• Title/Summary/Keyword: 이온층 전류

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Fabrication and Electrical Characteristics of $p^{+}$-n Ultra Shallow Junction Diode with Co/Ti Bilayer Silicide (Co/Ti 이중막 실리사이드를 이용한 $p^{+}$-n극저접합 다이오드의 제작과 전기적 특성)

  • Chang, Gee-Keun;Ohm, Woo-Yong;Chang, Ho-Jung
    • Korean Journal of Materials Research
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    • v.8 no.4
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    • pp.288-292
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    • 1998
  • The p*-n ultra shallow junction diode with Co/Ti bilayer silicide was formed by ion implantation of $BF_{2}$ energy : 30KeV, dose : $5\times10^{15}cm^{-2}$] onto the n-well Si(100) region and RTA-silicidation of the evaporated Co($120\AA$)/Ti($40\AA$) double layer. The fabricated diode exhibited ideality factor of 1.06, specific contact resistance of $1.2\times10^{-6}\Omega\cdot\textrm{cm}^2$ and leakage current of $8.6\muA/\textrm{cm}^2$(-3V) under the reverse bias of 3V. The sheet resistance of silicided emitter region, the boron concentration at silicide/Si interface and the junction depth including silicide layer of ($500\AA$ were about $8\Omega\Box$, $6\times10^{19}cm^{-3}$, and $0.14\mu{m}$, respectively. In the fabrication of diode, the application of Co/Ti bilayer silicide brought improvement of ideality factor on the current-voltage characteristics as well as reduction of emitter sheet resistance and specific contact resistance, while it led to a little increase of leakage current.

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Optical properties and applications of $TiO_2$ films prepared by ion beam sputtering (이온빔 스퍼터링으로 증착한 $TiO_2$박막의 광학적 특성 및 응용)

  • 이정환;조준식;김동환;고석근
    • Journal of the Korean Vacuum Society
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    • v.11 no.3
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    • pp.176-182
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    • 2002
  • Amorphous $TiO_2$ thin films were deposited on glass substrates by ion beam sputtering in which the ratio of $O_2$/Ar gas used as discharged gas was varied from 0 to 2. After optical and microstructure properties and chemical composition of thin films was analyzed, antireflection coating layers were fabricated with $SiO_2$/$TiO_2$ multi-layers. Thin films deposition was performed at room temperature and ion beam voltage and ion current density for sputtering of target were fixed at 1.2 kV and 200 $\mu\textrm{A}/\textrm{cm}^2$, respectively. Refractive indexs of the deposited $TiO_2$films were 2.40-2.45 at a wavelength of 633 nm. $TiO_2$films had high transmission and stoichiometry when ratio of $O_2$/Ar was 1. Rms roughness of deposited $TiO_2$ film was below 7 $\AA$. In excessive $O_2$ environments, however Rms roughness increased over 50 $\AA$. Transmittance decreased by scattering of rough surface. Reflectance of $SiO_2$/$TiO_2$multi-layers was below 1% in visible light.

Leaching behavior of copper using electro-generated chlorine in hydrochloric acid solution (전해생성(電解生成)된 염소(鹽素)에 의한 구리의 침출(浸出) 거동(擧動))

  • Kim, Eun-Young;Kim, Min-Seuk;Lee, Jae-Chun;Jung, Jin-Ki
    • Resources Recycling
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    • v.15 no.6 s.74
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    • pp.33-40
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    • 2006
  • Leaching behavior of copper using electro-generated chlorine was investigated in hydrochloric acid solutions. When leached copper concentration was lower than 3.6g/L, the utilization efficiency of the electro-generated chlorine was close to 100% at $10mA/cm^2,\;25^{\circ}C$, 400 rpm in 1M HCl solutions. The concentration ot the leached copper over 3.6g/L caused the electrode potential to drop quietly, leading to a change or leaching mechanism. The leaching rate oi copper began to decrease at the concentration of copper 5.2g/L. This is probably due to the formation of a layer of CuCl on Cu metal in 1M HCl solutions. The leaching rate, however, was not retarded in a solution ot high chloride concentration. The high solubility of CuCl in the solution may prevent the formation of CuCl on Cu metal.

