• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.8
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• pp.44-50
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• 2019

CMP is the most critical process in the manufacture of silicon wafers, and the use of retaining rings, which are consumable parts used in CMP equipment, is increasingly important. Since the retaining ring is made of plastic, it is not only weak in strength but also has the problem of taking a long time for the flattening operation of the ring itself performed before the CMP process, and of the imbalance of force due to bolt tightening causing uneven wear. In order to solve this problem, the retaining ring and the insert ring are integrally used, and the flatness of the retaining ring may be affected depending on the material of the insert ring. Also, the residual stress generated in the manufacturing process of the insert ring may cause distortion of the ring, which may adversely affect the precision polishing. In this study, when the insert ring is made of Zn or STS304, the thickness variation and the flatness of the retaining ring are compared and, finally, the material removal rate is analyzed by polishing the wafer by the oxide CMP process. Through these experiments, the effects of the insert ring material on the polishing accuracy of the wafers were investigated.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.12
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• pp.6060-6065
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• 2013

Minimizing the height of the die roll is very important for maximizing the size of effective shear planes. In this study, the die roll change was investigated for the change in the amounts and clearance of the V-ring indentation. Shear analysis and experiments were conducted with the V-ring distance fixed to 2mm. Fine blanking die was applied to the die insert with different clearances. Several specimens were analyzed about the height of the die roll. As a result, the pressure of V-ring effectively inhibited the flow of materials. And the height of the die roll was lowest when the clearance between the die and punch was 1% of the material thickness.

• Transactions of Materials Processing
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• v.27 no.3
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• pp.165-170
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• 2018

In order to increase the lifetimes of cold forging dies, insert rings are generally used. In this study, an insert ring and shrunk ring of the flange upsetting die were designed for the cold forging of an automotive wheel nut. The Stress distribution occurring in the die during forging was simulated using a commercial finite element analyzing program. The effects of the fitting interference and inclined angle of the insert ring on the compressive stress of the die inside were also investigated. The simulated data were compared with the real lifetimes of the forging dies. The maximum compressive stress acting on the edge of a forging die should have the most influence on die lifetime, an idea which could help develop the die design with the longest lifetime. The design of the most optimal forging die with the longest lifetime is made possible by analyzing the maximum inner pressure and principal stress between the shrunk ring and insert ring.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.2
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• pp.373-380
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• 2020

A valve product can be over-designed or too heavy. Finite element analysis was performed using ANSYS for two and three-dimensional ball valve models, and the ball weight was reduced by optimization within the allowable design criteria. The ball is structurally safe according to the computed stress values, which are within the material's admissible stress. The weight was reduced by about 22%, and the structural safety factor was 1.25. The structural safety of the seat insert and ring, which are used to prevent leakage, was confirmed through finite element analysis. It is shown that the two-dimensional analysis can result in similar values to the three-dimensional analysis for the axisymmetric structure. The redesign of the valve is not included in the results since such changes require a whole new design process, including all valve components.