• 한국생산제조학회지
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• 제24권4호
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• pp.414-420
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• 2015

In this study, the linear quadratic Guassian loop transfer recovery (LQG/LTR) control technique was combined with an integrator and applied to an inchworm having piezoelectric actuators for precise motion tracking. The piezoelectric actuator showed nonlinear response characteristics, including hysteresis, due to its ferroelectric characteristics and the residual displacement phenomenon. This paper proposes a feedback control scheme using the LQG/LTR controller with an integrator to improve the ability to track the response to complex input signals and to suppress the phenomenon of hysteresis and residual vibration. Experimental results show that the developed feedback control system for an inchworm can track the various motion contours quickly without residual vibration or overshoot.