The Blending Effect of Electro-deposited Copper-indium-diselenide Particles on the Photovoltaic Properties of Poly(3-octylthiophene)/Fullerene Bulk Heterojunction Cells (폴리(옥틸티오펜)/풀러렌 벌크 이종접합의 광기전성에 미치는 CIS 입자의 블렌딩 효과)

  • Cho, Young-Don;Lee, Sun-Hyoung;Kim, Jeong-Soo
    • Polymer(Korea)
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    • v.34 no.1
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    • pp.84-87
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    • 2010
  • Copper-indium-diselenide (CIS) particles were prepared by the electrochemical reduction from the mixture solution of corresponding ion compounds. The prepared CIS was used as an insertion layer or a blending component in the organic photovoltaic bulk heterojunction cells composed of poly(3-octylthiophene) and fullerene. The increase of CIS content resulted in the rapid decrease of the open-circuit voltage as well as short-circuit current. The photovoltaic parameters were analyzed in relation to the structures, composition, and morphology of the photovoltaic blends.

A Study on the Flame Structure and Combustion Charactexistics of a Premixed Flame Stabilized by a Streamline Step( $\Pi$) (유선형 스텝에 의해 안정화된 예혼합화염의 구조와 연소특성에 관한 연구 ($\Pi$))

  • 이재득;최병륜
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.6
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    • pp.1661-1668
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    • 1990
  • In a turbulent premixed flame stabilized by the streamline step, and dominated by a coherent eddy, a flame micro-structure was investigated with analyzing the signals of temperature, the ion current, and schieren phtographs simultaneously. Generally the contours of large scale coherent eddies of schlieren photographs was considered as the flame front, however, the main reaction can be occurred within the eddy as a structure of fine flamelets scale. The surrounding burned gas of flamelets could not propagate to a unburned mixture, obstructing flamelets from propagating to a unburned mixture. Consequently, it could restrain flashback. The main reaction region was found to be located at higher temperature of the burned gas rather than at maximum rms of fluctuating temperature. The peak probability of higher temperature was 6 times greater than that of lower temperature. As it was difficult to infer a flame structure from PDF distribution of the fluctuating temperature in form of bimodal shape, it should be taken into consideration with other informations related to the sensitive flame front, for instance, ion current.

Synthesis and Electrochemical Characterization of The New Luminescent Metal-Chelate Complexes (새로운 금속 킬레이트 착물 발광체의 합성과 전기화학적 특성 연구)

  • Park, Jee Young;Choi, Don Soo;Kim, Young Kwan;Ha, Yun Kyoung
    • Journal of the Korean Chemical Society
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    • v.44 no.3
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    • pp.243-248
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    • 2000
  • Oganic electroluminescent devices (OELD) with multilayer structures have been studied actively for the application to a flat-panel display. Netal-chelate complexes hrboxylate. These complexes were characterized by FT-IR, MS/FAB, $^1$H-NMR, UV-vis and photoluminescence (PL). More importantly, the electrochemical gap (Eg), electron affinity(EA) and ionization potential (IP) of these complex films were investigated. Data from cyclic voltammetry(CV) were compared with the bandgap obtained from UV-vis and discussed. Further studies on the EL of these new materials are now in progress.

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Stability Improvement of Amorphous-InGaZnO Thin-Film-Transistors Based SnO2 Extended-Gate Filed-Effect-Transistor Using Microwave Annealing

