• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.270-270
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• 2003

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.228.2-228.2
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.262-262
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.516-519
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• 2002

In this paper, a new type of inchworm motion actuator is introduced. This is consisted of two piezoelectric ceramics; one is for moving the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the system is good enough for the high precision motion. Since the system is more compact than the conventional system using three piezoelectric ceramics, it is applicable fur the micro-machine or MEMS. However, the effort for reducing the vibration, velocity discrepancy in the motion direction, and compensating the hysteresis behavior is additionally needed.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.843-848
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• 2000

In general, inchworm actuators are composed of two clamping piezoelectric elements and one expansion piezoelectric element. In this paper, two electromagnetic clampers are used for higher speed and high load. Dynamic equation is derived to simulate the behavior of the inchworm actuator with electromagnets. Electromagnetic clamper is used to improve the performance of the inchworm actuator. The electromagnetic clamper is composed of two permanent magnets and one traditional electromagnet. The permanent magnets play the role of the source of magnetic field to make clamping force higher, and the electromagnet is to change the mode between clamping and free. The driving voltage profile is also analyzed to improve the speed of inchworm actuator. The real system was manufactured and experimented to find dynamic characteristics and the maximum speed is obtained. Dynamic model is verified by comparing with experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1041-1044
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• 2002

Inchworm linear motor is one of the ultra precision position apparatuses and has many kinds of forms and structures according to the conditions of working space and range. In this paper, the Inchworm linear motor consists of three PZTs(Piezo-electric transducer), three columns ma two plates. finite element method was used to determine the type or hinges installed in column of inchworm linear motor DOE(Design of experiment) was used to determine the optimal design condition of a column by comparing the von-mises stresses according to the change of thickness of hinge, round of hinge, height of arm, angle of v-notch, round of v-notch and thickness of column. From the result, round of hinge, height of arm and thickness of hinge were determined a effective design parameters.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.87-88
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.319-320
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• 2013

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.770-771
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• 2010

• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.81-88
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• 2007

This paper presents the development of a new inchworm actuation system using the shearing deformation of the piezoelectric actuators. In this new actuation system, piezoelectric shearing/expanding actuators, an inertial mass and an advanced preload system are configured innovatively to generate the motion of an inertial mass. There are two modes in the new actuation system: (1) stick mode, and (2) clamp mode. In stick mode, the deformation of the piezoelectric shearing actuators drives an inertial mass by means of the friction force at their contact interface. On the other hand, in clamp mode, the piezoelectric expanding actuators provide the gripping force to an inertial mass and, as a result, eliminate its backward motion following the rapid backward deformation of the piezoelectric shearing actuators. To investigate the feasibility of the proposed new actuation system, the experimental system is built up, and the static performance evaluation and dynamic analysis are conducted. The open-loop performance of the linear motion of the proposed new actuation system is evaluated. In dynamic analysis, the mathematical model for the contact interface is established based on the LuGre friction model and the equivalent parameters are identified.