• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.218.2-218.2
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• 2014

그래핀은 높은 전기 전도도와 열전도도, 기계적 강도를 가지고 있고 동시에 높은 전자이동도($200,000cm^2{\cdot}V{\cdot}^1{\cdot}s{\cdot}^1$) 특성을 갖는 물질로써 차세대 소재로 각광받고 있다. 하지만 그래핀을 소자에 응용하기 위해서는 전사공정과 lithography 공정 과정에서 발생되는 PMMA(Poly methyl methacrylate) residue를 완벽하게 제거해야 하는 문제점이 있다. 특히, lithography 공정 중 완벽하게 PMMA residue 가 제거되지 않고 잔류해 있을 경우에 소자의 life time, performance에 악영향을 준다는 보고가 있다. 이와같은 문제를 해결하기 위해 화학적 cleaning, 열처리를 통한 cleaning, 전류 인가에 의한 cleaning과 같은 방법들을 이용하여 그래핀의 PMMA residue를 제거하는 공정들이 보고되고 있지만, 화학적 cleaning 방법의 경우 chloroform 이라는 독성물질 사용으로 인해 산업적으로 응용이 어렵고, 열처리 방법은 전극 등의 금속이 $200^{\circ}C$ 이상의 높은 온도에서 장시간 노출될 경우 쉽게 손상을 입으며, 전류 인가에 의한 cleaning 방법은 국부적으로만 효과를 볼 수 있기 때문에 lithography 공정 후 PMMA residue를 효과적으로 제거하기에는 한계를 보이고 있다. 본 연구에서는 Ar을 이용하는 Ion beam 시스템을 통해 beam energy를 제어함으로써 PMMA residue를 효과적으로 제거하는 연구를 진행하였다. 최적화된 플라즈마 발생 조건을 찾기 위해 QMS(Quadrupole Mass Spectrometer)를 이용하여 입사하는 ion energy와 flux 양을 컨트롤 하였고, 250 W에서 최적화된 ion energy distribution 영역이 존재한다는 것을 확인할 수 있었다. 또한, 25 Gauss 정도의 electro-magnetic field를 이용하여 Ar의 ion energy를 10 eV 이하로 낮추어 damage를 최소화함으로써 효과적으로 그래핀을 cleaning 할 수 있었다. Cleaning과정에서 ion bombardment에 의해 발생한 damage는 $250^{\circ}C$에서 6시간 동안 annealing 공정을 거치면서 회복되는 것을 Raman spectroscopy의 D peak ($1335cm{\cdot}^1$) / G peak ($1572cm{\cdot}^1$) ratio 로 확인할 수 있었고, PMMA residue의 cleaning 여부는 G peak ($1580cm{\cdot}^1$)의 blue shift와 2D peak ($2670cm{\cdot}^1$)의 red shift를 통해 확인하였다. 그리고 AFM (Atomic Force Microscopy)을 이용하여 cleaning 공정과정에서 RMS roughness가 4.99 nm에서 2.01 nm로 감소하는 것을 관찰하였다. 마지막으로, PMMA residue의 cleaning 정도를 정량적으로 분석하기 위해 XPS (X-ray Photoelectron Spectroscopy)를 이용하여 sp2 C-C bonding이 74.96%에서 87.66%로 증가함을 확인을 할 수 있었다.

• Progress in Medical Physics
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• v.19 no.1
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• pp.80-88
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• 2008

Recent radiotherapy dose planning system (RTPS) generally adapted the kernel beam using the convolution method for computation of tissue dose. To get a depth and profile dose in a given depth concerened a given photon beam, the energy spectrum was reconstructed from the attenuation dose of transmission of filter through iterative numerical analysis. The experiments were performed with 15 MV X rays (Oncor, Siemens) and ionization chamber (0.125 cc, PTW) for measurements of filter transmitted dose. The energy spectrum of 15MV X-rays was determined from attenuated dose of lead filter transmission from 0.51 cm to 8.04 cm with energy interval 0.25 MeV. In the results, the peak flux revealed at 3.75 MeV and mean energy of 15 MV X rays was 4.639 MeV in this experiments. The results of transmitted dose of lead filter showed within 0.6% in average but maximum 2.5% discrepancy in a 5 cm thickness of lead filter. Since the tissue dose is highly depend on the its energy, the lateral dose are delivered from the lateral spread of energy fluence through flattening filter shape as tangent 0.075 and 0.125 which showed 4.211 MeV and 3.906 MeV. In this experiments, analyzed the energy spectrum has applied to obtain the percent depth dose of RTPS (XiO, Version 4.3.1, CMS). The generated percent depth dose from $6{\times}6cm^2$ of field to $30{\times}30cm^2$ showed very close to that of experimental measurement within 1 % discrepancy in average. The computed dose profile were within 1% discrepancy to measurement in field size $10{\times}10cm$, however, the large field sizes were obtained within 2% uncertainty. The resulting algorithm produced x-ray spectrum that match both quality and quantity with small discrepancy in this experiments.