  • Lee, In-Gyu;Im, Cheol-Min;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.420-420
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    • 2014
  • 최근, 과학 기술이 발달함에 따라 현장에서의 실시간 검사 및 자가 지단 등 질병 치유에 대한 사람들의 관심이 증가하고 있으며, 이에 따라 의료, 환경, 산업과 같은 많은 분야에서 바이오 센서에 대한 연구가 활발하게 이루어지고 있다. 그 중, EGFET는 전해질 속의 각종 이온 농도를 전기적으로 측정하는 바이오 센서로, 외부 환경으로부터 안전하고, 제작이 쉬우며, 재활용이 가능하여 비용을 절감 할 수 있다는 장점을 가지고 있다 [1]. EGFET는 감지부와 FET부로 분리된 구조를 가지고 있으며, 감지부의 감지막으로는 Al2O3, HfO2, $TiO_2$, SnO2 와 같은 다양한 물질들이 사용되고 있다. 그 중, SnO2는 우수한 감도와 안정성을 가지고 있는 물질로 추가적인 열처리 공정 없이도 우수한 감지 특성을 나타내기 때문에 본 연구에서 감지막으로 사용하였다. 한편, EGFETs 의 FET부로는 기존의 비정질 실리콘 TFTs 에 비해 10배 이상의 높은 이동도와 온/오프 전류비를 갖는 InGaZnO 를 채널층으로 사용한 TFTs 를 사용하였다. a-IGZO 는 넓은 밴드 갭으로 인해 가시광 영역에서 투명하며, 향후 투명 바이오센서 제작 시, 물질들 사이의 반응을 전기적 신호뿐만 아니라 광학적인 분석 방법으로도 검출이 가능하기에 고 신뢰성을 갖는 센서의 제작이 가능할 것으로 기대된다. 한편, a-IGZO TFTs 의 경우 우수한 전기적 특성을 나타냄에도 불구하고 소자 동작 시 문턱 전압이 불안정하다는 단점이 있으며 [2], 이러한 문제의 개선과 향후 투명 기판 위에서의 소자 제작을 위해서는 저온 열처리 공정이 필수적이다. 따라서, 본 연구에서는 저온 열처리 공정인 u-wave 열처리를 통하여 a-IGZO TFTs 의 전기적 특성 및 안정성을 향상시켰으며, 9.51 [$cm2/V{\cdot}s$]의 이동도와 135 [mV/dec] 의 SS값, 0.99 [V]의 문턱 전압, 1.18E+08의 온/오프 전류 비를 갖는 고성능 스위칭 TFTs 를 제작하였다. 최종적으로, 제작된 a-IGZO TFTs 를 SnO2 감지막을 갖는 EGFETs 에 적용함으로써 우수한 감지 특성과 안정성을 갖는 바이오 센서를 제작하였다.

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용액 방법을 사용한 TIZO 박막 트랜지스터 제작 및 전기적 특성 조사

  • Seo, Ga;Jeong, Ho-Yong;Lee, Se-Han;Kim, Tae-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.400-400
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    • 2012
  • 산화물 반도체는 넓은 에너지갭을 가지고 높은 이동성과 높은 투명성을 가지기 때문에 초고 속 박막 트랜지스터(Thin film transistor; TFT)에 많이 응용되고 있다. 그러나 ZnO 및 $In_2O_3$ 산화물 반도체를 박막트랜지스터에 사용할 경우 소자가 불안정하여 전기적 성질이 저하되고 문턱전압의 이동이 일어난다. TFT에 사용되는 산화물 반도체로는 GaInZnO, ZrInZnO, HfInZnO 및 GaSnZnO의 전기적 특성에 관한 연구가 많이 되었다. 그러나 titanium-indium-zinc-oxide (TIZO) TFT에 대한 연구는 비교적 적게 수행 되었다. 본 연구에서는 TFTs의 안정성을 향상하기 위하여 TFT의 채널로 사용되는 TiInZnO를 형성하는데 간단한 제조 공정과 낮은 비용의 용액 증착방법을 사용하였다. 졸-겔 전해액은 Titanium (IV) isopropoxide $[Ti(OCH(CH_3)_2)_4]$, 0.1 M Zinc acetate dihydrate $[Zn(CH_3COO)_2{\cdot}2H_2O]$ 그리고 indium nitrate hydrate $[In(NO_3)_3{\cdot}xH_2O]$을 2-methoxyethanol의 용액에 합성하였다. $70^{\circ}C$에서 한 시간 동안 혼합 하였다. Ti의 몰 비율은 10%, 20% 및 40% 로 각각 달리하여 제작하였다. $SiO_2$층 위에 2,500 rpm 속도로 25초 동안 스핀 코팅하여 TFT를 제작하였다. TIZO 박막에 대한 X-선 광전자 스펙트럼 관측 결과는 Ti 몰 비율이 증가함에 따라 Ti 2p1/2피크의 세기가 증가함을 보여주었다. TiZO 박막에 Ti 원자를 첨가하면 $O^{2-}$ 이온이 감소하기 때문에 전하의 농도가 변화하였다. 전하 농도의 변화는 TiZO 채널을 사용하여 제작한 TFT의 문턱전압을 양 방향으로 이동 하였으며 off-전류를 감소하였다. TiZO 채널을 사용하여 제작한 TFT의 드레인 전류-게이트 전압 특성은 on/off비율이 $0.21{\times}107$ 만큼 크며 이것은 TFT 소자로서 우수한 성능을 보여주고 있다.

