성, 기판의 온도이었는데, 합성된 박막은 FT-IR결과로부터 육방정과 입방정의 혼합상으로 나타났고, 각 상의 분률은 변수의 크기에 의존하였다. TEM분석결과 육방정으로만 구성된 박막은 비정질상으로 이루어졌으며, 입방정과 육방정의 혼합상의 경우는 비정질기지상에 수십 nanometer크기의 입방정입자가 분산된 구조를 하고 있었다.

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CBN휠에 의한 5종 재료의 연삭 특성 비교 (The Grinding Characteristics of 5 kind metals for CBN Wheel)

  • 원종호;김건희;안병민;박순섭;이진오
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2001년도 춘계학술대회 논문집
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    • pp.925-929
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    • 2001
  • Ultra-abrasives such as diamond and CBN have used to maintain accuracy and form deviation for superalloy etc. This study contains the dry cylindrical grinding of metals with Vitrified-bond CBN wheel and Resinoid-bond CBN wheel. For various conditions of grinding speed, workpiece speed, grinding depth and feed speed of table, the grinding resistance, the surface roughness, and the material removal are measured and discussed.

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CBN 휠의 연삭특성에 관한 비교연구 (A study Grinding Characteristic of CBN Wheel)

  • 안병민;원종호;김건희
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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    • pp.315-320
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    • 2001
  • Ultra-abrasives such as diamond and CBN have used to maintain accuracy and form deviation for superalloy etc. This study contains the dry cylindrical grinding of metals with Vitrified-bond CBN wheel and Resinoid-bond CBN wheel. For various condition of grinding speed, workpiece speed, grinding depth and feed speed of table, the grinding resistance, the surface roughness, and material removal are measured and discussed.

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입방정질화붕소입자 전착지석에 의한 전해디버링 시스템 (Electrochemical Deburring System by the Electroplated CBN Wheel)

  • 최인휴
    • 대한기계학회논문집A
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    • 제21권3호
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    • pp.430-438
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    • 1997
  • Deburring and edge finishing technology as the final process of machining operation is required for manufacturing of advanced precise conponents. But, deburring is considered as a difficult problem on going to the high efficient production and automation in the FMS. Removal of burr couldn't have a standard of its definition because of its various shapes, dimensions and properties and mostly depends on manual treatment. Especially, deburring for cross hole inside is very difficult owing to its shape passing through out perpendicular to a main hole. The electrochemical method is suggested as its solution in practical aspect. Therefore, electrochemical deburring technology needs to be developed for the high efficiency and automation of internal deburring in the cross hole. In this study, the new process in the eliminating burr inside cross hole, electrochemical deburring by the wheel electroplated with Cubic-Boron-Nitrade abrasives, is suggested. Its deburring mechanism is described and machining performances is investigated. Also, CBN electroplated wheel is designed and manufactured and then characteristics of electrochemical deburring are investigated through experiments. Overall electrochemical deburring performance against burr inside cross hole is examined in the various power sources such as peak current and direct current.

입방정질화붕소입자 전착지석에 의한 전해디버링 시스템 (Electrochemical Deburring System by the Electroplated CBN Wheel)

  • 최인규;김정두
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.19-23
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    • 1996
  • Deburring and edge finishing technology as the last process of machining operation is required for manufacturing of advanced procesion components, duburring has treated as a difficult problem on going tothe highefficency, automation in the FMS. Removal of butt with various shapes, dimensions and properties coultn't has a standard and has depended on manual treatment. Especially, deburring for cross hole inside owing to passing through out perpendicular to a main hole is more difficult, the electrolytic method is proper as its solution at practical aspects. Therefore, for the high effciency and automation of intermal deburring in the cross hole, development of electrolytic debutting technology is needed. So, the new process in the burr treatment is supposed. In this study, in the eliminating burr inside cross hole, the principle and machining performances of electrochemical deburring by Cubic-Boron-Nitrade abrasive electroplate wheel are investigated, Design and manufacture of CBN electroplated wheel and analysis of characteristics with electrolytic debutting are achieved. Also deburring efficiency and electrolytic performance for cross hole were examined according to electrolytic current and electrolytic deburring condition corresponding to acquired edge quality was found out.

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CBN 숫돌을 이용한 연삭에서 표면거칠기와 연삭력 평가 (Evaluation of Surface Roughness add Grinding Force Using CBN Wheel)

  • 하만경;곽재섭;이영석;구양;윤문철
    • 한국정밀공학회지
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    • 제19권2호
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    • pp.58-64
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    • 2002
  • In these days, according to increasing the technical development, the dimension of a product goes up for ultra-precision. For the net shape manufacturing, grinding is a important process that influences directly the accuracy and the integrity of produced products. In this study, an experimental evaluation was carried out. Workpiece materials were used STD11, SUS304, and STB2 in accordance with varing condition of feedrate and depth of cut. From measuring the grinding force and the surface roughness, material characteristics of grinding by using CBN wheel were examined.

니켈기 초내열합금의 절삭성에 관한 연구 (Machining Characteristics of Ni-based Heat Resisting Alloy)

  • 강신호;김대은
    • 한국정밀공학회지
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    • 제15권4호
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    • pp.27-35
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    • 1998
  • Ni-based heat resisting alloys are commonly used for high temperature applications such as in aircraft engines and gas turbines. In this work, the machinability of Nimonic 263 alloy is investigated with respect to optimum tool type and cutting conditions for both continuous and discontinuous machining as well as weld region. Among the five types of tools tested, K25 tool experienced the least of damage in machining the weld region. Furthermore, despite their superior high temperature hardness, Si-Al-O-N and CBN tools peformed poorly in machining Nimonic 263.

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