• Title/Summary/Keyword: 이중빔

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Patterning and Characterization of Co/Ni Composite Silicide using EIB (FIB를 이용한 CoNi 복합실리사이드 나노배선의 패턴가공과 형상 분석)

  • Song Oh-Sung;Kim Sang-Yeob;Jung Yoon-Ki
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.3
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    • pp.332-337
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    • 2006
  • We prepared 100 nm-thick CoNi composite silicide on a 70 nm-thick polysilicon substrate. Composite silicide laye.s were formed by rapid thermal annealing(RTA) at the temperatures of $700^{\circ}C,\;900^{\circ}C,\;1000^{\circ}C$ for 40 seconds. A Focused ion beam (FIB) was used to make nano-patterns with the operation range of 30 kV and $1{\sim}100$ pA. We investigated the change of thickness, line width, and the slope angle of the silicide patterns by FIB. More easily made with the FIB process than with the conventional polycide process. We successfully fabricated sub-100nm etched patterns with FIB condition of 30kv-30pA. Our result implies that we may integrate nano patterns with our newly proposed CoNi composite silicides.

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Enhancement of Crystallinity and Exchange Bias Field in NiFe/FeMn/NiFe Trilayer with Si Buffer Layer Fabricated by Ion-Beam Deposition (이온 빔 증착법으로 제작한 NiFe/FeMn/NiFe 3층박막의 버퍼층 Si에 따른 결정성 및 교환결합세기 향상)

  • Kim, Bo-Kyung;Kim, Ji-Hoon;Hwang, Do-Guwn;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.12 no.4
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    • pp.132-136
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    • 2002
  • Enhancement of crystallinity and exchange bias characteristics for NiFe/FeMn/NiFe trilayer with Si buffer layer fabricated by ion-beam deposition were examined. A Si buffer layer promoted (111) texture of fcc crystallities in the initial growth region of NiFe layer deposited on it. FeMn layers deposited on Si/NiFe bilayer exhibited excellent (111) crystal texture. The antiferromagnetic FeMn layer between top and bottom NiFe films with the buffer Si 50 ${\AA}$-thick induced a large exchange coupling field Hex with a different dependence. It was found that H$\sub$ex/ of the bottom and top NiFe films with Si buffer layer revealed large value of about 110 Oe and 300 Oe, respectively. In the comparison of two Ta and Si buffer layers, the NiFe/FeMn/NiFe trilayer with Si could possess larger exchange coupling field and higher crystallinity.

Positional Uncertainty Reduction of Overlapped Ultrasonic Sensor Ring for Efficient Mobile Robot Obstacle Detection (효율적인 이동로봇의 장애물 탐지를 위한 중첩 초음파 센서 링의 위치 불확실성 감소)

  • Kim, Sung-Bok;Lee, Sang-Hyup
    • Journal of the Institute of Convergence Signal Processing
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    • v.10 no.3
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    • pp.198-206
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    • 2009
  • This paper presents the reduction of the positional uncertainty of an ultrasonic sensor ring with overlapped beam pattern for the efficient obstacle detection of a mobile robot. Basically, it is assumed that a relatively small number of inexpensive low directivity ultrasonic sensors are installed at regular spacings along the side of a circular mobile robot with their beams overlapped. First, for both single and double obstacles, we show that the positional uncertainty inherent to an ultrasonic sensor can be reduced using the overlapped beam pattern, and also quantify the relative improvement in positional uncertainty. Second, given measured distance data from one or two ultrasonic sensors, we devise the geometric method to determine the position of an obstacle with respect to the center of a mobile robot. Third, we examine and compare existing ultrasonic sensor models, including Gaussian distribution, parabolic distribution, uniform distribution, and impulse, and then build the sensor model of overlapped ultrasonic sensors, adequate for obstacle detection in terms of positional uncertainty and computational requirement. Finally, through experiments using our prototype ultrasonic sensor ring, the validity of overlapped beam pattern for reduced positional uncertainty and efficient obstacle detection is demonstrated.

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Design of a Dual-mode Annular Ring Antenna with a Coupling Feed (커플링 급전을 이용한 이중 모드 Annular Ring 안테나 설계)

  • Kim, Jae-Hee;Woo, Dae-Woong;Park, Wee-Sang
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.4
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    • pp.351-356
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    • 2009
  • A dual-mode annular ring antenna for both global positioning system(GPS) and satellite digital multimedia broad-casting(DMB) is designed. The proposed antenna consists of a coupling feed line and four slots on the annular ring patch. The gap between the feed line and the annular ring patch is used for an input impedance matching, and the slot length is used for adjusting the resonant frequency of the $TM_{21}$ mode at the DMB frequency. The antenna was fabricated and measured. The experimental results show that the antenna resonants at the GPS and DMB frequencies with suitable bandwidths, and had a broadside radiation pattern at the GPS band and a conical beam radiation pattern at the DMB band.

