• Title/Summary/Keyword: 이송장치

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Reduction of Residual Vibration in Wafer Positioning System Using Input Shaping (입력성형을 통한 웨이퍼 이송장치의 잔류진동 감쇠)

  • Yim, Jae-Chul;Ahn, Tae-Kil;Cho, Jung-Keun
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2005.11a
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    • pp.559-563
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    • 2005

  • The wafer positioning robot used in the semiconductor industry is required to operate at high speed for the improvement of productivity. However, the residual vibration produced by the high speed of the wafer positioning robot makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the optimization of the cycle time. The followings are the process for the reduction and the optimization; 1)System modeling of wafer positioning robot, 2)Verification of dynamic characteristic of wafer positioning robot, 3)Input shaping plan using impulse response reiteration, 4)Simulation test using simulink, 6)Analysis of result.

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A Study on Radiation Heat Transfer of Wafer Transfer Module Using Computational Flow Visualization (전산유동가시화를 활용한 웨이퍼 이송장치의 복사열전달에 관한 연구)

  • Min Gi, Chu;Ji Hong, Chung;Dong Kee, Sohn;Han Seo, Ko
    • Journal of the Korean Society of Visualization
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    • v.20 no.3
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    • pp.58-66
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    • 2022

  • The high heat emitted from the process module and heat jacket may cause errors in semiconductor process equipment. Barriers were designed to reduce the temperature of surface on transfer module. A designed barrier was compared and analyzed by numerical analysis using ANSYS Fluent. The average temperature of barrier and effect of radiation heat transfer were also compared through absorbed radiative heat flux of the barrier. The adoption of the barrier had an effect on the radiative heat transfer reduction of the transfer module rod. The effect of the angles of barrier from 50° to 90° on the heat transfer was investigated using the absorbed radiative heat flux with the average temperature. The angle of barrier of 50° reduced the temperature up to 9.6 %.

  • https://doi.org/10.5407/jksv.2022.20.3.058 인용 PDF KSCI

울진 3,4호기 핵연료취급계통의 효율성 분석

  • 장병일;신태명;김인용
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05a
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    • pp.614-619
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    • 1996

  • 핵연료취급계통 설계를 평가할 수 있는 주요 기준 중 효율성 관점에서 울진 3,4호기의 핵연료취급계통을 분석하여 노심을 재장전하는데 소요되는 시간을 줄일 수 있는 방법을 기기설계와 그 운영측면에서 제시하였다. 핵연료재장전기와 사용후연료취급기는 이송기기의 핵연료삽입구에서 인양기의 속도개선이 요구되고, 이송기기는 핵연료재장전기 및 사용후연료취급기와의 연동장치 변경, 이송속도 및 직립기 회전속도의 개선이 요구되는 것으로 파악되었다.

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