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Time-resolved Analysis for Electroconvective Instability under Potentiostatic Mode (일정 전위 모드에서의 전기와류 불안정성에 대한 시간-분해 해석)

  • Lee, Hyomin
    • Korean Chemical Engineering Research
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    • v.58 no.2
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    • pp.319-324
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    • 2020
  • Electroconvective instability is a non-linear transport phenomenon which can be found in ion-selective transport system such as electrodialysis, Galvanic cell and electrolytic cell. The instability is triggered by the fluctuation of space charge layer in adjacent of ion-selective surface, leading to increase of mass transport rate. Thus, in the aspect of mass transport, the instability has an important meaning. Although recent experimental techniques have opened up an avenue to direct visualize the instability, fundamental investigations have been conducted in limited area due to several experimental limitations. In this work, the electroconvective instability under potentiostatic mode was solved by numerical method in order to demonstrate correlation between current-time curve and the instability behavior. By rigorous time-resolved analysis, the transition behaviors can be divided into three stages; formation of space charge layer - growth of electroconvective instability - steady state. Furthermore, scaling laws of transition time were numerically obtained according to applied voltage as well.

Voltammetric Sensor Incorporated with Conductive Polymer, Tyrosinase, and Ionic Liquid Electrolyte for Bisphenol F (전도성고분자, 티로시나아제 효소 및 이온성 액체 전해질을 융합한 전압전류법 기반의 비스페놀F 검출 센서)

  • Sung Eun Ji;Sang Hyuk Lee;Hye Jin Lee
    • Applied Chemistry for Engineering
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    • v.34 no.3
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    • pp.258-263
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    • 2023
  • In this study, conductive polymers and the enzyme tyrosinase (Tyr) were deposited on the surface of a screen printed carbon electrode (SPCE), which can be fabricated as a disposable sensor chip, and applied to the detection of bisphenol F (BPF), an endocrine disruptor with proven links to male diseases and thyroid disorders, using electrochemical methods. On the surface of the SPCE working electrode, which was negatively charged by oxygen plasma treatment, a positively charged conductive polymer, poly(diallyldimethyl ammonium chloride) (PDDA), a negatively charged polymer compound, poly(sodium 4-styrenesulfonate) (PSS), and another layer of PDDA were layered by electrostatic attraction in the order of PDDA, PSS, and finally PDDA. Then, a layer of Tyr, which was negatively charged due to pH adjustment to 7.0, was added to create a PDDA-PSS-PDDA-Tyr sensor for BPF. When the electrode sensor is exposed to a BPF solution, which is the substrate and target analyte, 4,4'-methylenebis(cyclohexa-3,5-diene-1,2-dione) is generated by an oxidation reaction with the Tyr enzyme on the electrode surface. The reduction process of the product at 0.1 V (vs. Ag/AgCl) generating 4,4'-methylenebis(benzene-1,2-diol) was measured using cyclic and differential pulse voltammetries, resulting in a change in the peak current with respect to the concentration of BPF. In addition, we compared the detection performance of BPF using an ionic liquid electrolyte as an alternative to phosphate-buffered saline, which has been used in many previous sensing studies. Furthermore, the selectivity of bisphenol S, which acts as an interfering substance with a similar structure to BPF, was investigated. Finally, we demonstrated the practical applicability of the sensor by applying it to analyze the concentration of BPF in real samples prepared in the laboratory.