A Study on Shape Measurement by Using Electronic Speckle Pattern Interferometry (전자 스페클 패턴 간섭법을 이용한 형상 측정에 관한 연구)

  • 강영준;김계성
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.10
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    • pp.156-164
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    • 1998
  • Electronic Speckle Pattern Interferometry(ESPI) has been used to measure surface deformations of engineering components and materials in industrial areas. ESPI, a non-contact and non-destructive technique, is capable of providing full-field results with high spatial resolution and high speed. One of the important application using electronic speckle pattern interferometry is electronic speckle contouring of a diffused object for 3-D shape analysis and topography measurement. Generally the electronic speckle contouring is suitable for providing measurement range from millimeters to several centimeters. In this study, we introduce the contouring method by modified dual-beam speckle pattern interferometer and the shift of the two illumination beams through optical fiber in order to obtain the contour fringe patterns. We also describe formation process of depth contour fringes and grid contour fringes by shifting direction of the two illumination beams. Before the experiments, we performed the geometric analysis for dual-beam-shifted ESPI contouring, and then, the electronic speckle contouring experiment with various specimens. For quantitative analysis of the contour fringes, we used 4-frame phase shifting method with PZT Finally, good agreement between the geometric analysis and experimetal results is obtained.

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Formation Mechanism of Cobalt Silicide by Solid Phase Reaction in Co/Ti/Si system (Co/Ti/Si 계에서 고상반응에 의한 Cobalt Silicide 형성기구 고찰)

  • Lee, Seung-Heon;Bae, Jun-Cheol;Sin, Dong-Won;Park, Chan-Gyeong
    • Korean Journal of Materials Research
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    • v.6 no.8
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    • pp.808-816
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    • 1996
  • (100) Si 기판위에 전자 빔 증착법을 이용하여$ 90\AA$두께의 Ti과 $120\AA$두께의 Co를 순차적으로 증착시켰다. 그 후 질소분위기하의 $350-900^{\circ}C$온도구간에서 급속열처리함으로써 (100) Si 기판위의 Co/Ti 이중 박막의 실리사이드화 반응이 일어나게 했으며 이를 XRD, AES, TEM을 이용하여 분석하였다. $500^{\circ}C$이하의 온도에서는 Co원자들이 Ti층쪽으로 빠르게 확산하여 Si와 반응하기 이전에 Ti원자들과 상호 혼합되어 어떠한 실리사이드도 형성되지 않았다. $500^{\circ}C$에서 열처리된 시편의 고분해능전자현미경 영상을 통해 Co-Ti 혼합층과 실리콘 기판과의 계면에서 (100)Si 기판과 정합관계를 가지는 CoSi2가 형성되었음을 확인했다. $600^{\circ}C$열처리에 의해 Co-Ti-Sitka성분 실리사이드가 형성되기 시작하였으며, 형성된 삼성분 실리사이드는 Ti의 out-diffusion에 의해 $900^{\circ}C$ 이상의 온도에서는 불안정하였다. Co/Ti이중 박막에 의해 형성된 CoSi2는 실리콘 기판과 평탄한 계면을 가지며 실리콘 기판에 대해 (100)우선성장방위를 가졌다.

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Characteristics of Chaff Echoes Observed by X-band Dual Polarization Radar (X-밴드 이중편파레이더에서 관측된 채프에코의 특성)

  • Seo, Eun-Kyoung;Park, Sora;Nam, Kyung-Yeub;Heo, Sol-Ip
    • Journal of the Korean earth science society
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    • v.34 no.1
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    • pp.1-12
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    • 2013
  • To effectively remove chaff echoes, which are often misidentified as precipitation echoes on weather radars, this study examines the relationship between the radar reflectivity and each of dual polarimetric parameters. The dual polarimetric parameters are collected only for the echo areas identified as chaff echoes on the NIMR X-band dual polarization radar. Overall, the polarimetric parameters (i.e., reflectivity, differential reflectivity, cross correlation coefficient, standard deviation of differential reflectivity and specific differential phase) for chaff echoes have a wider range of values than those for precipitation echoes and the chaff filaments tend to be horizontally oriented to radar beams. There appears to be a considerable overlap in the cross correlation coefficient range of chaff and precipitation echoes since some precipitation echoes have cross correlation coefficient lower than 0.8. Therefore, although the cross correlation coefficient is known to be a good variable in identifying and separating chaff echoes from precipitation echoes, it is suggested that additional care should be taken when using the cross correlation coefficient solely in removing chaff echoes.