• Journal of the Korean Society for Marine Environment & Energy
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• v.8 no.2
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• pp.60-66
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• 2005

When external pressure higher than osmosis pressure is reversely derived into solution, its solvent is moved into the solution having lower concentration, which is called 'reverse osmosis'. We investigated the desalination application of deep ocean water using reverse osmosis pressure of $40-70\;kgf/cm^2$ We observed how to operational factor j like flow rate, water temperature and pressure have effect on efficiency of reverse osmosis membrane and salts rejection. Fluxes of reverse osmosis membrane are directly proportional to water temperature and pressure. However, salts rejection rates are positively correlated with pressure and inversely proportional to water temperature. Separation efficiencies of osmosis membrane for major elements such as $Mg^{2+},\;Ca^{+2},\;Na^+\;and\;K^+$ are as follows in a strong electrolysis solution like seawater; $Ca^{2+},\;Mg^{2+}>K^+>Na^+$. Rejection rates of $Mg^{2+}\;and\;Ca^{2+}$ that have high electric charges are over 99% and show positively correlation with water temperature. Rejection rates of $Na^+$ having low electric charge is observed to be 98%-99%, which rates is much lower than those of $2^+$ charged ions like $Ca^{2+}\;and\;Mg^{2+}$. Ion rejection rates of boron, B, are much low because boron is present il free state or gas phase in seawater. Boron concentration in desalination water is over criteria of Korean drinking water, 0.3 mg/L. However, we could satisfied with the criteria of drinking water under the operation condition like temperature $5^{\circ}C$ and pressure $70kgf/cm^2$, using the relationship that rejection rates of boron is proportional to pressure and is inversely proportional to water temperature

• Journal of the Korean Society of Radiology
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• v.9 no.5
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• pp.295-300
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• 2015

There are various type of particle accelerators such as Kyoungju 100-MeV proton beam accelerator in Korea. And Korea plans to build large particle accelerator such as heavy ion accelerator and 4th generation light source facility. The accelerated high energy particles of these facility produce 2nd neutron after nuclear reaction with target materials. And then these 2nd neutron activate structural materials and surrounding environment. Accordingly, it is important to consider the activation and shielding calculation on design of facility for safety operation. In this study, we tried to calculate and compare the neutron flux from the interaction $^{la}150$ beam with target material(Cu) according to thickness of iron and concrete shielding material by MCNPX 2.7 with nuclear library JENDL/HE 07and la150. To verify the properties of nuclear library, we compared computational results with experimental value. These results can be used for dose evaluation technology in planning of the shielding of large particle accelerator.

• Journal of Conservation Science
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• v.38 no.2
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• pp.117-123
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• 2022

In this study, investigated the possibility of quantitatively and qualitatively analyzing Korean ancient glasses via Raman Spectroscopy. We subjected four categories of Korean traditional glasses, namely, lead-BaO, lead, potash, and soda glasses (3, 3, 10, and 10 pieces, respectively), to this analytical technique. The results showed significant differences between the stretching and bending Raman vibration regions corresponding to these different Korean ancient glass types. Specifically, the stretching vibration regions corresponding to lead-BaO and lead glasses showed peaks at 1040 and 1000 cm^-1, respectively; the stretching vibration region of normal glass appears at 1100 cm^-1. The bending vibration regions corresponding to potash and soda glass showed Raman peaks at 490 and 560 cm^-1, respectively. Furthermore, the Raman spectra of the lead and lead-BaO glasses showed red shifts, which depended on the amount of PbO present. Thus, our findings highlighted the possibility of quantitatively determining the amount of PbO, a major component of lead glasses, via Raman Spectroscopy.