Magnetoresistance of Single-type and Dual-type GMR-SV Multilayer Thin Films with Top and Bottom IrMn Layer (상부와 하부 IrMn층을 갖는 단일구조 및 이중구조 거대자기저항-스핀밸브 다층박막의 자기적 특성 비교 분석)

  • Choi, Jong-Gu;Kim, Su-Hee;Choi, Sang-Heon;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.27 no.4
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    • pp.115-122
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    • 2017
  • The antiferromagnet IrMn based four different GMR-SV multilayers on Corning glass were prepared by using ion beam deposition and DC magnetron sputtering system. The magnetoresistance (MR) properties for single-type and dual-type GMR-SV multilayer films were investigated through the measured major and minor MR curves. The exchange bias coupling field ($H_{ex}$) and coercivity ($H_c$) of pinned layer, the $H_c$ and interlayer exchange coupling field ($H_{int}$) of free layer for the dual-type structure GMR-SV multilayer films consisted of top IrMn layer were 410 Oe, 60 Oe, 1.6 Oe, and 7.0 Oe, respectively. The minor MR curve of two free layers was performed the squarelike feature having a MR ratio of 8.7 % as the sum of 3.7 % and 5.0 %. The value of average magnetic field sensitivity (MS) was maintained at 2.0 %/Oe. Also, the magnetoresistance properties of the single-type and dual-type structure GMR-SV multilayer films consisted of bottom IrMn layer were decreased more than those of top IrMn layer. Two antiparallel states of magnetization spin arrays of the pinned and free layers in the dual-type GMR-SV multilayer films occurred the maximum MR value by the effect of spin dependence scattering.

Bright Band Detection Using X-band Polarimetric Radar (X-밴드 이중편파 레이더에 의한 밝은 띠 탐지)

  • Lee, Dong-ryul;Jang, Bong-joo;Hwang, Seok Hwan;Han, Myeong-sun;No, Huiseong
    • Proceedings of the Korea Water Resources Association Conference
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    • 2016.05a
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    • pp.17-17
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    • 2016
  • 이중편파 레이더는 수평 수직반사도($Z_H{\cdot}Z_V$), 차등반사도($Z_{DR}$), 교차상관계수(${\rho}_{HV}$), 차등위상차(${\Phi}_{DP}$) 등 다양한 변수 산출을 통하여 대기 수상체 구분, 우적분포에 영향이 적은 강우량 추정, 밝은 띠(BB, Bright Band)의 탐지 등이 가능하게 됨으로써 수문기상 및 재해관리 분야에 활용성이 점점 더 커지고 있다. 본 연구는 RHI, PPI에서 생산된 레이더 변수를 이용하여 BB를 탐지하고 그 특성을 평가하였다. BB는 레이더를 이용하여 상층대기를 관측할 때 수직단면에서 강수입자가 눈에서 비로 변하는 구간에서 과대하게 높은 반사도가 나타나는 층을 말한다. BB에서는 QPE가 과대 추정되기 때문에, BB의 특성 파악은 레이더의 관측전략 수립과 QPE 보정에 필수적이다. 본 연구에서는 RHI에 의한 $Z_H$의 연직단면분석, RHI와 PPI의 고도각 경사거리(slant range) 빔의 ${\rho}_{HV}$, $Z_{DR}$, $Z_H$에 의한 분석을 통하여 BB의 상단부($BB_{TOP}$), 최정점($BB_{PEAK}$) 및 하단부($BB_{BOTTOM}$)의 고도를 상호 비교 평가하였다. 분석 자료는 KICT X-밴드 레이더에 의한 관측한 2015년 10월 21일의 층상운에 의한 강우를 이용하였다. RHI에 의한 $Z_H$의 연직단면 분석결과 $BB_{top}$, $BB_{bottom}$$BB_{peak}$는 KICT 레이더 고도(MSL : 40m)를 기준으로 각각 3.26Km, 2.3Km($BB_{width}$: 0.96km) 및 2.7Km로 나타났다. 이 같은 결과는 다른 2가지 분석방법에서도 유사하게 나타나고 있으며, 이는 BB분석을 위해 다양한 변수를 통한 신뢰성 있는 BB의 특성을 파악할 수 있는 기반을 제공한다.

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Design and Fabrication of A Wide-Band Dual-Polarization Stacked Patch Array Antenna for Satellite SAR Applications (위성 SAR용 광대역 이중편파 적층형 패치 배열 안테나 설계 및 제작)

  • Lee, Jae-Min;Yu, Je-Woo;Chae, Heeduck;Lee, YuRi;Jung, Hwa-Young;Kim, JongPil;Park, Jongkuk
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.20 no.2
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    • pp.72-78
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    • 2021
  • This paper proposes a wide-band dual-polarization stacked patch array antenna for satellite SAR system applications. The array antenna was designed for loss minimization and wide-band characteristics to enhance the performance of the SAR system and optimize it for active return loss in applications to active phased arrays. The fabricated array antenna showed a performance of 19.26%/19.79% fractional bandwidth within the -10 dB reference level of the active return loss and showed loss characteristics of 0.797 dB/0.799 dB averaged within the operational frequency for both H/V-polarization cases. The pattern performance was verified by comparing the measured patterns with the calculated patterns obtained by the array factor.